公开(公告)号：US08944565B2

公开(公告)日：2015-02-03

申请号：US13439173

申请日：2012-04-04

申请人： Yue Gao ,  Yoshinao Miyata ,  Yuma Fukuzawa

发明人： Yue Gao ,  Yoshinao Miyata ,  Yuma Fukuzawa

IPC分类号： B41J2/16 ,  B41J2/14

CPC分类号： B41J2/14201 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14491

摘要： A liquid ejecting head includes a plurality of pressure generators each including a first electrode individually provided therefor, the first electrode being located on a face of the flow path plate so as to correspond to one of the pressure chambers, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer; a lead electrode electrically connected to the first electrode; and a conductive layer provided in a section where the first electrode is partially exposed, the section being located in a region where the second electrode is not provided and the piezoelectric layer is exposed, at least a part of the conductive layer being in contact with the first electrode. The lead electrode is connected to the first electrode via the conductive layer.

摘要翻译： 液体喷射头包括多个压力发生器，每个压力发生器包括单独设置的第一电极，第一电极位于流路板的表面上，以对应于一个压力室，压电层设置在第一 电极和设置在压电层上的第二电极; 电连接到所述第一电极的引线电极; 以及设置在所述第一电极部分露出的部分中的所述导电层，所述部分位于不设置所述第二电极且所述压电层露出的区域中，所述导电层的至少一部分与所述导电层接触 第一电极。 引线电极经由导电层与第一电极连接。

公开(公告)号：US08393717B2

公开(公告)日：2013-03-12

申请号：US12844127

申请日：2010-07-27

申请人： Hiroshige Owaki ,  Yoshinao Miyata

发明人： Hiroshige Owaki ,  Yoshinao Miyata

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid ejecting head ejects a liquid from pressure generating chambers through nozzles by varying pressure of the pressure generating chambers. The liquid ejecting head includes a nozzle plate in which the nozzles are formed. A first passage forming board is joined to the nozzle plate. A first liquid passage, including the pressure generating chambers, is formed in the first passage forming board. A second passage forming board is joined to the surface of the first liquid passage forming board and has a second liquid passage communicating with the first liquid passage. A first electrode layer electrically connected to the liquid in the first liquid passage and a second, independent, electrode layer are disposed on a vibration plate. Each of the first and second electrode layers includes a terminal drawn to the outside of a junction portion joining the first and second passage forming boards to each other.

摘要翻译： 液体喷射头通过改变压力发生室的压力从压力产生室喷射出液体。 液体喷射头包括形成喷嘴的喷嘴板。 第一通道形成板连接到喷嘴板。 包括压力发生室的第一液体通道形成在第一通道形成板中。 第二通道形成板连接到第一液体通道形成板的表面，并且具有与第一液体通道连通的第二液体通道。 电连接到第一液体通道中的液体的第一电极层和第二独立的电极层设置在振动板上。 第一电极层和第二电极层中的每一个包括被连接到第一和第二通道形成板彼此接合的接合部分的外部的端子。

公开(公告)号：US08075106B2

公开(公告)日：2011-12-13

申请号：US12367364

申请日：2009-02-06

申请人： Yoshinao Miyata ,  Kazutoshi Goto ,  Satoshi Nakajima ,  Toshiaki Kori ,  Tomoaki Takahashi

发明人： Yoshinao Miyata ,  Kazutoshi Goto ,  Satoshi Nakajima ,  Toshiaki Kori ,  Tomoaki Takahashi

IPC分类号： B41J2/045 ,  H01L21/00

CPC分类号： B41J2/14233 ,  B41J2/055 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid ejecting head which includes a flow passage forming substrate that has pressure generating chambers which communicate with nozzles capable of ejecting a liquid, pressure generating elements which apply pressure to the pressure generating chambers in order to eject the liquid from the nozzles, lead electrodes that supply electric signals to the pressure generating elements, wiring substrates that supply the electric signals to the lead electrodes, and a supporting member that supports the wiring substrates so as to raise the wiring substrates from a surface of the liquid ejecting head having the lead electrodes provided thereon.

摘要翻译： 一种液体喷射头，其包括具有与能够喷射液体的喷嘴连通的压力产生室的流路形成基板，向压力发生室施加压力以从喷嘴喷射液体的压力产生元件，引出电极 向压力发生元件供给电信号，向引线电极供给电信号的布线基板和支撑部件，支撑部件支撑布线基板，以从配备有引线电极的液体喷射头的表面升起布线基板 上。

公开(公告)号：US20060176343A1

公开(公告)日：2006-08-10

申请号：US11334442

申请日：2006-01-19

申请人： Masato Shimada ,  Yoshinao Miyata ,  Tomoaki Takahashi

发明人： Masato Shimada ,  Yoshinao Miyata ,  Tomoaki Takahashi

IPC分类号： B41J2/045

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid-jet head is provided. In the liquid-jet head, a lower electrode, as a common electrode common to a plurality of piezoelectric elements, is continuously formed as far as an outer region opposite the piezoelectric elements, an auxiliary electrode layer is provided which comprises the same layers as layers constituting a lead-out electrode, and which is electrically connected to the lower electrode located outwardly of the region opposite the piezoelectric elements, a first insulation film at least in the vicinity of an end portion of a passage-forming substrate in a direction parallel to the arrangement of the piezoelectric elements is provided with a penetrated portion in a region opposite the auxiliary electrode layer, and the auxiliary electrode layer is in contact with the lower electrode via the penetrated portion provided in the first insulation film.

