Methods and apparatus for inspecting an object
    1.
    发明申请
    Methods and apparatus for inspecting an object 有权
    用于检查物体的方法和装置

    公开(公告)号:US20070090309A1

    公开(公告)日:2007-04-26

    申请号:US11256904

    申请日:2005-10-24

    IPC分类号: G01N21/88

    摘要: A method for inspecting an object using a structured light measurement system that includes a light source for projecting light onto a surface of the object and an imaging sensor for receiving light reflected from the object. The method includes determining a position of at least one of the light source and the imaging sensor with respect to the object based on at least one of a three-dimensional model of the object and a three-dimensional model of the structured light measurement system.

    摘要翻译: 一种用于使用结构化光测量系统检查物体的方法,该系统包括用于将光投射到物体的表面上的光源和用于接收从物体反射的光的成像传感器。 该方法包括基于物体的三维模型和结构光测量系统的三维模型中的至少一个来确定光源和成像传感器中的至少一个相对于对象的位置。

    Methods and apparatus for inspecting an object
    2.
    发明申请
    Methods and apparatus for inspecting an object 有权
    用于检查物体的方法和装置

    公开(公告)号:US20070091321A1

    公开(公告)日:2007-04-26

    申请号:US11257180

    申请日:2005-10-24

    IPC分类号: G01B11/30

    摘要: A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto an object, and an imaging sensor for receiving light reflected from the object. The method includes determining a profile of the object to be inspected, and generating an electronic mask based on the determined object profile. The electronic mask has an electronic opening having a profile defined to substantially match the determined object profile as viewed from one of the light source and the imaging sensor.

    摘要翻译: 一种用于生成与包括用于将光投射到物体上的光源的光测量系统一起使用的掩模的方法和用于接收从物体反射的光的成像传感器。 该方法包括确定待检查对象的轮廓,以及基于所确定的对象轮廓来生成电子掩模。 电子掩模具有电子开口,该电子开口具有被限定为基本上与从光源和成像传感器之一观察的所确定的对象轮廓相匹配的轮廓。

    Method and system for image processing for structured light profiling of a part
    3.
    发明申请
    Method and system for image processing for structured light profiling of a part 失效
    用于部件结构光谱分析的图像处理方法和系统

    公开(公告)号:US20050046872A1

    公开(公告)日:2005-03-03

    申请号:US10652366

    申请日:2003-08-28

    IPC分类号: G01B11/24 G01B11/25

    CPC分类号: G01B11/25 G06T7/521

    摘要: An image processing method for structured light profiling includes sampling an image of a structured light pattern to obtain an intensity distribution, selecting a number of sets of sampled points from the intensity distribution. Each of the respective sets includes a number of sampled points. The image processing method further includes fitting each of the sets of sampled points to a respective distribution function and filtering the distribution functions to select a representative distribution function for the intensity distribution.

    摘要翻译: 用于结构化光谱分析的图像处理方法包括对结构化光图案的图像进行采样以获得强度分布,从强度分布中选择多个采样点集合。 各组中的每一个包括多个采样点。 图像处理方法还包括将采样点集合中的每一个拟合到相应的分布函数,并对分布函数进行滤波以选择用于强度分布的代表性分布函数。

    Methods and apparatus for inspecting an object
    4.
    发明申请
    Methods and apparatus for inspecting an object 审中-公开
    用于检查物体的方法和装置

    公开(公告)号:US20070090310A1

    公开(公告)日:2007-04-26

    申请号:US11259343

    申请日:2005-10-24

    IPC分类号: G01N21/88 G01B11/30

    摘要: A method for inspecting an object using a structured light measurement system that includes a light source and an imaging sensor includes illuminating each of a plurality of different areas of the object with different wavelengths of light using the light source, filtering light reflected from the object into a first wavelength of the different wavelengths, and receiving the first wavelength of light reflected from the object with the imaging sensor.

    摘要翻译: 使用包括光源和成像传感器的结构化光测量系统来检查物体的方法包括使用光源照射具有不同波长的光的物体的多个不同区域中的每一个,将从物体反射的光过滤成 不同波长的第一波长,并且利用成像传感器接收从物体反射的第一波长的光。

    Method and apparatus for measuring shape of an object
    5.
    发明申请
    Method and apparatus for measuring shape of an object 审中-公开
    用于测量物体形状的方法和装置

    公开(公告)号:US20060072122A1

    公开(公告)日:2006-04-06

    申请号:US10955637

    申请日:2004-09-30

    IPC分类号: G01B11/24

    CPC分类号: G01B11/2527 G06T7/521

    摘要: In accordance with one aspect of the present technique, a system for measuring a shape of an object is provided. The system comprises a projection system operable to project a fringe pattern having a reference mark onto the object. The system further comprises an image-processing system operable to capture an image of the fringe pattern modulated by the object. The image-processing system is further operable to identify the reference mark in the image of the fringe pattern to construct a shape of the object based on the reference mark.

