Chemical mechanical polishing slurry, its preparation method and use for the same
    1.
    发明授权
    Chemical mechanical polishing slurry, its preparation method and use for the same 有权
    化学机械抛光浆料,其制备方法和用途相同

    公开(公告)号:US08557006B2

    公开(公告)日:2013-10-15

    申请号:US13456413

    申请日:2012-04-26

    IPC分类号: C09G1/02 H01L21/31053

    摘要: A chemical mechanical polishing slurry for polishing a copper layer without excessively or destructively polishing a barrier layer beneath the copper layer is disclosed and includes an acid, a surfactant, and a silica sol having silica polishing particles that are surface modified with a surface charge modifier and that have potassium ions attached thereto. A method for preparing the chemical mechanical polishing slurry and a chemical mechanical polishing method using the chemical mechanical polishing slurry are also disclosed.

    摘要翻译: 公开了一种用于抛光铜层而不过度或破坏性地在铜层下方抛光阻挡层的化学机械抛光浆料,并且包括酸,表面活性剂和具有用表面电荷调节剂表面​​改性的二氧化硅抛光颗粒的硅溶胶, 其具有附着的钾离子。 还公开了一种制备化学机械抛光浆料的方法和使用化学机械抛光浆料的化学机械抛光方法。

    Singular value decomposing method and related singular value decomposing device
    2.
    发明授权
    Singular value decomposing method and related singular value decomposing device 有权
    奇异值分解方法及相关奇异值分解装置

    公开(公告)号:US08321488B2

    公开(公告)日:2012-11-27

    申请号:US12264258

    申请日:2008-11-04

    IPC分类号: G06F17/16

    摘要: A method for performing a singular value decomposition (SVD) upon a matrix. The method includes the steps of: (a) simplifying the matrix to derive a simplified matrix; (b) performing an iterative matrix multiplication upon the simplified matrix to generate an iterated matrix; (c) extracting a vector of the iterated matrix according to an iteration number of the iterative matrix multiplication; (d) de-correlating the simplified matrix from the vector to update the simplified matrix; (e) repeating steps (b), (c), and (d) until a predetermined number of vectors have been derived; and (f) storing a first unitary matrix determined according to the predetermined number of vectors in the singular value decomposition.

    摘要翻译: 一种用于在矩阵上执行奇异值分解(SVD)的方法。 该方法包括以下步骤:(a)简化矩阵以导出简化矩阵; (b)对所述简化矩阵执行迭代矩阵乘法以生成迭代矩阵; (c)根据迭代矩阵乘法的迭代次数提取迭代矩阵的向量; (d)将简化矩阵与向量去相关,以更新简化矩阵; (e)重复步骤(b),(c)和(d),直到导出预定数量的向量; 和(f)将根据预定数量的矢量确定的第一单位矩阵存储在奇异值分解中。

    CHEMICAL MECHANICAL POLISHING SLURRY, ITS PREPARATION METHOD AND USE FOR THE SAME
    3.
    发明申请
    CHEMICAL MECHANICAL POLISHING SLURRY, ITS PREPARATION METHOD AND USE FOR THE SAME 有权
    化学机械抛光浆,其制备方法和使用方法

    公开(公告)号:US20120270401A1

    公开(公告)日:2012-10-25

    申请号:US13456413

    申请日:2012-04-26

    IPC分类号: C09K13/00 H01L21/304

    摘要: A chemical mechanical polishing slurry for polishing a copper layer without excessively or destructively polishing a barrier layer beneath the copper layer is disclosed and includes an acid, a surfactant, and a silica sol having silica polishing particles that are surface modified with a surface charge modifier and that have potassium ions attached thereto. A method for preparing the chemical mechanical polishing slurry and a chemical mechanical polishing method using the chemical mechanical polishing slurry are also disclosed.

    摘要翻译: 公开了一种用于抛光铜层而不过度或破坏性地在铜层下方抛光阻挡层的化学机械抛光浆料,并且包括酸,表面活性剂和具有用表面电荷调节剂表面​​改性的二氧化硅抛光颗粒的硅溶胶, 其具有附着的钾离子。 还公开了一种制备化学机械抛光浆料的方法和使用化学机械抛光浆料的化学机械抛光方法。

    Tank-locking device, system for managing liquid supply and method using the same
    4.
    发明授权
    Tank-locking device, system for managing liquid supply and method using the same 有权
    油箱锁定装置,液体供应管理系统及使用方法

    公开(公告)号:US08140184B2

    公开(公告)日:2012-03-20

    申请号:US12022983

    申请日:2008-01-30

    IPC分类号: G06F19/00

    摘要: A system for managing liquid supply suitable for a process equipment with a liquid tank is disclosed. The system includes a host, a data-reading tool, a system controller and a tank-locking device. The host stores a built-in liquid database. The data-reading tool used for reading data related to the liquid tank is electrically connected to the host. The host receives the data related to the liquid tank from the data-reading tool, and the received data mapped with the liquid database. The system controller drives the tank-locking device according to the signal from the host to whether or not allow replacement of the liquid tank.

