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公开(公告)号：US12123776B2
公开(公告)日：2024-10-22
申请号：US17824635
申请日：2022-05-25
发明人： Wen-Yu Shih , Hsin-Yi Hsieh , Lai-Hung Lai , Po-Han Fu , Chin-Chuan Hsieh
CPC分类号： G01J3/2803 , G01J3/0208 , G01J3/0291 , G02B1/11 , G02B5/1866
摘要： A spectrometer includes a plurality of photodetectors, an anti-reflection layer, a grating layer, a distant layer, and a collimator. The anti-reflection layer is disposed on the plurality of photodetectors. The grating layer is disposed above the anti-reflection layer and includes a plurality of grating structures to spread a light into a spectrum to the plurality of photodetectors through the distant layer. The distant layer continuously extends from the grating layer to the anti-reflection layer, the distant layer has a thickness in a range from 400 μm to 2000 μm, and a refractive index of the grating layer is greater than a refractive index of the distant layer. The collimator is disposed above the grating layer, in which the collimator is configured to confine an incident angle of the light from a first micro-lens.
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公开(公告)号：US20240047249A1
公开(公告)日：2024-02-08
申请号：US17879651
申请日：2022-08-02
发明人： Yi-Feng YEN , Shih-Lung HSU , Kuo-Hsing TENG , Cheng-Hsiung TUNG
IPC分类号： H01L21/673 , H01L21/677
CPC分类号： H01L21/67333 , H01L21/6773
摘要： A transfer system for wafer cassettes includes a tray and a rail compatible with the tray. The tray includes a base plate, a through hole, a wall, and a pair of first positioning features. The through hole is disposed on a center of the base plate, in which the through hole has a first direction axis and a second direction axis perpendicular to the first direction axis. The wall extends from a surface of the base plate and surrounding the through hole, in which the wall separates the base plate into an interior region and an exterior region. The pair of first positioning features having a first level height are in the interior region and arranged parallel to the first direction axis.
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公开(公告)号：US11662525B1
公开(公告)日：2023-05-30
申请号：US17547021
申请日：2021-12-09
发明人： Hsin-Yi Hsieh , Chin-Chuan Hsieh
摘要： An optical system includes a light module, an optical element on a first grating coupler, and a second grating coupler. The light module emits three beams from different positions. The optical element is below the light module and is configured to change incident angles of the three beams and to focus the three beams at the same region of the first grating coupler. The first grating coupler is below the optical element and is configured to couple the three beams into a light-guide substrate. The light-guide substrate is connected to the first grating coupler and is configured to transmit the three beams. The second grating coupler is connected to the light-guide substrate and is configured to enable the three beams departing from the light-guide substrate after the three beams have traveled the same optical path.
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公开(公告)号：US20240274634A1
公开(公告)日：2024-08-15
申请号：US18169126
申请日：2023-02-14
发明人： Hao-Wei LIU , Sheng-Chuan CHENG , Ching-Chiang WU
IPC分类号： H01L27/146 , H04N25/11
CPC分类号： H01L27/14629 , H01L27/14621 , H04N25/11 , G02B5/201
摘要： An image sensor includes a first unit. The first unit includes a first photodiode having a first dimension, a second photodiode disposed adjacent the first photodiode and having a second dimension that is greater than the first dimension, a first color filter overlapping the first photodiode and the second photodiode, and a first internal reflector disposed in the first color filter and overlapping the first photodiode. The first internal reflector has an inclined light receiving surface inclined from a top surface of the first color filter toward the second photodiode, and a refraction index of the first internal reflector is smaller than a refraction index of the first color filter.
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公开(公告)号：US20240194711A1
公开(公告)日：2024-06-13
申请号：US18064296
申请日：2022-12-12
发明人： Chun-Yuan WANG , Po-Hsiang WANG , Han-Lin WU , Hung-Jen TSAI
IPC分类号： H01L27/146 , G02B1/00
CPC分类号： H01L27/14621 , G02B1/002
摘要： An optical device includes a photoelectric conversion layer, an anti-reflection layer, an underlying layer, a bottom meta layer, and a top meta layer. The photoelectric conversion layer includes a plurality of photodiodes. The anti-reflection layer is disposed on the photoelectric conversion layer. The underlying layer is disposed on the anti-reflection layer. The bottom meta layer is disposed on the underlying layer and includes a plurality of bottom meta units and a filling between the bottom meta units, in which the filling is continuously extend from the underlying layer, and a material of the filling is the same as a material of the underlying layer. The top meta layer is disposed above the bottom meta layer and includes a plurality of top meta units and a plurality of air recesses, in which the plurality of air recesses are respectively disposed between two adjacent top meta units.
