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1.发明申请公开(公告)号：US20060240271A1
公开(公告)日：2006-10-26
申请号：US10549034
申请日：2005-03-04
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
摘要翻译： 在存在水分的铝复合材料中，由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖 由In，Sn，In和Sn的组合组成的组及其合金组成。 前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量％。 将上述量的低熔点金属加入到例如Al中然后使所得混合物熔融和熔融而获得的材料在非氧化性气氛中淬火固化，从而形成Al复合材料。 可以由上述Al复合材料制备Al膜，Al喷镀膜和Al粉末。 还提供了一种用于成膜室的部件，其表面上设置有水可折叠的Al膜。 使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作，然后可以从成膜材料的成膜材料回收成膜材料 以相当大的厚度沉积。
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公开(公告)号：US08216654B2
公开(公告)日：2012-07-10
申请号：US10538856
申请日：2004-02-18
IPC分类号： B23B3/02
CPC分类号： C23C14/564 , C23C14/0005 , C23C16/4401 , C23C16/4404 , C23C16/4407 , C23C30/00 , C23F13/00 , C25F5/00 , Y10T428/12139 , Y10T428/12569 , Y10T428/21 , Y10T428/252 , Y10T428/256
摘要： There are provided a film forming equipment component having a structure in which an deposited film d formed on the component can be separated from the component for a time period shorter than the prior art to reduce damage due to a cleaning fluid S, and a method of cleaning such a component. A metal film layer 2 electrochemically less noble than the matrix metal material 1 of the aforementioned component is formed on the surface of the matrix metal material 1 through thermal spraying, vapor depositing, sputtering, laminating or other process. Alternatively, a second metal film layer 3 electrochemically more noble than the aforementioned matrix metal material 1 is formed on the surface of the metal film layer 2 through said thermal spraying or other process. Thus, a local cell is formed between the metal film layer 2 and the matrix metal material 1 or the second metal film layer 3. Therefore, the deposited film d can be separated from the matrix metal material 1 for an extremely shortened time period, without damaging the matrix metal material 1 itself from the cleaning fluid S.
摘要翻译： 提供了一种成膜设备部件，其具有这样一种结构，其中在组件上形成的沉积膜d可以比现有技术短的时间段与部件分离，以减少由清洗液S引起的损坏的方法 清洗这样一个组件。 通过热喷涂，气相沉积，溅射，层压或其它工艺在基体金属材料1的表面上形成电化学上比上述组分的基体金属材料1更不贵的金属膜层2。 或者，通过所述热喷涂或其它工艺在金属膜层2的表面上形成比上述基体金属材料1电化学更高的第二金属膜层3。 因此，在金属膜层2和基体金属材料1或第二金属膜层3之间形成局部电池。因此，沉积膜d可以在极短的时间内与基体金属材料1分离，而没有 从清洗液S破坏基质金属材料1本身。
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公开(公告)号：US07436068B2
公开(公告)日：2008-10-14
申请号：US10538087
申请日：2004-01-22
CPC分类号： H01L21/6704 , C23C16/4407
摘要： Herein disclosed are a component of a film-forming device, in which a thin films is formed on a substrate using a film-forming material, whose surface structure makes any breakage, peeling off and/or falling off of a film adhered to the component quite difficult, while the structure permits easy removal of such an adhered film within a short period of time when cleaning the component as sell as a method for cleaning the component. A large number of through holes each extending from the back face to the top face of the component are formed for the penetration of a cleaning solution into the boundary between the component and a film of the film-forming material adhered to the surface of the component and formed during the formation of the foregoing thin film. This easily allows the peeling off and removal of the film adhered to the component within a short period of time as compared when the adhered film is dissolved only from the surface thereof.