    摘要翻译: 公开了一种用于管理适用于具有液体罐的加工设备的液体供应系统。 该系统包括主机,数据读取工具,系统控制器和储罐装置。 主机存储一个内置的液体数据库。 用于读取与液体罐有关的数据的数据读取工具与主机电连接。 主机从数据读取工具接收与液罐相关的数据,并且接收到的数据与液体数据库映射。 系统控制器根据来自主机的信号驱动油箱锁定装置,以确定是否允许更换液体罐。

    System and method for thickness measurement
    6.
    发明授权
    System and method for thickness measurement 有权
    厚度测量的系统和方法

    公开(公告)号:US07477408B2

    公开(公告)日:2009-01-13

    申请号:US11369339

    申请日:2006-03-07

    IPC分类号: G01B11/28

    CPC分类号: G01B11/06 G02B21/0028

    摘要: A system and a method for thickness measurement that comprises providing a first confocal microscope, emitting a first light beam from the first confocal microscope in a first direction, focusing the first beam at a first focal plane, providing a second confocal microscope, emitting a second light beam from the second confocal microscope in a second direction substantially opposed to the first direction, focusing the second beam at a second focal plane, and adjusting the relative position of the first and second microscopes by overlapping the first and second focal planes.

    摘要翻译: 一种用于厚度测量的系统和方法,包括提供第一共聚焦显微镜,沿第一方向从所述第一共焦显微镜发射第一光束,将所述第一光束聚焦在第一焦平面上,提供第二共聚焦显微镜,发射第二共聚焦显微镜 在与第一方向大致相反的第二方向上来自第二共焦显微镜的光束将第二光束聚焦在第二焦平面上,并且通过重叠第一和第二焦平面来调节第一和第二显微镜的相对位置。

    System and method for thickness measurement
    7.
    发明申请
    System and method for thickness measurement 有权
    厚度测量的系统和方法

    公开(公告)号:US20070070360A1

    公开(公告)日:2007-03-29

    申请号:US11369339

    申请日:2006-03-07

    IPC分类号: G01B11/28

    CPC分类号: G01B11/06 G02B21/0028

    摘要: A system and a method for thickness measurement that comprises providing a first confocal microscope, emitting a first light beam from the first confocal microscope in a first direction, focusing the first beam at a first focal plane, providing a second confocal microscope, emitting a second light beam from the second confocal microscope in a second direction substantially opposed to the first direction, focusing the second beam at a second focal plane, and adjusting the relative position of the first and second microscopes by overlapping the first and second focal planes.

    摘要翻译: 一种用于厚度测量的系统和方法,包括提供第一共聚焦显微镜,沿第一方向从所述第一共焦显微镜发射第一光束,将所述第一光束聚焦在第一焦平面上,提供第二共聚焦显微镜,发射第二共聚焦显微镜 在与第一方向大致相反的第二方向上来自第二共焦显微镜的光束将第二光束聚焦在第二焦平面上,并且通过重叠第一和第二焦平面来调节第一和第二显微镜的相对位置。

    Method and apparatus for performing channel shortening equalization with frequency notch mitigation
    8.
    发明授权
    Method and apparatus for performing channel shortening equalization with frequency notch mitigation 有权
    用频率陷波缓解来执行信道缩短均衡的方法和装置

    公开(公告)号:US09065690B2

    公开(公告)日:2015-06-23

    申请号:US13461764

    申请日:2012-05-01

    摘要: A method for performing channel shortening equalization with frequency notch mitigation is provided, where the method is applied to an electronic device. The method includes: obtaining channel response information from channel estimation to determine a relaxed channel convolution matrix corresponding to the channel response information, with the relaxed channel convolution matrix being a partial matrix of a channel convolution matrix corresponding to the channel response information, wherein the relaxed channel convolution matrix is obtained from omitting a portion of matrix elements of the channel convolution matrix; and based upon the relaxed channel convolution matrix, jointly performing time domain channel shortening control and frequency domain flatness control over the TEQ to perform channel shortening equalization with frequency notch mitigation by utilizing the TEQ. In particular, the portion of matrix elements includes a plurality of rows of matrix elements within the channel convolution matrix. An associated apparatus is also provided.

