公开(公告)号：US09546418B2

公开(公告)日：2017-01-17

申请号：US13984961

申请日：2012-02-09

申请人： Weifang Miao ,  David B. Smathers ,  Eugene Y. Ivanov ,  Erich Theado ,  Robert S. Bailey ,  Jeff Hart

发明人： Weifang Miao ,  David B. Smathers ,  Eugene Y. Ivanov ,  Erich Theado ,  Robert S. Bailey ,  Jeff Hart

IPC分类号： C23C14/24 ,  C23C14/34 ,  H01J37/34

CPC分类号： H01J37/3426 ,  C23C14/3407 ,  C23C14/3414 ,  H01J37/3414 ,  H01J37/3423 ,  H01J37/3435

摘要： A method of making a diffusion bonded sputter target assembly is provided. A target blank comprising a first metal or alloy has a first surface defining a sputtering surface and a second surface. A second metal or alloy is placed around the target blank. A backing plate is provided adjacent the second metal or alloy that is positioned alongside of the second target surface. This assembly is then diffusion bonded, and a portion of the second metal overlying the sputtering surface of the target is removed to expose the target sputtering surface. W target or W alloy target/Ti or Ti alloy backing plate assemblies are provided with an Al interlayer positioned intermediate the W or W alloy target and backing plate. The assembly has a bond strength exceeding 50 MPa.

摘要翻译： 提供制造扩散接合溅射靶组件的方法。 包括第一金属或合金的目标坯料具有限定溅射表面的第一表面和第二表面。 第二个金属或合金被放置在靶坯周围。 靠近位于第二目标表面旁边的第二金属或合金提供背板。 然后将该组件扩散接合，并且去除覆盖靶的溅射表面的第二金属的一部分以露出靶溅射表面。 W靶或W合金靶/ Ti或Ti合金背板组件设置有位于W或W合金靶和背衬板之间的Al中间层。 该组件的粘合强度超过50MPa。

公开(公告)号：US20140034490A1

公开(公告)日：2014-02-06

申请号：US13984961

申请日：2012-02-09

申请人： Weifang Miao ,  David B. Smathers ,  Eugene Y. Ivanov ,  Erich Theado ,  Robert S. Bailey ,  Jeff Hart

发明人： Weifang Miao ,  David B. Smathers ,  Eugene Y. Ivanov ,  Erich Theado ,  Robert S. Bailey ,  Jeff Hart

IPC分类号： C23C14/34

CPC分类号： H01J37/3426 ,  C23C14/3407 ,  C23C14/3414 ,  H01J37/3414 ,  H01J37/3423 ,  H01J37/3435

摘要： A method of making a diffusion bonded sputter target assembly is provided. A target blank comprising a first metal or alloy has a first surface defining a sputtering surface and a second surface. A second metal or alloy is placed around the target blank. A backing plate is provided adjacent the second metal or alloy that is positioned alongside of the second target surface. This assembly is then diffusion bonded, and a portion of the second metal overlying the sputtering surface of the target is removed to expose the target sputtering surface. W target or W alloy target/Ti or Ti alloy backing plate assemblies are provided with an Al inter-layer positioned intermediate the W or W alloy target and backing plate. The assembly has a bond strength exceeding 50 MPa.

摘要翻译： 提供制造扩散接合溅射靶组件的方法。 包括第一金属或合金的目标坯料具有限定溅射表面的第一表面和第二表面。 第二个金属或合金被放置在靶坯周围。 靠近位于第二目标表面旁边的第二金属或合金提供背板。 然后将该组件扩散接合，并且去除覆盖靶的溅射表面的第二金属的一部分以露出靶溅射表面。 W靶或W合金靶/ Ti或Ti合金背板组件设置有位于W或W合金靶和衬板之间的Al层间。 该组件的粘合强度超过50MPa。

