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公开(公告)号:US20230003940A1
公开(公告)日:2023-01-05
申请号:US17364588
申请日:2021-06-30
申请人: Yukinori IKEGAWA , Dayu ZHOU , Koji SHIMAZAWA , Yoshitaka SASAKI , Hiroyuki ITO , Yoji NOMURA
发明人: Yukinori IKEGAWA , Dayu ZHOU , Koji SHIMAZAWA , Yoshitaka SASAKI , Hiroyuki ITO , Yoji NOMURA
摘要: A waveguide includes a core and a cladding. The core has an inlet on which light is incident. The core includes a front portion and a rear portion located between the front portion and the inlet. The front portion and the rear portion each have a thickness that is a dimension in a first direction and a width that is a dimension in a second direction. The first direction is orthogonal to a propagation direction of the light. The second direction is orthogonal to the propagation direction of the light and the first direction. The thickness of the front portion decreases with increasing distance from the inlet.
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公开(公告)号:US11410688B1
公开(公告)日:2022-08-09
申请号:US17347992
申请日:2021-06-15
申请人: Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Yukinori Ikegawa , Weihao Xu
发明人: Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Yukinori Ikegawa , Weihao Xu
IPC分类号: G11B11/105 , G11B5/127 , G11B7/1387 , G11B5/60 , G11B5/00 , G11B5/48
摘要: A thermally-assisted magnetic recording head includes a medium facing surface, a main pole, a waveguide, and a plasmon generator. A second metal layer of the plasmon generator includes a second front end facing the medium facing surface. A third metal layer of the plasmon generator includes a narrow portion located on the second metal layer. The narrow portion includes a front end face located in the medium facing surface and configured to generate near-field light from a surface plasmon, and a rear end opposite the front end face. The rear end is located farther from the medium facing surface than is the second front end.
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公开(公告)号:US11049516B1
公开(公告)日:2021-06-29
申请号:US17069527
申请日:2020-10-13
摘要: A near-field light generator includes a plasmon generator including a plasmon exciting portion on which a surface plasmon is excited, and a near-field transducer including a front end face that generates near-field light from the surface plasmon. The near-field transducer is formed of a first metal material. The plasmon generator includes a first portion formed of the first metal material and a second portion formed of a second metal material. The first portion is in contact with the near-field transducer. The second portion includes at least part of the plasmon exciting portion.
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公开(公告)号:US10803888B1
公开(公告)日:2020-10-13
申请号:US16574880
申请日:2019-09-18
申请人: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Atsushi Yamaguchi
发明人: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Atsushi Yamaguchi
摘要: A manufacturing method for a magnetic head includes the steps of: forming a main pole; forming a spin torque oscillator; and forming a trailing shield. The step of forming the spin torque oscillator includes: a step of forming a layered film; a step of forming an interposition layer; a step of forming a mask; a first etching step of etching a portion of the interposition layer using the mask; a second etching step of etching a portion of the layered film using the mask and the interposition layer as an etching mask; a step of removing the interposition layer and the mask; and a patterning step of patterning the layered film into the spin torque oscillator.
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公开(公告)号:US20070194396A1
公开(公告)日:2007-08-23
申请号:US11707076
申请日:2007-02-16
申请人: Yoji Nomura
发明人: Yoji Nomura
IPC分类号: H01L27/14
CPC分类号: H01L27/14636 , H01L27/14643 , H01L27/14687 , H01L27/14689 , H01L2924/0002 , H01L2924/00
摘要: The absorption of moisture from a wall surface of an apertured part formed in an interlayer insulating film in accordance with a light-receiving part of a light detector is minimized and deterioration of wiring in the interlayer insulating film is prevented. A position that corresponds to a light-receiving part 52 of a wiring-structure layer 90 obtained by layering an Al layer and an interlayer insulating film composed of SOG or another material is etched, and an apertured part 120 is formed. A silicon nitride film 130 is then deposited on a side-wall surface and bottom surface of the apertured part 120 via CVD. The silicon nitride layer 130 prevents moisture from infiltrating the wiring-structure layer 90.
