-
公开(公告)号：US08216654B2
公开(公告)日：2012-07-10
申请号：US10538856
申请日：2004-02-18
IPC分类号： B23B3/02
CPC分类号： C23C14/564 , C23C14/0005 , C23C16/4401 , C23C16/4404 , C23C16/4407 , C23C30/00 , C23F13/00 , C25F5/00 , Y10T428/12139 , Y10T428/12569 , Y10T428/21 , Y10T428/252 , Y10T428/256
摘要： There are provided a film forming equipment component having a structure in which an deposited film d formed on the component can be separated from the component for a time period shorter than the prior art to reduce damage due to a cleaning fluid S, and a method of cleaning such a component. A metal film layer 2 electrochemically less noble than the matrix metal material 1 of the aforementioned component is formed on the surface of the matrix metal material 1 through thermal spraying, vapor depositing, sputtering, laminating or other process. Alternatively, a second metal film layer 3 electrochemically more noble than the aforementioned matrix metal material 1 is formed on the surface of the metal film layer 2 through said thermal spraying or other process. Thus, a local cell is formed between the metal film layer 2 and the matrix metal material 1 or the second metal film layer 3. Therefore, the deposited film d can be separated from the matrix metal material 1 for an extremely shortened time period, without damaging the matrix metal material 1 itself from the cleaning fluid S.
摘要翻译： 提供了一种成膜设备部件，其具有这样一种结构，其中在组件上形成的沉积膜d可以比现有技术短的时间段与部件分离，以减少由清洗液S引起的损坏的方法 清洗这样一个组件。 通过热喷涂，气相沉积，溅射，层压或其它工艺在基体金属材料1的表面上形成电化学上比上述组分的基体金属材料1更不贵的金属膜层2。 或者，通过所述热喷涂或其它工艺在金属膜层2的表面上形成比上述基体金属材料1电化学更高的第二金属膜层3。 因此，在金属膜层2和基体金属材料1或第二金属膜层3之间形成局部电池。因此，沉积膜d可以在极短的时间内与基体金属材料1分离，而没有 从清洗液S破坏基质金属材料1本身。
-
2.发明申请公开(公告)号：US20110041760A1
公开(公告)日：2011-02-24
申请号：US12989974
申请日：2009-04-27
CPC分类号： C23C4/12 , C22C21/00 , C23C4/08 , C23C4/18 , C23C4/185 , C23C14/564 , C23C16/4404
摘要： Herein disclosed are a method for the production of a water-reactive Al film comprising the steps of melting a material which contains 4NAl or 5NAl as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the flame spraying technique; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with the water-reactive Al film.
摘要翻译： 本文公开了一种制备水反应性Al膜的方法，包括以下步骤：将含有4NA1或5NA1的材料作为Al原料熔化，并以基于2〜5质量％的量添加In Al原料的质量使得材料的组成变得均匀; 根据火焰喷涂技术将所得熔融材料热喷涂在基材表面上; 并通过淬火固化喷射的熔融材料，从而形成其中In均匀分散在Al晶粒中的Al膜; 以及在表面上设置有水反应性Al膜的成膜室的构成部件。
-
3.发明授权Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber 有权水反应性Al复合材料，水反应性Al膜，制备Al膜的方法和成膜室的构成部件公开(公告)号：US08715404B2
公开(公告)日：2014-05-06
申请号：US12990141
申请日：2009-04-27
CPC分类号： C23C4/06 , C22C21/00 , C22C21/02 , C23C4/08 , C23C4/18 , C23C14/564 , C23C16/4404
摘要： Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.
摘要翻译： 本文公开了一种水反应性Al复合材料，其包含含有2〜5质量％的量的添加In的4NAI或5NAI; 基于Al的量，添加总量为0.04〜0.6质量％的Si和Si作为杂质; 使用该材料制备的喷镀Al膜; 制造这种Al膜的方法; 以及在其表面上设置有该喷镀Al膜的成膜室的构成部件。
-
4.发明申请公开(公告)号：US20110036267A1
公开(公告)日：2011-02-17
申请号：US12990141
申请日：2009-04-27
CPC分类号： C23C4/06 , C22C21/00 , C22C21/02 , C23C4/08 , C23C4/18 , C23C14/564 , C23C16/4404
摘要： Herein disclosed are a water-reactive Al composite material which comprises 4NAl or 5NAl containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.
