公开(公告)号：US20120192937A1

公开(公告)日：2012-08-02

申请号：US13016460

申请日：2011-01-28

申请人： Mariappan Parans Paranthaman ,  Sung-Hun Wee ,  Frederick A. List, III ,  Claudia Cantoni ,  Lee Heatherly, JR. ,  Kyunghoon Kim ,  Thomas R. Fanning ,  Jon Bornstein

发明人： Mariappan Parans Paranthaman ,  Sung-Hun Wee ,  Frederick A. List, III ,  Claudia Cantoni ,  Lee Heatherly, JR. ,  Kyunghoon Kim ,  Thomas R. Fanning ,  Jon Bornstein

IPC分类号： H01L31/02 ,  H01L31/0368

CPC分类号： H01L31/03921 ,  H01L31/02366 ,  H01L31/182 ,  Y02E10/546 ,  Y02P70/521

摘要： A thin film structure for photovoltaic applications includes a biaxially textured metal substrate; a seed layer epitaxially disposed on the metal substrate; a barrier layer comprising SrTiO3 epitaxially disposed on the seed layer; a cap layer comprising γ-Al2O3 epitaxially disposed on the SrTiO3 barrier layer; and a crystalline silicon layer epitaxially disposed on the cap layer, where the cap layer comprises a volume fraction of biaxial texture of at least about 80% and the crystalline silicon layer does not include a metal silicide phase.

摘要翻译： 用于光伏应用的薄膜结构包括双轴织构的金属基底; 外延地设置在所述金属基板上的籽晶层; 外延地设置在种子层上的包含SrTiO 3的阻挡层; 包含外延设置在SrTiO3阻挡层上的γ-Al2O3的覆盖层; 以及外延地设置在所述盖层上的晶体硅层，其中所述盖层包括至少约80％的双轴织构的体积分数，并且所述晶体硅层不包括金属硅化物相。