METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER LON BEAM AND SOLID SURFACE SMOOTHING APPARATUS
    1.
    发明申请
    METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER LON BEAM AND SOLID SURFACE SMOOTHING APPARATUS 有权
    用气体聚束灯和固体表面吸收装置吸收固体表面的方法

    公开(公告)号:US20100230616A1

    公开(公告)日:2010-09-16

    申请号:US12312203

    申请日:2007-10-30

    IPC分类号: H01J37/305 H01J37/302

    摘要: Surface roughness having intervals of several tens of nanometers to about a hundred micrometers in a solid surface is reduced by directing a gas cluster ion beam to the surface. An angle formed between the normal to the solid surface and the gas cluster ion beam is referred to as an irradiation angle, and an irradiation angle at which the distance of interaction between the solid and the cluster colliding with the solid dramatically increases is referred to as a critical angle. A solid surface smoothing method includes an irradiation step of directing the gas cluster ion beam onto the solid surface at an irradiation angle not smaller than the critical angle. The critical angle is 70°.

    摘要翻译: 通过将气体团簇离子束引导到表面,在固体表面中具有数十纳米至约百微米间隔的表面粗糙度被减小。 被称为固体表面和气体团簇离子束的法线之间的角度被称为照射角度,并且固体和团簇与固体之间的相互作用距离急剧增加的照射角度被称为 一个临界角。 固体表面平滑化方法包括将气体团簇离子束以不小于临界角的照射角度引导到固体表面的照射步骤。 临界角为70°。