摘要翻译： 本文公开了一种水反应性Al复合材料，其包含含有2〜5质量％的量的添加In的4NA1或5NA1; 基于Al的量，添加总量为0.04〜0.6质量％的Si和Si作为杂质; 使用该材料制备的喷镀Al膜; 制造这种Al膜的方法; 以及在其表面上设置有该喷镀Al膜的成膜室的构成部件。
-
5.发明申请公开(公告)号：US20060240271A1
公开(公告)日：2006-10-26
申请号：US10549034
申请日：2005-03-04
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
摘要翻译： 在存在水分的铝复合材料中，由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖 由In，Sn，In和Sn的组合组成的组及其合金组成。 前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量％。 将上述量的低熔点金属加入到例如Al中然后使所得混合物熔融和熔融而获得的材料在非氧化性气氛中淬火固化，从而形成Al复合材料。 可以由上述Al复合材料制备Al膜，Al喷镀膜和Al粉末。 还提供了一种用于成膜室的部件，其表面上设置有水可折叠的Al膜。 使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作，然后可以从成膜材料的成膜材料回收成膜材料 以相当大的厚度沉积。
-
6.发明授权Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber 有权水反应性Al复合材料，水反应性Al膜，制备Al膜的方法和成膜室的构成部件公开(公告)号：US08808619B2
公开(公告)日：2014-08-19
申请号：US12990176
申请日：2009-04-27
IPC分类号： C22C21/00
CPC分类号： C23C4/06 , C22C21/00 , C23C4/08 , C23C4/18 , C23C14/564 , C23C16/4404 , C23C16/4407
摘要： Provided herein are a water-reactive Al composite material which comprises 4NAl or 5NAl, as an Al raw material, containing, on the basis of the amount of the Al raw material, added Bi in an amount ranging from 0.8 to 1.4% by mass and Si, including the Si as an impurity of the Al raw material, in a total amount ranging from 0.25 to 0.7% by mass; a thermally sprayed Al film produced using this Al composite material; a method for the production of this Al film; and a constituent member for a film-forming chamber, which is provided, on the surface, with the thermally sprayed Al film.
摘要翻译： 本文提供了一种水反应性Al复合材料，其包含作为Al原料的4NA1或5NA1，其以Al原料的量添加量为0.8〜1.4质量％的添加量，以及 Si，包括作为Al原料的杂质的Si，总量为0.25〜0.7质量％ 使用该Al复合材料制造的喷镀Al膜; 该Al膜的制造方法; 以及在表面设置有热喷涂的Al膜的成膜室的构成部件。
-
公开(公告)号：US07508522B2
公开(公告)日：2009-03-24
申请号：US11047970
申请日：2005-01-31
申请人： Yutaka Kadowaki , Shu Morikawa , Jun Matsumoto , Naoki Kimura , Shinji Yamamoto
发明人： Yutaka Kadowaki , Shu Morikawa , Jun Matsumoto , Naoki Kimura , Shinji Yamamoto
IPC分类号： G01N21/55
CPC分类号： G01N21/55
摘要： A reflected light measuring apparatus including an illumination system and a light receiving system which receives reflected light from a measuring area of an object illuminated with measuring light projected from the illumination system. The illumination system projects the measuring light with a prescribed angular width onto each point in the measuring area. The illumination system and the light receiving system project the measuring light onto the measuring area and receive the reflected light via a telecentric optical system.