摘要翻译： 本文公开了一种成膜装置的组件，其中在使用成膜材料的基板上形成薄膜，其表面结构使得附着到部件上的膜的断裂，剥离和/或脱落 相当困难，而结构允许在清洁作为销售的部件作为清洁部件的方法的短时间内容易地去除这种粘附膜。 形成从组件的背面延伸到顶面的大量通孔，用于将清洁溶液渗透到粘附到部件表面的成膜材料和成膜材料的膜之间的边界中 并且在形成上述薄膜期间形成。 与粘附膜仅从其表面溶解的情况相比，容易在短时间内剥离和除去附着在部件上的膜。
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公开(公告)号：US20060246735A1
公开(公告)日：2006-11-02
申请号：US10538856
申请日：2004-02-18
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： C23C14/564 , C23C14/0005 , C23C16/4401 , C23C16/4404 , C23C16/4407 , C23C30/00 , C23F13/00 , C25F5/00 , Y10T428/12139 , Y10T428/12569 , Y10T428/21 , Y10T428/252 , Y10T428/256
摘要： There are provided a film forming equipment component having a structure in which an deposited film d formed on the component can be separated from the component for a time period shorter than the prior art to reduce damage due to a cleaning fluid S, and a method of cleaning such a component. A metal film layer 2 electrochemically less noble than the matrix metal material 1 of the aforementioned component is formed on the surface of the matrix metal material 1 through thermal spraying, vapor depositing, sputtering, laminating or other process. Alternatively, a second metal film layer 3 electrochemically more noble than the aforementioned matrix metal material 1 is formed on the surface of the metal film layer 2 through said thermal spraying or other process. Thus, a local cell is formed between the metal film layer 2 and the matrix metal material 1 or the second metal film layer 3. Therefore, the deposited film d can be separated from the matrix metal material 1 for an extremely shortened time period, without damaging the matrix metal material 1 itself from the cleaning fluid S.
摘要翻译： 提供了一种成膜设备部件，其具有这样一种结构，其中在组件上形成的沉积膜d可以比现有技术短的时间段与部件分离，以减少由清洗液S引起的损坏的方法 清洗这样一个组件。 通过热喷涂，气相沉积，溅射，层压或其它工艺在基体金属材料1的表面上形成电化学上比上述组分的基体金属材料1更不贵的金属膜层2。 或者，通过所述热喷涂或其它工艺在金属膜层2的表面上形成比上述基体金属材料1电化学更高的第二金属膜层3。 因此，在金属膜层2和基体金属材料1或第二金属膜层3之间形成局部电池。 因此，沉积膜d可以在非常短的时间内与基体金属材料1分离，而不会使基体金属材料1本身从清洗流体S损伤。
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公开(公告)号：US20060144418A1
公开(公告)日：2006-07-06
申请号：US10538087
申请日：2004-01-22
IPC分类号： B08B6/00
CPC分类号： H01L21/6704 , C23C16/4407
摘要： Herein disclosed are a component of a film-forming device, in which a thin films is formed on a substrate using a film-forming material, whose surface structure makes any breakage, peeling off and/or falling off of a film adhered to the component quite difficult, while the structure permits easy removal of such an adhered film within a short period of time when cleaning the component as sell as a method for cleaning the component. A large number of through holes each extending from the back face to the top face of the component are formed for the penetration of a cleaning solution into the boundary between the component and a film of the film-forming material adhered to the surface of the component and formed during the formation of the foregoing thin film. This easily allows the peeling off and removal of the film adhered to the component within a short period of time as compared when the adhered film is dissolved only from the surface thereof.