摘要翻译： 提供喷液头。 在液体喷射头中，作为与多个压电元件共用的公共电极的下电极连续地形成为与压电元件相对的外部区域，提供辅助电极层，其包括与层相同的层 构成引出电极，并且电连接到位于与压电元件相对的区域外侧的下电极;第一绝缘膜，至少在通道形成基板的端部附近，在与 压电元件的布置在与辅助电极层相对的区域中具有穿透部分，并且辅助电极层经由设置在第一绝缘膜中的穿透部分与下电极接触。

公开(公告)号：US06869170B2

公开(公告)日：2005-03-22

申请号：US09977197

申请日：2001-10-16

申请人： Masato Shimada ,  Yoshinao Miyata ,  Hiroyuki Kamei ,  Tetsushi Takahashi

发明人： Masato Shimada ,  Yoshinao Miyata ,  Hiroyuki Kamei ,  Tetsushi Takahashi

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Provided is an ink-jet recording head that prevents a vibration plate thereof from damage attributed to drive of a piezoelectric element, and an ink-jet recording apparatus. There are provided within a region facing the pressure generating chamber, a piezoelectric active portion, and a piezoelectric non-active portions, the piezoelectric non-active portions being provided on both end portions of the piezoelectric active portion in a longitudinal direction thereof. An electrode wiring is drawn out of an upper electrode which is provided on one end portion in the longitudinal direction of the pressure generating chamber. There is also provided a protection layer on the other end portion in the longitudinal direction of the pressure generating chamber for protecting the vibration plate. Rigidity of the vibration plate is thereby increased.

摘要翻译： 提供了防止其振动板由于压电元件的驱动而引起的损坏的喷墨记录头和喷墨记录装置。 设置在面向压力发生室的区域，压电有源部分和压电非有效部分中，压电非有效部分沿其纵向方向设置在压电有源部分的两端部分上。 从设置在压力发生室的长度方向的一个端部的上部电极引出电极配线。 在压力发生室的长度方向的另一端部还设有用于保护振动板的保护层。 因此振动板的刚度增加。

公开(公告)号：US06820969B2

公开(公告)日：2004-11-23

申请号：US10395850

申请日：2003-03-25

申请人： Yoshinao Miyata

发明人： Yoshinao Miyata

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Disclosed are a liquid-jet head that is capable of maintaining ejection characteristics of liquid droplets, obtaining stable ink ejection characteristics, and arraying piezoelectric elements in high density, and a liquid-jet apparatus. An ink-jet recording head includes: a passage-forming substrate in which pressure generating chambers communicating with nozzle orifices are formed; and piezoelectric elements for generating pressure changes in the pressure generating chambers, which are provided on one surface side of the passage-forming substrate with vibration plate interposed therebetween. In the ink-jet recording head, a resistance reduction portion is provided to reduce a resistance of a common electrode common to the plurality of piezoelectric elements when a voltage is applied to the piezoelectric elements. The resistance reduction portion includes: common lead electrodes extracted from portions of the common electrode, which exclude both end portions in a direction where the piezoelectric elements are provided parallel, to outside regions opposite the pressure generating chambers; and connection wiring composed of a bonding wire.

摘要翻译： 公开了能够保持液滴的喷射特性，获得稳定的喷墨特性以及高密度排列压电元件的液体喷射头和液体喷射装置。 喷墨记录头包括：通道形成基板，其中形成有与喷嘴孔连通的压力产生室; 以及用于在压力发生室中产生压力变化的压电元件，其设置在通道形成基板的一个表面侧，并且隔着振动板。 在喷墨记录头中，当施加电压到压电元件时，提供电阻减小部分以减小多个压电元件共同的公共电极的电阻。 电阻减少部分包括：从压电元件平行设置的方向排除两端部的公共电极的部分提取的公共引线电极到与压力发生室相对的外部区域; 以及由接合线构成的连接配线。

公开(公告)号：US06502930B1

公开(公告)日：2003-01-07

申请号：US09806699

申请日：2001-04-04

申请人： Masato Shimada ,  Akira Matsuzawa ,  Yoshinao Miyata ,  Tsutomu Nishiwaki ,  Hiroyuki Kamei

