公开(公告)号：US07477408B2

公开(公告)日：2009-01-13

申请号：US11369339

申请日：2006-03-07

申请人： Kai-Yu Cheng ,  Yen-Liang Chen ,  Hsiang-Han Hsu ,  Yi-Ching Chen ,  Yu-Ping Lan

发明人： Kai-Yu Cheng ,  Yen-Liang Chen ,  Hsiang-Han Hsu ,  Yi-Ching Chen ,  Yu-Ping Lan

IPC分类号： G01B11/28

CPC分类号： G01B11/06 ,  G02B21/0028

摘要： A system and a method for thickness measurement that comprises providing a first confocal microscope, emitting a first light beam from the first confocal microscope in a first direction, focusing the first beam at a first focal plane, providing a second confocal microscope, emitting a second light beam from the second confocal microscope in a second direction substantially opposed to the first direction, focusing the second beam at a second focal plane, and adjusting the relative position of the first and second microscopes by overlapping the first and second focal planes.

摘要翻译： 一种用于厚度测量的系统和方法，包括提供第一共聚焦显微镜，沿第一方向从所述第一共焦显微镜发射第一光束，将所述第一光束聚焦在第一焦平面上，提供第二共聚焦显微镜，发射第二共聚焦显微镜 在与第一方向大致相反的第二方向上来自第二共焦显微镜的光束将第二光束聚焦在第二焦平面上，并且通过重叠第一和第二焦平面来调节第一和第二显微镜的相对位置。

公开(公告)号：US20070070360A1

公开(公告)日：2007-03-29

申请号：US11369339

申请日：2006-03-07

申请人： Kai-Yu Cheng ,  Yen-Liang Chen ,  Hsiang-Han Hsu ,  Yi-Ching Chen ,  Yu-Ping Lan

发明人： Kai-Yu Cheng ,  Yen-Liang Chen ,  Hsiang-Han Hsu ,  Yi-Ching Chen ,  Yu-Ping Lan

IPC分类号： G01B11/28

CPC分类号： G01B11/06 ,  G02B21/0028

摘要： A system and a method for thickness measurement that comprises providing a first confocal microscope, emitting a first light beam from the first confocal microscope in a first direction, focusing the first beam at a first focal plane, providing a second confocal microscope, emitting a second light beam from the second confocal microscope in a second direction substantially opposed to the first direction, focusing the second beam at a second focal plane, and adjusting the relative position of the first and second microscopes by overlapping the first and second focal planes.

摘要翻译： 一种用于厚度测量的系统和方法，包括提供第一共聚焦显微镜，沿第一方向从所述第一共焦显微镜发射第一光束，将所述第一光束聚焦在第一焦平面上，提供第二共聚焦显微镜，发射第二共聚焦显微镜 在与第一方向大致相反的第二方向上来自第二共焦显微镜的光束将第二光束聚焦在第二焦平面上，并且通过重叠第一和第二焦平面来调节第一和第二显微镜的相对位置。

公开(公告)号：US20050052609A1

公开(公告)日：2005-03-10

申请号：US10738893

申请日：2003-12-16

申请人： Ci-Ling Pan ,  Ru-Pin Chao ,  Yu-Ping Lan

发明人： Ci-Ling Pan ,  Ru-Pin Chao ,  Yu-Ping Lan

IPC分类号： G02F1/13 ,  G02F1/1335 ,  G02F1/1343 ,  H01S3/08 ,  H01S5/00 ,  H01S5/06 ,  H01S5/14

CPC分类号： G02F1/133553 ,  G02F1/134309 ,  G02F2203/50 ,  G02F2203/58 ,  H01S3/08059 ,  H01S3/08063 ,  H01S5/005 ,  H01S5/06 ,  H01S5/141 ,  H01S5/143

摘要： An apparatus for electronically tuning of a single or multi-wavelength external-cavity laser, comprising: an AR-coated diode laser, a collimator, a liquid crystal cell, a dispersion grating, a focusing lens and a liquid crystal pixel mirror. Wavelength channels can be selected by opening the appropriate pixels of the liquid crystal pixel mirror. By turning on several pixels at the same time, the laser can generate output at several wavelengths. Wavelength switching between channels is also possible. Laser wavelength can further be tuned by varying the driving voltages of the liquid crystal cell or the appropriate pixel mirror. The liquid crystal cell and the liquid crystal pixel mirror in the laser cavity can be combined to form a sandwich-type liquid crystal pixel mirror that allows both step (digital) or fine tuning of the laser wavelength.

摘要翻译： 一种用于电子调谐单波长或多波长外腔激光器的装置，包括：涂覆AR的二极管激光器，准直器，液晶单元，色散光栅，聚焦透镜和液晶像素镜。 可以通过打开液晶像素镜的适当像素来选择波长通道。 通过同时打开几个像素，激光器可以产生几个波长的输出。 通道之间的波长切换也是可能的。 可以通过改变液晶单元或适当的像素镜的驱动电压来进一步调整激光波长。 可以将激光腔中的液晶单元和液晶像素反射镜组合形成夹持型液晶像素镜，其允许激光波长的步进（数字）或微调。