摘要翻译： 一种反射光测量装置，包括照明系统和光接收系统，其接收来自从照明系统投射的测量光照射的物体的测量区域的反射光。 照明系统将测量光以规定的角度宽度投射到测量区域的每个点上。 照明系统和光接收系统将测量光投射到测量区域上，并通过远心光学系统接收反射光。
-
公开(公告)号：US20050179902A1
公开(公告)日：2005-08-18
申请号：US11047970
申请日：2005-01-31
申请人： Yutaka Kadowaki , Shu Morikawa , Jun Matsumoto , Naoki Kimura , Shinji Yamamoto
发明人： Yutaka Kadowaki , Shu Morikawa , Jun Matsumoto , Naoki Kimura , Shinji Yamamoto
CPC分类号： G01N21/55
摘要： An illumination system comprises a light source unit, a condenser lens, and a lens for constructing a telecentric optical system, and projects measuring light onto a specimen to be measured, from an angle tilted by a prescribed angle relative to the normal to the specimen. A light receiving system is an optical system comprising the lens, a light receiving lens, and a light receiving sensor and, of the reflected light produced by reflection of the measuring light, the light receiving system receives reflected light rays reflected in a direction whose angle to the normal to the measuring surface is 0°. In this way, the telecentric optical system is constructed by placing the lens in the light paths of the illumination system and the light receiving system; with this configuration, the projection angle of the measuring light to the curved specimen and the receiving angle of the reflected light from the curved specimen, respectively, can be made the same within the curved surface of the specimen.
摘要翻译： 照明系统包括光源单元，聚光透镜和用于构造远心光学系统的透镜，并且从相对于样本的法线倾斜规定角度的角度将测量光投射到待测量的样本上。 光接收系统是包括透镜，光接收透镜和光接收传感器的光学系统，并且通过测量光的反射产生的反射光，光接收系统接收在角度方向上反射的反射光线 到测量表面的法线为0°。 以这种方式，通过将透镜放置在照明系统和光接收系统的光路中来构造远心光学系统; 通过该结构，能够使测定光与弯曲试样的投影角度和来自弯曲试样的反射光的接收角度分别在试样的曲面内相同。
-
9.发明授权公开(公告)号：US08945296B2
公开(公告)日：2015-02-03
申请号：US13818253
申请日：2011-08-12
CPC分类号： C09D1/00 , C22C21/00 , C23C4/06 , C23C14/564 , C23C16/4404
摘要： Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.
摘要翻译： 本发明提供一种水反应性Al系复合材料，其特征在于，通过将Al，2.0〜3.5质量％的In，0.2〜0.5质量％的Si和0.13〜0.25质量％ 的Ti，并且其可以在含水气氛中通过其反应溶解在水中; 使用该复合材料制造的水反应性Al系热喷涂膜; 该Al基热喷涂膜的制造方法; 以及在其表面上设置有该Al系喷镀膜的成膜室的构成部件。
-
10.发明申请WATER-REACTIVE AL-BASED COMPOSITE MATERIAL, WATER-REACTIVE AL-BASED THERMALLY SPRAYED FILM, PROCESS FOR PRODUCTION OF SUCH AL-BASED THERMALLY SPRAYED FILM, AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER 有权水反应性碱性复合材料，水反应性基于热的喷涂膜，用于生产这种基于AL的热喷涂膜的方法和用于成膜室的构成部件公开(公告)号：US20130145961A1
公开(公告)日：2013-06-13
申请号：US13818253
申请日：2011-08-12
IPC分类号： C09D1/00
CPC分类号： C09D1/00 , C22C21/00 , C23C4/06 , C23C14/564 , C23C16/4404
摘要： Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.
摘要翻译： 本发明提供一种水反应性Al系复合材料，其特征在于，通过将Al，2.0〜3.5质量％的In，0.2〜0.5质量％的Si和0.13〜0.25质量％ 的Ti，并且其可以在含水气氛中通过其反应溶解在水中; 使用该复合材料制造的水反应性Al系热喷涂膜; 该Al基热喷涂膜的制造方法; 以及在其表面上设置有该Al系喷镀膜的成膜室的构成部件。
-
-
-
-
-
-
-
-
-
搜索结果
21 条记录 (耗时 0.035 秒)