    摘要翻译: 根据本技术的一个方面,提供了一种用于测量物体的形状的系统。 该系统包括投影系统,其可操作以将具有参考标记的条纹图案投影到物体上。 该系统还包括可操作以捕获被对象调制的条纹图案的图像的图像处理系统。 图像处理系统还可操作以识别边缘图案的图像中的参考标记,以基于参考标记构建对象的形状。

    Methods and apparatus for generating a mask
    6.
    发明申请
    Methods and apparatus for generating a mask 有权
    用于产生掩模的方法和装置

    公开(公告)号:US20070103685A1

    公开(公告)日:2007-05-10

    申请号:US11256885

    申请日:2005-10-24

    IPC分类号: G01B11/00

    CPC分类号: G01B11/2513

    摘要: A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining a profile of the object to be inspected, and generating a mask based on the determined profile, wherein the mask includes an opening extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.

    摘要翻译: 一种用于产生用于光测量系统的掩模的方法,所述光测量系统包括用于将光投射到物体的表面上的光源,以及用于接收从物体表面反射的光的成像系统。 该方法包括确定待检查对象的轮廓,以及基于所确定的轮廓来生成掩模,其中所述掩模包括延伸穿过其中的开口,所述开口具有与从所述光源观察的物体的轮廓基本一致的轮廓。

    Coordinated polarization for shiny surface measurement
    7.
    发明申请
    Coordinated polarization for shiny surface measurement 有权
    用于光泽表面测量的协调极化

    公开(公告)号:US20050068532A1

    公开(公告)日:2005-03-31

    申请号:US10673598

    申请日:2003-09-29

    摘要: The present disclosure provides for an optical metrology system for scanning an object (106) having a shiny surface. The optical metrology system includes at least one light source (102) configured and adapted to emit a structured light pattern (L) against the surface of the object, at least one first polarizer (108) disposed between the light source and the object such that the light pattern passes therethrough, the first polarizer being configured and adapted to vary at least one of the plane of polarization and the polarization angle of the light pattern, at least one camera (124a-124c) configured and adapted to take images of the object, and at least one second polarizer disposed between the camera and the object, the second polarizer having a fixed orientation.

    摘要翻译: 本公开提供了一种用于扫描具有光泽表面的物体(106)的光学测量系统。 光学测量系统包括至少一个光源(102),其配置并适于发射抵靠物体表面的结构化光图案(L),设置在光源和物体之间的至少一个第一偏振器(108),使得 所述光图案通过其中,所述第一偏振器被配置和适于改变所述光图案的偏振面和所述偏振角中的至少一个,至少一个相机(124a-124c)被配置并适于拍摄所述物体的图像 以及设置在相机和物体之间的至少一个第二偏振器,第二偏振器具有固定的取向。

    Multi-resolution inspection system and method of operating same
    8.
    发明申请
    Multi-resolution inspection system and method of operating same 失效
    多分辨率检测系统及其操作方法

    公开(公告)号:US20050219519A1

    公开(公告)日:2005-10-06

    申请号:US10813149

    申请日:2004-03-30

    IPC分类号: G01N21/88 G01N21/95 G06T7/00

    摘要: A multi-resolution inspection system and method of operation. The system may comprise a first scanning system having a first resolution, wherein the first scanning system is operable to perform a first resolution scan of a surface area of an object to identify a location of a surface abnormality in the object. The system may also comprise a second scanning system having a second resolution, the second resolution being smaller than the first resolution. The second scanning system is operable to receive the location of the surface abnormality from the first scanning system and to automatically perform a second resolution scan of a defined region of the object around the location of the surface abnormality.

    摘要翻译: 多分辨率检测系统及操作方法。 该系统可以包括具有第一分辨率的第一扫描系统,其中第一扫描系统可操作以对对象的表面区域执行第一分辨率扫描,以识别对象中的表面异常的位置。 系统还可以包括具有第二分辨率的第二扫描系统,第二分辨率小于第一分辨率。 第二扫描系统可操作以从第一扫描系统接收表面异常的位置,并且自动执行围绕表面异常位置的物体的限定区域的第二分辨率扫描。

    Methods and apparatus for inspecting an object
    10.
    发明申请
    Methods and apparatus for inspecting an object 有权
    用于检查物体的方法和装置

    公开(公告)号:US20070091320A1

    公开(公告)日:2007-04-26

    申请号:US11256866

    申请日:2005-10-24

    IPC分类号: G01B11/30

    CPC分类号: G01B11/2513

    摘要: A method for inspecting an object includes emitting light from at least one of a liquid crystal display (LCD) device and a liquid crystal on silicon (LCOS) device, phase-shifting light emitted from at least one of the LCD device and the LCOS device, projecting the phase-shifted light onto a surface of an object, receiving light reflected from the object surface with an imaging sensor, and analyzing the light received by the imaging sensor to facilitate inspecting at least a portion of the object.

    摘要翻译: 一种用于检查物体的方法包括从液晶显示器(LCD)器件和硅晶体(LCOS)器件中的至少一个发射光,从LCD器件和LCOS器件中的至少一个发射的相移光 将相移的光投影到物体的表面上,用成像传感器接收从物体表面反射的光,并且分析由成像传感器接收的光,以便于检查物体的至少一部分。