摘要翻译: 根据光检测器的光接收部分,在形成在层间绝缘膜中的有孔部分的壁表面上的水分吸收最小化,从而防止了层间绝缘膜中的布线的劣化。 蚀刻对应于通过层叠Al层而获得的布线结构层90的光接收部分52和由SOG或其它材料构成的层间绝缘膜的位置,形成有孔部分120。 然后通过CVD将氮化硅膜130沉积在有孔部分120的侧壁表面和底表面上。 氮化硅层130防止水分渗透布线结构层90。
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公开(公告)号:US11514931B1
公开(公告)日:2022-11-29
申请号:US17677326
申请日:2022-02-22
申请人: Hironori Araki , Yoshitaka Sasaki , Tetsuhito Shinohara , Shigeki Tanemura , Kazuki Sato , Yoji Nomura , Yukinori Ikegawa , Tetsuya Roppongi
发明人: Hironori Araki , Yoshitaka Sasaki , Tetsuhito Shinohara , Shigeki Tanemura , Kazuki Sato , Yoji Nomura , Yukinori Ikegawa , Tetsuya Roppongi
摘要: A magnetic head includes a main pole, a trailing shield, and a spin torque oscillator. A top surface of the main pole includes a first inclined portion, a second inclined portion, and a third inclined portion arranged in order of closeness to a medium facing surface. Each of the first to third inclined portions has a front end closest to the medium facing surface and a rear end farthest from the medium facing surface. Each of the first to third inclined portions is inclined relative to the medium facing surface and a direction orthogonal to the medium facing surface so that its rear end is located forward relative to its front end in a direction of travel of a recording medium.
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公开(公告)号:US11289117B1
公开(公告)日:2022-03-29
申请号:US17170126
申请日:2021-02-08
申请人: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Tetsuhito Shinohara , Ying Liu , Min Li , Alain Truong , Yuhui Tang , Wenyu Chen
发明人: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Tetsuhito Shinohara , Ying Liu , Min Li , Alain Truong , Yuhui Tang , Wenyu Chen
摘要: A magnetic head includes a medium facing surface, a main pole, a trailing shield, and a spin torque oscillator. A bottom surface of the trailing shield includes a first portion that includes an end located in the medium facing surface and is in contact with the spin torque oscillator at least in part. An element height that is a dimension of the spin torque oscillator in a direction perpendicular to the medium facing surface and a writer height that is a dimension of the first portion in the direction perpendicular to the medium facing surface are different from each other.
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公开(公告)号:US10748559B1
公开(公告)日:2020-08-18
申请号:US16801399
申请日:2020-02-26
申请人: Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Yoji Nomura , Shigeki Tanemura , Kazuki Sato , Tetsuya Roppongi , Atsushi Yamaguchi
发明人: Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Yoji Nomura , Shigeki Tanemura , Kazuki Sato , Tetsuya Roppongi , Atsushi Yamaguchi
摘要: A magnetic head includes a main pole, a trailing shield, a spin torque oscillator, and a buffer layer. The buffer layer is interposed between the main pole and the spin torque oscillator. The spin torque oscillator has first and second side surfaces. The first and second side surfaces respectively form first and second angles with respect to a direction perpendicular to a top surface of a substrate. The first and second angles each fall within a range of 0° to 10°. The buffer layer has third and fourth side surfaces. The third side surface includes a first inclined portion forming a third angle greater than the first angle. The fourth side surface includes a second inclined portion forming a fourth angle greater than the second angle.
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公开(公告)号:US10366712B1
公开(公告)日:2019-07-30
申请号:US15880458
申请日:2018-01-25
申请人: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Hironori Araki , Yukinori Ikegawa , Yoji Nomura
发明人: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Hironori Araki , Yukinori Ikegawa , Yoji Nomura
摘要: A first side shield has a first sidewall and a second sidewall, and a second side shield has a third sidewall and a fourth sidewall. The first to fourth sidewalls have first to fourth edges, respectively, that are farthest from a top surface of a substrate. The distance between a rear end of the first edge and a rear end of the third edge in a track width direction is greater than the distance between a front end of the first edge and a front end of the third edge in the track width direction. The distance between the second edge and the fourth edge in the track width direction increases with increasing distance from the medium facing surface.
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公开(公告)号:US07365381B2
公开(公告)日:2008-04-29
申请号:US11600771
申请日:2006-11-17
申请人: Akihiro Hasegawa , Yoji Nomura
发明人: Akihiro Hasegawa , Yoji Nomura
IPC分类号: H01L31/113
CPC分类号: H01L27/14632 , H01L2924/0002 , H01L2924/00
摘要: In a photodetector where a circuit section, in which an interconnection is formed, is formed adjacent to a light receiving section, photo sensitivity within a light receiving surface is prevented from being non-uniform due to an interlayer insulating film at a periphery of the light receiving section being increased in thickness. In a circuit region, a buffer region is disposed adjacent to a light receiving section. In the buffer region, in order to reduce irregularity of an interlayer insulating film, a density of planarizing pads disposed between the interconnections is gradually reduced from a standard value in a region as it approaches the light receiving section.
摘要翻译: 在与光接收部相邻地形成有互连的电路部的光电检测器中,由于在光的周围由于层间绝缘膜而防止受光面内的光敏性不均匀 接收部分的厚度增加。 在电路区域中,缓冲区域邻近光接收部分设置。 在缓冲区域中,为了减少层间绝缘膜的不规则性,布置在互连之间的平坦化焊盘的密度随着接近光接收部分的区域中的标准值而逐渐减小。
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