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公开(公告)号：US11869910B1
公开(公告)日：2024-01-09
申请号：US18193152
申请日：2023-03-30
发明人： Ching-Hua Li , Zong-Ru Tu , Po-Hsiang Wang , Han-Lin Wu
IPC分类号： H01L27/146
CPC分类号： H01L27/14621 , H01L27/1463 , H01L27/14627 , H01L27/14645
摘要： The present disclosure provides a light sensing element including a unit. The unit includes a plurality of photodiodes, a color filter disposed above the photodiodes, and a light host embedded in the color filter. The light host is a hollow structure disposed above the photodiodes. The color filter includes a first portion surrounding the light host, a second portion surrounded by the light host, and a third portion covering and physically contacting the first portion, the light host, and the second portion.
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公开(公告)号：US20240322056A1
公开(公告)日：2024-09-26
申请号：US18187484
申请日：2023-03-21
发明人： Shin-Hong KUO , Kai-Hao CHANG , Po-Hsiang WANG , Han-Lin WU , Hung-Jen TSAI
IPC分类号： H01L31/0352 , H01L31/0256 , H01L31/042
CPC分类号： H01L31/0352 , H01L31/0256 , H01L31/042
摘要： An optical device includes a photoelectric conversion layer, an underlying layer, an anti-reflection layer, and a plurality of meta units. The underlying layer is disposed on the photoelectric conversion layer. The anti-reflection layer is disposed on the underlying layer. The meta units are disposed above the photoelectric conversion layer, in which each of the meta units includes a top portion and a bottom portion, and a projection of the bottom portion on the photoelectric conversion layer is within a projection of the top portion on the photoelectric conversion layer.
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公开(公告)号：US20240145511A1
公开(公告)日：2024-05-02
申请号：US17974491
申请日：2022-10-26
发明人： Jian-Wen LUO , Yu-Chi CHANG , Zong-Ru TU , Po-Hsiang WANG
IPC分类号： H01L27/146
CPC分类号： H01L27/1463 , H01L27/14607 , H01L27/14621 , H01L27/14623 , H01L27/14627 , H01L27/14645
摘要： An image sensor includes a first sensing unit. The first sensing unit includes a pair of photodiodes formed in a substrate and spaced by a deep trench isolation structure, an outer grid over the pair of photodiodes, a color filter filled in the outer grid, and an inner grid disposed in the color filter. The color filter overlaps the pair of photodiodes. The inner grid includes a first spacer, wherein the first spacer is rotated relative to the deep trench isolation structure.
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公开(公告)号：US20240021639A1
公开(公告)日：2024-01-18
申请号：US18319310
申请日：2023-05-17
发明人： Yi-Hua CHIU , Wei-Ko WANG , Shih-Liang KU
IPC分类号： H01L27/146
CPC分类号： H01L27/14627 , H01L27/14685 , H01L27/14623 , H01L27/14632 , H01L27/14621
摘要： A manufacturing method includes the following operations. A lens layer is formed above a substrate. A patterned hard mask layer is formed on the lens layer. The lens layer is etched to transfer a pattern of the patterned hard mask layer to the lens layer such that a plurality of lenses are defined, wherein the lens are micro-lenses or meta-surface lenses. A cladding layer is formed to cover the plurality of lenses and the substrate. Portions of the cladding layer are etched to form a first inclined sidewall and a second inclined sidewall, wherein the first inclined sidewall is above the second inclined sidewall, wherein a projection of the first inclined sidewall on the substrate is spaced apart from a projection of the second inclined sidewall on the substrate.
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公开(公告)号：US20230384157A1
公开(公告)日：2023-11-30
申请号：US17824614
申请日：2022-05-25
发明人： Lai-Hung LAI , Hsin-Yi HSIEH , Chin-Chuan HSIEH
CPC分类号： G01J3/2823 , G02B27/30 , G02B6/42 , G02B6/4215 , G01J3/18 , G01J3/0208 , H01L27/307
摘要： The spectrometer includes a lightguide substrate, an upper grating layer, a lower grating layer, an image sensor, and a readout circuit. The upper grating layer is disposed on the lightguide substrate and configured to receive a light. The upper grating layer includes a first grating structure, a second grating structure, and a third grating structure, and the first, second, and third grating structures have different grating periods. The lightguide substrate is configured to diffract the light when the light propagates into the lightguide substrate, such that multiple diffraction lights are formed and each of the multiple diffraction lights has different wavelengths and different optical path. The lower grating layer is disposed under the lightguide substrate and configured to emit the multiple diffraction lights. The image sensor is disposed under the lower grating layer. The readout circuit is disposed under the image sensor.
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