公开(公告)号：US07112690B2

公开(公告)日：2006-09-26

申请号：US10495073

申请日：2002-11-08

申请人： Yun Chi ,  Yao-Lun Chen ,  Chao-Shiuan Liu ,  Yi-Hwa Song ,  Ying-Hui Lai ,  Arthur J. Carty

发明人： Yun Chi ,  Yao-Lun Chen ,  Chao-Shiuan Liu ,  Yi-Hwa Song ,  Ying-Hui Lai ,  Arthur J. Carty

IPC分类号： C07F15/00 ,  C23C16/00

CPC分类号： C07F15/004 ,  C07F15/002 ,  C07F15/0026 ,  C07F15/0033 ,  C07F15/0046 ,  C07F15/0053

摘要： A series of noble metal organometallic complexes of the general formula (I): MLaXb(FBC)c, wherein M is a noble metal such as iridium, ruthenium or osmium, and L is a neutral ligand such as carbonyl, alkene or diene; X is an anionic ligand such as chloride, bromide, iodide and trifluoroacetate group; and FBC is a fluorinated bidentate chelate ligand such as beta diketonate, beta-ketoiminate, amino-alcoholate and amino-alcoholate ligand, wherein a is an integer of from zero (0) to three (3), b is an integer of from zero (0) to one (1) and c is an 10 integer of from one (1) to three (3). The resulting noble metal complexes possess enhanced volatility and thermal stability characteristics, and are suitable for chemical vapor deposition(CVD) applications. The corresponding noble metal complex is formed by treatment of the FBC ligand with a less volatile metal halide. Also disclosed are CVD methods for using the noble metal complexes as source reagents for deposition of noble metal-containing films such as Ir, Ru and Os, or even metal oxide film materials IrO2, OsO2 and RuO2.

摘要翻译： 一系列通式（I）的贵金属有机金属络合物：其中M是贵金属（I） 金属如铱，钌或锇，L是中性配体如羰基，烯烃或二烯; X是阴离子配体，如氯化物，溴化物，碘化物和三氟乙酸盐基团; 并且FBC是氟化双齿螯合配体，例如β-二酮酸酯，β-酮亚胺酸酯，氨基醇化物和氨基醇化物配体，其中a是从零（0）到三（3）的整数，b是零的整数 （0）〜（1），c为1（3）的10个整数。 所得到的贵金属络合物具有增强的挥发性和热稳定性特性，并且适用于化学气相沉积（CVD）应用。 通过用不太易挥发的金属卤化物处理FBC配体形成相应的贵金属络合物。 还公开了使用贵金属络合物作为用于沉积含有贵金属的膜如Ir，Ru和Os，或甚至金属氧化物膜材料IrO 2，OsO 2， 2＆lt; 2＆gt;和RuO 2＆lt; 2＆gt ;.

公开(公告)号：US20050033075A1

公开(公告)日：2005-02-10

申请号：US10495073

申请日：2002-11-08

申请人： Yun Chi ,  Yao-Lun Chen ,  Chao-Shiuan Liu ,  Yi-Hwa Song ,  Ying-Hui Lai ,  Arthur Carty

发明人： Yun Chi ,  Yao-Lun Chen ,  Chao-Shiuan Liu ,  Yi-Hwa Song ,  Ying-Hui Lai ,  Arthur Carty

IPC分类号： C07F15/00 ,  C07F1/08 ,  C07F1/10 ,  C07F1/12

CPC分类号： C07F15/004 ,  C07F15/002 ,  C07F15/0026 ,  C07F15/0033 ,  C07F15/0046 ,  C07F15/0053

摘要： A series of noble metal organometallic complexes of the general formula (I): MLaXb(FBC)c, wherein M is a noble metal such as iridium, ruthenium or osmium, and L is a neutral ligand such as carbonyl, alkene or diene; X is an anionic ligand such as chloride, bromide, iodide and trifluoroacetate group; and FBC is a fluorinated bidentate chelate ligand such as beta diketonate, beta-ketoiminate, amino-alcoholate and amino-alcoholate ligand, wherein a is an integer of from zero (0) to three (3), b is an integer of from zero (0) to one (1) and c is an 10 integer of from one (1) to three (3). The resulting noble metal complexes possess enhanced volatility and thermal stability characteristics, and are suitable for chemical vapor deposition(CVD) applications. The corresponding noble metal complex is formed by treatment of the FBC ligand with a less volatile metal halide. Also disclosed are CVD methods for using the noble metal complexes as source reagents for deposition of noble metal-containing films such as Ir, Ru and Os, or even metal oxide film materials IrO2, OsO2 and RuO2.

摘要翻译： 一系列通式（I）的贵金属有机金属络合物：MLaXb（FBC）c，其中M是贵金属如铱，钌或锇，L是中性配体如羰基，烯烃或二烯; X是阴离子配体，如氯化物，溴化物，碘化物和三氟乙酸盐基团; 并且FBC是氟化双齿螯合配体，例如β-二酮酸酯，β-酮亚胺酸酯，氨基醇化物和氨基醇化物配体，其中a是从零（0）到三（3）的整数，b是零的整数 （0）〜（1），c为1（3）的10个整数。 所得到的贵金属络合物具有增强的挥发性和热稳定性特性，并且适用于化学气相沉积（CVD）应用。 通过用不太易挥发的金属卤化物处理FBC配体形成相应的贵金属络合物。 还公开了使用贵金属络合物作为用于沉积含有贵金属的膜如Ir，Ru和Os，或甚至金属氧化物膜材料IrO 2，OsO 2和RuO 2的源试剂的CVD方法。