公开(公告)号：US06851168B2

公开(公告)日：2005-02-08

申请号：US10174932

申请日：2002-06-19

申请人： Wen-Shan Chang ,  Jung-Chang Chen ,  Shih-Chang Hsu ,  Li-Chung Wang ,  Cheng-Chia Kuo ,  Jong-Min Lin ,  Kuo-Ming Yu ,  Da-Hsiang Chou ,  Kuo-Chuan Chen ,  Ming-Te Chen

发明人： Wen-Shan Chang ,  Jung-Chang Chen ,  Shih-Chang Hsu ,  Li-Chung Wang ,  Cheng-Chia Kuo ,  Jong-Min Lin ,  Kuo-Ming Yu ,  Da-Hsiang Chou ,  Kuo-Chuan Chen ,  Ming-Te Chen

IPC分类号： C23C16/44 ,  C23C16/509 ,  H01J37/32 ,  B23P19/00 ,  B23P19/04

CPC分类号： H01J37/32605 ,  C23C16/4401 ,  C23C16/5096 ,  Y10T29/49721 ,  Y10T29/4973 ,  Y10T29/49822 ,  Y10T29/53848 ,  Y10T29/53891

摘要： A clamp for quickly, effectively and safely removing a cathode collar from an HDP deposition chamber for routine maintenance, cleaning or replacement of the collar. The clamp includes a pair of clamp plates which are capable of pivoting movement on respective ends of a connecting rod. A clamp shoe for gripping a corresponding edge of the annular collar is provided on the bottom end of each clamp plate, and a turnbuckle is fitted with a pair of threaded shafts which engage the upper end portions of the respective clamp plates. By rotating the turnbuckle, the threaded shafts are advanced away from each other against the clamp plates, which pivot on the connecting rod and cause the clamp shoes to tightly engage respective edges of the collar. The clamp is grasped to lift the collar from the chamber and replace the collar in the chamber after cleaning or maintenance.

摘要翻译： 用于快速，有效和安全地从HDP沉积室移除阴极环的夹具，用于日常维护，清洁或更换套环。 夹具包括能够在连杆的相应端部枢转运动的一对夹板。 在每个夹板的底端上设置有用于夹持环形圈的相应边缘的夹钳，并且螺丝扣装配有与相应夹紧板的上端部接合的一对螺纹轴。 通过旋转螺丝扣，螺纹轴彼此抵靠夹紧板前进，该夹板在连接杆上枢转并使夹钳紧紧地接合套环的相应边缘。 抓住夹具以将套环从腔室提起，并在清洁或维护后更换腔室中的套环。

公开(公告)号：US20120098250A1

公开(公告)日：2012-04-26

申请号：US12908094

申请日：2010-10-20

申请人： YEO-SHAN CHANG ,  Wen-Shan Chang

发明人： YEO-SHAN CHANG ,  Wen-Shan Chang

IPC分类号： F16L55/00

CPC分类号： F16L37/0915

摘要： A pipe joint structure for an upright valve includes a pipe joint, a resilient ring, a connection cylinder and an inner sleeve. The pipe joint includes a first chamber to receive a positioning ring and a seal ring. The resilient ring, the connection cylinder and the inner sleeve are inserted in the pipe joint in sequence. When a connection pipe is inserted in the pipe joint, the connection pipe will be inserted in a one-way direction and fastened by fastening talons of the resilient ring. To disengage the connection pipe, top push flanges of resilient claws of the inner sleeve are pushed to an inner limit inclined surface of the positioning ring to disengage the connection pipe from the fastening talons, such that the connection pipe can be pulled out. The present invention provides a quick connection and can prevent the connection pipe from being pulled out unexpectedly.

摘要翻译： 用于直立阀的管接头结构包括管接头，弹性环，连接圆筒和内套筒。 管接头包括用于接收定位环和密封环的第一室。 弹性环，连接筒和内套筒依次插入管接头。 当连接管插入管接头时，连接管将以单向方向插入，并通过紧固弹性环的爪来紧固。 为了使连接管脱离，内套筒的弹性爪的顶推法兰被推动到定位环的内限倾斜面，以使连接管与紧固爪分离，从而可以将连接管拉出。 本发明提供快速连接并且可以防止连接管意外拉出。