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公开(公告)号:US20100189942A1
公开(公告)日:2010-07-29
申请号:US12664804
申请日:2008-06-13
申请人: Takumi Tamura , Shinji Hiramoto , Keiji Hamamoto , Takuya Tsuji
发明人: Takumi Tamura , Shinji Hiramoto , Keiji Hamamoto , Takuya Tsuji
CPC分类号: B32B27/08 , A61J1/035 , B32B3/28 , B32B7/12 , B32B15/08 , B32B15/20 , B32B27/304 , B32B27/306 , B32B27/308 , B32B27/32 , B32B27/322 , B32B27/325 , B32B2307/31 , B32B2307/40 , B32B2307/7244 , B32B2307/7246 , B32B2439/00 , B32B2439/70 , B32B2439/80 , Y10T156/10 , Y10T428/1355 , Y10T428/1379 , Y10T428/26 , Y10T428/31544 , Y10T428/31909 , Y10T428/31931 , Y10T428/31938
摘要: A blister packaging multilayer resin film is used to produce a blister package in which an item is sealed between a support substrate and the multilayer resin film, wherein the multilayer resin film includes an oxygen barrier layer that is arranged on a side of the multilayer resin film which side faces the support substrate, and a moisture proof layer that is arranged on a side of the oxygen barrier layer which side does not face the support substrate.
摘要翻译: 使用泡罩包装多层树脂膜来制造其中物品被密封在支撑基板和多层树脂膜之间的泡罩包装,其中多层树脂膜包括布置在多层树脂膜侧的氧阻隔层 所述侧面朝向所述支撑基板,所述防潮层配置在所述氧阻隔层的不与所述支撑基板相对的一侧。
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公开(公告)号:US4923352A
公开(公告)日:1990-05-08
申请号:US291757
申请日:1988-12-29
IPC分类号: B23Q41/00 , B25J19/00 , B25J21/00 , F24F7/06 , H01L21/00 , H01L21/02 , H01L21/304 , H01L21/677
CPC分类号: H01L21/67775 , B25J21/005 , H01L21/67772 , Y10S414/139 , Y10S414/14 , Y10T29/53096
摘要: In semiconductor production plants a highly clean state is required. In a plant building, through which air is forcibly circulated, a clean room in a low or medium cleanliness state is formed using a filter. A plurality of processing units are provided in the clean room and held in a high cleanliness state. A transport robot transfers a workpiece or like object to and from each processing unit. The robot is capable of being driven to positions corresponding to the processing units and holds the workpiece or object in a highly clean state. Thus, there is no need of holding the entire building highly clean, and only a required part of the building may be held in a highly clean state, which is advantageous from the standpoint of cost.
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