公开(公告)号：US20110056828A1

公开(公告)日：2011-03-10

申请号：US12736311

申请日：2010-01-06

申请人： Weifang Miao ,  David B. Smathers ,  Robert S. Bailey

发明人： Weifang Miao ,  David B. Smathers ,  Robert S. Bailey

IPC分类号： C23C14/34 ,  C22F1/04

CPC分类号： C23C14/3407 ,  B21C23/001 ,  B21J1/04 ,  B21J1/06 ,  C22C21/00 ,  C22F1/04 ,  C23C14/3414

摘要： Aluminum or aluminum alloy sputter targets and methods of making same are provided. The pure aluminum or aluminum alloy is mechanically worked to produce a circular blank, and then the blank is given a recrystallization anneal to achieve desirable grain size and crystallographic texture. A 10-50% additional strain is provided to the blank step after the annealing to increase the mechanical strength. Further, in a flange area of the target, the strain is greater than in the other target areas with the strain in the flange area being imparted at a rate of about 20-60% strain. The blank is then finished to form a sputtering target with desirable crystallographic texture and adequate mechanical strength.

摘要翻译： 提供铝或铝合金溅射靶及其制造方法。 对纯铝或铝合金进行机械加工以产生圆形坯料，然后将坯料进行再结晶退火，以获得所需的晶粒尺寸和晶体织构。 在退火之后向坯料步骤提供10-50％的附加应变以增加机械强度。 此外，在靶的凸缘区域中，应变大于在其他目标区域中的应变，其中凸缘区域中的应变以约20-60％应变的速率施加。 然后将坯料完成以形成具有所需晶体学结构和足够的机械强度的溅射靶。

公开(公告)号：US20090011237A1

公开(公告)日：2009-01-08

申请号：US12154871

申请日：2008-05-28

申请人： Weifang Miao

发明人： Weifang Miao

IPC分类号： B32B5/16

CPC分类号： B02C23/06 ,  B82Y30/00 ,  C01P2004/04 ,  C01P2004/24 ,  C01P2004/62 ,  C01P2004/64 ,  C01P2006/12 ,  C09C1/021 ,  C09C1/24 ,  C09C1/28 ,  C09C1/3018 ,  C09C1/407 ,  C09C1/42 ,  C09C3/041 ,  Y10T428/2982

摘要： Superfine powders composed of mineral materials selected from the group consisting of talc, calcium carbonate, zeolite, clay, aluminum hydroxide, aluminum silicate, iron oxide and magnesium oxide are claimed. Such powders are produced when the subject mineral material is combined with a dry separation agent such as sodium chloride and ground for a sufficient time to produce the superfine mineral material of predetermined size or specific surface area. The separation agent is then removed from the final product by washing with a solvent such as water.

摘要翻译： 要求由滑石，碳酸钙，沸石，粘土，氢氧化铝，硅酸铝，氧化铁和氧化镁组成的组中选择的矿物材料组成的超细粉末。 当将本发明的矿物材料与干燥分离剂如氯化钠组合并研磨足够的时间以产生预定尺寸或比表面积的超细矿物材料时，生产这种粉末。 然后通过用溶剂如水洗涤从分离剂中除去分离剂。

公开(公告)号：US20050017105A1

公开(公告)日：2005-01-27

申请号：US10884823

申请日：2004-07-06

申请人： Weifang Miao

发明人： Weifang Miao

IPC分类号： B02C23/06 ,  C01B33/38 ,  C01B33/40 ,  C01B39/02 ,  C01F11/18 ,  C09C3/04 ,  B02B5/02

CPC分类号： C09C3/041 ,  B02C23/06 ,  B82Y30/00 ,  C01P2004/04 ,  C01P2004/62 ,  C01P2004/64 ,  C01P2006/12 ,  C09C1/021 ,  C09C1/405 ,  C09C1/407 ,  C09C1/42 ,  C09C3/04

摘要： A method is disclosed for the production of a superfine mineral material powder wherein the subject mineral material is combined with a dry separation agent such as sodium chloride and ground for a sufficient time to produce the superfine mineral material of predetermined size or specific surface area. The separation agent is then removed from the final product by washing it with a solvent such as water. Superfine powders composed of mineral materials where the material is selected from the group consisting of talc, calcium carbonate, zeolite, clay, aluminum hydroxide, aluminum silicate, iron oxide and magnesium oxide are also claimed.