摘要翻译： 本文公开了一种成膜装置的组件，其中在使用成膜材料的基板上形成薄膜，其表面结构使得附着到部件上的膜的断裂，剥离和/或脱落 相当困难，而结构允许在清洁作为销售的部件作为清洁部件的方法的短时间内容易地去除这种粘附膜。 形成从组件的背面延伸到顶面的大量通孔，用于将清洁溶液渗透到粘附到部件表面的成膜材料和成膜材料的膜之间的边界中 并且在形成上述薄膜期间形成。 与粘附膜仅从其表面溶解的情况相比，容易在短时间内剥离和除去附着在部件上的膜。
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公开(公告)号：US20110200481A1
公开(公告)日：2011-08-18
申请号：US13091866
申请日：2011-04-21
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
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7.发明申请WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS 审中-公开水溶性Al复合材料，Al膜和Al粉末的材料及其制备方法，以及作为构成膜形成元件的组分成员以及回收成膜材料的方法公开(公告)号：US20110192546A1
公开(公告)日：2011-08-11
申请号：US13091878
申请日：2011-04-21
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
摘要翻译： 在存在水分的铝复合材料中，由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖 由In，Sn，In和Sn的组合组成的组及其合金组成。 前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量％。 将上述量的低熔点金属加入到例如Al中然后使所得混合物熔融和熔融而获得的材料在非氧化性气氛中淬火固化，从而形成Al复合材料。 可以由上述Al复合材料制备Al膜，Al喷镀膜和Al粉末。 还提供了一种用于成膜室的部件，其表面上设置有水可折叠的Al膜。 使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作，然后可以从成膜材料的成膜材料回收成膜材料 以相当大的厚度沉积。
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公开(公告)号：US07951463B2
公开(公告)日：2011-05-31
申请号：US10549034
申请日：2005-03-04
IPC分类号： B32B15/20
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In an Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
摘要翻译： 在存在水分的铝复合材料中，由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖 由In，Sn，In和Sn的组合组成的组及其合金组成。 前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量％。 还提供了一种用于成膜室的部件，其表面上设置有水可折叠的Al膜。 使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作，然后可以从成膜材料的成膜材料回收成膜材料 以相当大的厚度沉积。
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9.发明授权Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber 有权水反应性Al复合材料，水反应性Al膜，制备Al膜的方法和成膜室的构成部件公开(公告)号：US08808619B2
公开(公告)日：2014-08-19
申请号：US12990176
申请日：2009-04-27
IPC分类号： C22C21/00
CPC分类号： C23C4/06 , C22C21/00 , C23C4/08 , C23C4/18 , C23C14/564 , C23C16/4404 , C23C16/4407
摘要： Provided herein are a water-reactive Al composite material which comprises 4NAl or 5NAl, as an Al raw material, containing, on the basis of the amount of the Al raw material, added Bi in an amount ranging from 0.8 to 1.4% by mass and Si, including the Si as an impurity of the Al raw material, in a total amount ranging from 0.25 to 0.7% by mass; a thermally sprayed Al film produced using this Al composite material; a method for the production of this Al film; and a constituent member for a film-forming chamber, which is provided, on the surface, with the thermally sprayed Al film.
摘要翻译： 本文提供了一种水反应性Al复合材料，其包含作为Al原料的4NA1或5NA1，其以Al原料的量添加量为0.8〜1.4质量％的添加量，以及 Si，包括作为Al原料的杂质的Si，总量为0.25〜0.7质量％ 使用该Al复合材料制造的喷镀Al膜; 该Al膜的制造方法; 以及在表面设置有热喷涂的Al膜的成膜室的构成部件。
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10.发明授权Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber 有权水反应性Al复合材料，水反应性Al膜，制备Al膜的方法和成膜室的构成部件公开(公告)号：US08715404B2
公开(公告)日：2014-05-06
申请号：US12990141
申请日：2009-04-27
CPC分类号： C23C4/06 , C22C21/00 , C22C21/02 , C23C4/08 , C23C4/18 , C23C14/564 , C23C16/4404
摘要： Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.
摘要翻译： 本文公开了一种水反应性Al复合材料，其包含含有2〜5质量％的量的添加In的4NAI或5NAI; 基于Al的量，添加总量为0.04〜0.6质量％的Si和Si作为杂质; 使用该材料制备的喷镀Al膜; 制造这种Al膜的方法; 以及在其表面上设置有该喷镀Al膜的成膜室的构成部件。
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