    摘要翻译: 提供了一种用于进行频率切换缓冲的信道缩短均衡的方法,其中该方法应用于电子设备。 该方法包括:从信道估计获得信道响应信息以确定与信道响应信息相对应的松弛信道卷积矩阵,其中松弛信道卷积矩阵是与信道响应信息相对应的信道卷积矩阵的部分矩阵,其中放宽 从省略信道卷积矩阵的矩阵元素的一部分获得信道卷积矩阵; 并且基于松弛的信道卷积矩阵,通过TEQ共同执行时域信道缩短控制和频域平坦度控制,以通过利用TEQ来进行具有频率陷波缓解的信道缩短均衡。 特别地,矩阵元素的部分在信道卷积矩阵内包括多行矩阵元素。 还提供了一种相关联的装置。

    Dual-Frequency Bistable Liquid Crystal Display And The Liquid Crystal Mixture Thereof
    9.
    发明申请
    Dual-Frequency Bistable Liquid Crystal Display And The Liquid Crystal Mixture Thereof 有权
    双频双稳态液晶显示器及其液晶混合物

    公开(公告)号:US20150131039A1

    公开(公告)日:2015-05-14

    申请号:US14074882

    申请日:2013-11-08

    摘要: A dual-frequency bistable liquid crystal display and the liquid crystal mixture thereof includes liquid crystal cell filled with a liquid crystal mixture which contains dual-frequency liquid crystal, chiral compound, and nematic liquid crystal mixture. The liquid crystal mixture has the characteristics of both the dual-frequency liquid crystal and cholesteric liquid crystal. The dual-frequency bistable liquid crystal display is driven in a frequency modulation mode and can be switched between two optical states by taking advantage of the dielectric anisotropy of the liquid crystal, which results in a short switching time and sharp contrast between two optical states. Furthermore, the maintaining of the two optical states requires no voltage, which does not require the use of a high voltage to destabilize the helical structure of the cholesteric liquid crystal, and does not have to go through a metastable stage. Hence, power consumption and switching time are reduced.

    摘要翻译: 双频双稳态液晶显示器及其液晶混合物包括填充有包含双频液晶,手性化合物和向列型液晶混合物的液晶混合物的液晶单元。 该液晶混合物具有双频液晶和胆甾型液晶的特征。 双频双稳态液晶显示器以频率调制方式驱动,可通过利用液晶的介电各向异性而在两种光学状态之间切换,从而导致两个光学状态之间的切换时间短和对比度较高。 此外,两个光学状态的维持不需要电压,其不需要使用高电压来使得胆甾型液晶的螺旋结构不稳定,并且不必经过亚稳态。 因此,功耗和切换时间减少。

    METHOD AND APPARATUS FOR PERFORMING CHANNEL SHORTENING EQUALIZATION WITH FREQUENCY NOTCH MITIGATION
    10.
    发明申请
    METHOD AND APPARATUS FOR PERFORMING CHANNEL SHORTENING EQUALIZATION WITH FREQUENCY NOTCH MITIGATION 有权
    用于执行频率短路均衡的方法和装置,具有频率减速

    公开(公告)号:US20130114664A1

    公开(公告)日:2013-05-09

    申请号:US13461764

    申请日:2012-05-01

    IPC分类号: H04L27/01

    摘要: A method for performing channel shortening equalization with frequency notch mitigation is provided, where the method is applied to an electronic device. The method includes: obtaining channel response information from channel estimation to determine a relaxed channel convolution matrix corresponding to the channel response information, with the relaxed channel convolution matrix being a partial matrix of a channel convolution matrix corresponding to the channel response information, wherein the relaxed channel convolution matrix is obtained from omitting a portion of matrix elements of the channel convolution matrix; and based upon the relaxed channel convolution matrix, jointly performing time domain channel shortening control and frequency domain flatness control over the TEQ to perform channel shortening equalization with frequency notch mitigation by utilizing the TEQ. In particular, the portion of matrix elements includes a plurality of rows of matrix elements within the channel convolution matrix. An associated apparatus is also provided.

    摘要翻译: 提供了一种用于进行频率切换缓冲的信道缩短均衡的方法,其中该方法应用于电子设备。 该方法包括:从信道估计获得信道响应信息以确定与信道响应信息相对应的松弛信道卷积矩阵,其中松弛信道卷积矩阵是与信道响应信息相对应的信道卷积矩阵的部分矩阵,其中放宽 从省略信道卷积矩阵的矩阵元素的一部分获得信道卷积矩阵; 并且基于松弛的信道卷积矩阵,通过TEQ共同执行时域信道缩短控制和频域平坦度控制,以通过利用TEQ来进行具有频率陷波缓解的信道缩短均衡。 特别地,矩阵元素的部分在信道卷积矩阵内包括多行矩阵元素。 还提供了一种相关联的装置。