摘要翻译： 公开了一种用于生产超细矿物材料粉末的方法，其中将矿物材料与干燥分离剂如氯化钠混合并研磨足够的时间以产生预定尺寸或比表面积的超细矿物材料。 然后通过用诸如水的溶剂洗涤将分离剂从最终产物中除去。 还要求由矿物材料组成的超细粉末，其中材料选自滑石，碳酸钙，沸石，粘土，氢氧化铝，硅酸铝，氧化铁和氧化镁。

公开(公告)号：US08551267B2

公开(公告)日：2013-10-08

申请号：US12736311

申请日：2010-01-06

申请人： Weifang Miao ,  David B. Smathers ,  Robert S. Bailey

发明人： Weifang Miao ,  David B. Smathers ,  Robert S. Bailey

IPC分类号： C23C14/34

CPC分类号： C23C14/3407 ,  B21C23/001 ,  B21J1/04 ,  B21J1/06 ,  C22C21/00 ,  C22F1/04 ,  C23C14/3414

摘要： Aluminum or aluminum alloy sputter targets and methods of making same are provided. The pure aluminum or aluminum alloy is mechanically worked to produce a circular blank, and then the blank is given a recrystallization anneal to achieve desirable grain size and crystallographic texture. A 10-50% additional strain is provided to the blank step after the annealing to increase the mechanical strength. Further, in a flange area of the target, the strain is greater than in the other target areas with the strain in the flange area being imparted at a rate of about 20-60% strain. The blank is then finished to form a sputtering target with desirable crystallographic texture and adequate mechanical strength.

公开(公告)号：US06955798B2

公开(公告)日：2005-10-18

申请号：US10136220

申请日：2002-05-01

申请人： Weifang Miao

发明人： Weifang Miao

IPC分类号： C01B21/082

CPC分类号： C01B21/0825

摘要： A method of preparing substantially homogeneous aluminum oxynitride powder and other nitrogen-containing powders is provided. Particularly with respect to the AlON powder, the method comprises the steps of milling a mixture of aluminum and aluminum oxide in a nitrogen-containing atmosphere until a milled powder composed of aluminum-nitrogen solid solution and aluminum oxide forms. The next step is heating the milled powder in the presence of an inert gas and keeping it at sufficient temperature for a sufficient heating time to form the substantially homogenous aluminum oxynitride powder. This method is extended to the preparation of other powders by employing appropriate starting materials. The resultant powders are also claimed as part of the instant invention.

摘要翻译： 提供了制备基本均匀的氮氧化铝粉末和其它含氮粉末的方法。 特别是对于AlON粉末，该方法包括在含氮气氛中研磨铝和氧化铝的混合物，直到形成由铝 - 氮固溶体和氧化铝组成的研磨粉末的步骤。 下一步是在惰性气体的存在下加热研磨的粉末并将其保持在足够的温度下足够的加热时间以形成基本均匀的氮氧化铝粉末。 该方法通过使用适当的起始材料扩展到制备其它粉末。 所得粉末也作为本发明的一部分而要求保护。

公开(公告)号：US20050118086A1

公开(公告)日：2005-06-02

申请号：US10136220

申请日：2002-05-01

申请人： Weifang Miao

发明人： Weifang Miao

IPC分类号： C01B21/082 ,  C01B21/20 ,  C01B21/06 ,  C01B21/072 ,  C01B21/076

CPC分类号： C01B21/0825

摘要： A method of preparing substantially homogeneous aluminum oxynitride powder and other nitrogen-containing powders is provided. Particularly with respect to the AlON powder, the method comprises the steps of milling a mixture of aluminum and aluminum oxide in a nitrogen-containing atmosphere until a milled powder composed of aluminum-nitrogen solid solution and aluminum oxide forms. The next step is heating the milled powder in the presence of an inert gas and keeping it at sufficient temperature for a sufficient heating time to form the substantially homogenous aluminum oxynitride powder. This method is extended to the preparation of other powders by employing appropriate starting materials. The resultant powders are also claimed as part of the instant invention.

摘要翻译： 提供了制备基本均匀的氮氧化铝粉末和其它含氮粉末的方法。 特别是对于AlON粉末，该方法包括在含氮气氛中研磨铝和氧化铝的混合物，直到形成由铝 - 氮固溶体和氧化铝组成的研磨粉末的步骤。 下一步是在惰性气体的存在下加热研磨的粉末并将其保持在足够的温度下足够的加热时间以形成基本均匀的氮氧化铝粉末。 该方法通过使用适当的起始材料扩展到制备其它粉末。 所得粉末也作为本发明的一部分而要求保护。