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公开(公告)号:US20110278533A1
公开(公告)日:2011-11-17
申请号:US11933494
申请日:2007-11-01
IPC分类号: H01L29/06 , B05D5/00 , B05D3/00 , B32B3/00 , H01L21/208 , B32B5/18 , B82Y30/00 , B82Y99/00 , B82Y40/00
CPC分类号: B81B7/0006 , B81B2201/0214 , G01N27/4075 , H01L21/02562 , H01L21/02568 , H01L21/02628 , H01L21/02639 , Y10T428/12007 , Y10T428/24496 , Y10T428/249979
摘要: A method of forming a nanoporous film is disclosed. The method comprises forming a coating solution including clusters, surfactant molecules, a solvent, and one of an acid catalyst and a base catalyst. The clusters comprise inorganic groups. The method further comprises aging the coating solution for a time period to select a predetermined phase that will self-assemble and applying the coating solution on a substrate. The method further comprises evaporating the solvent from the coating solution and removing the surfactant molecules to yield the nanoporous film.
摘要翻译: 公开了一种形成纳米多孔膜的方法。 该方法包括形成包括簇,表面活性剂分子,溶剂以及酸催化剂和碱催化剂之一的涂布溶液。 簇包含无机基团。 该方法还包括使涂布溶液老化一段时间,以选择将自组装并将涂布溶液涂布在基材上的预定相。 该方法还包括从涂布溶液中蒸发溶剂并除去表面活性剂分子以产生纳米多孔膜。
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公开(公告)号:US08080483B2
公开(公告)日:2011-12-20
申请号:US11933494
申请日:2007-11-01
IPC分类号: H01L21/469 , H01L21/31
CPC分类号: B81B7/0006 , B81B2201/0214 , G01N27/4075 , H01L21/02562 , H01L21/02568 , H01L21/02628 , H01L21/02639 , Y10T428/12007 , Y10T428/24496 , Y10T428/249979
摘要: A method of forming a nanoporous film is disclosed. The method comprises forming a coating solution including clusters, surfactant molecules, a solvent, and one of an acid catalyst and a base catalyst. The clusters comprise inorganic groups. The method further comprises aging the coating solution for a time period to select a predetermined phase that will self-assemble and applying the coating solution on a substrate. The method further comprises evaporating the solvent from the coating solution and removing the surfactant molecules to yield the nanoporous film.
摘要翻译: 公开了一种形成纳米多孔膜的方法。 该方法包括形成包括簇,表面活性剂分子,溶剂以及酸催化剂和碱催化剂之一的涂布溶液。 簇包含无机基团。 该方法还包括使涂布溶液老化一段时间,以选择将自组装并将涂布溶液涂布在基材上的预定相。 该方法还包括从涂布溶液中蒸发溶剂并除去表面活性剂分子以产生纳米多孔膜。
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