发明人： Masato Shimada ,  Akira Matsuzawa ,  Yoshinao Miyata ,  Tsutomu Nishiwaki ,  Hiroyuki Kamei

IPC分类号： B41J214

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14241 ,  B41J2002/1437 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Disclosed are an ink-jet recording head, in which the rigidity of the compartment wall is improved, pressure generating chambers can be arranged in a high density, and cross talk between the pressure generating chambers is reduced, and a manufacturing method of the same and an ink-jet recording apparatus. In an ink-jet recording head including a passage-forming substrate (10) having a silicon layer consisting of single crystal silicon, in which a pressure generating chamber (15) communicating with a nozzle orifice is defined; and a piezoelectric element (300) for generating a pressure change in the pressure generating chamber, the piezoelectric element being provided on a region facing the pressure generating chamber (15) via a vibration plate constituting a part of the pressure generating chamber (15), the pressure generating chamber (15) is formed so as to open to one surface of the passage-forming substrate (10) and not to penetrate therethrough, at least a bottom surface of inner surfaces of the pressure generating chamber (15), which is facing to the one surface, is constituted of an etching stop surface as a surface in which anisotropic etching stops, and the piezoelectric element (300) is provided on the one surface side of the passage-forming substrate (10) by a film formed by film deposition technology and a lithography method.

摘要翻译： 公开了一种喷墨记录头，其中室壁的刚度提高，压力发生室可以高密度地布置，并且压力发生室之间的串扰减少，并且其制造方法和 一种喷墨记录装置。 在包括具有由单晶硅组成的硅层的通道形成基板（10）的喷墨记录头中，其中限定了与喷嘴孔连通的压力发生室（15） 以及用于在所述压力发生室中产生压力变化的压电元件（300），所述压电元件经由构成所述压力发生室（15）的一部分的振动板设置在面对所述压力发生室（15）的区域上， 压力发生室15形成为在通道形成基板（10）的一个表面上开口，并且至少在压力发生室（15）的内表面的底表面上不穿透压力发生室 由作为各向异性蚀刻停止的表面的蚀刻停止面构成压电元件（300），在通路形成用基板（10）的一个表面侧，通过由 薄膜沉积技术和光刻方法。

公开(公告)号：US06315400B1

公开(公告)日：2001-11-13

申请号：US09242964

申请日：1999-06-16

申请人： Shinri Sakai ,  Yoshinao Miyata ,  Tetsushi Takahashi

发明人： Shinri Sakai ,  Yoshinao Miyata ,  Tetsushi Takahashi

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/03 ,  B41J2202/11

摘要： The present invention relates to an ink-jet recording head and an ink-jet recording device wherein peeling, a crack etc. at the end of a piezoelectric active part can be prevented. In an ink-jet recording head provided with a diaphragm constituting a part of a pressure generating chamber communicating with a nozzle aperture and a piezoelectric element formed on the diaphragm and provided with the piezoelectric active part of the piezoelectric element in an area opposite to the pressure generating chamber, a vibration regulating part for partially regulating vibration at least in a part of the diaphragm in the vicinity of a boundary with the peripheral wall of the pressure generating chamber is provided.

摘要翻译： 本发明涉及喷墨记录头和喷墨记录装置，其中可以防止在压电有源部分的末端处剥离，裂纹等。 在设置有构成与喷嘴孔连通的压力发生室的一部分的膜片的喷墨记录头和形成在膜片上的压电元件，并且在与压力相反的区域中设置压电元件的压电有源部分 提供了一种用于在与压力发生室的周壁的边界附近至少在隔膜的一部分中部分调节振动的振动调节部件。

公开(公告)号：US06250753B1

公开(公告)日：2001-06-26

申请号：US09233081

申请日：1999-01-19

申请人： Tsutomu Nishiwaki ,  Yoshinao Miyata

发明人： Tsutomu Nishiwaki ,  Yoshinao Miyata

IPC分类号： B41J217

CPC分类号： B41J2/055 ,  B41J2/14233 ,  B41J2002/14387 ,  B41J2002/14419

摘要： To suppress an increase in the pressure of an ink reservoir caused by the ink reversely flowed from an ink cavity without causing a lead wire to be damaged or to get fatigued. A thin portion 13 which becomes resiliently deformed by the ink reversely flowed from an ink cavity 2 is provided in the area of a compliance plate facing an ink reservoir 4.

公开(公告)号：US06209994B1

公开(公告)日：2001-04-03

申请号：US09153034

申请日：1998-09-15

申请人： Yutaka Furuhata ,  Yoshinao Miyata ,  Hajime Mizutani

发明人： Yutaka Furuhata ,  Yoshinao Miyata ,  Hajime Mizutani

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14387

摘要： In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.