公开(公告)号：US5676851A

公开(公告)日：1997-10-14

申请号：US723875

申请日：1996-09-23

申请人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

发明人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

IPC分类号： G01P1/02 ,  G01P15/125 ,  B44C1/22 ,  H01L21/00

CPC分类号： G01P1/023 ,  G01P15/125 ,  G01P2015/0828

摘要： A capacitance acceleration sensor and method of making same are disclosed. A capacitance acceleration sensor includes a movable electrode etched from a silicon plate which is clamped between two solid dielectric plate members of glass, silicon oxides, or oxygen oxides. Static electrodes are secured to surfaces of the dielectric members facing opposite the movable electrode, thereby providing easy manufacturing assessibility for leadout wires from these electrodes. In certain embodiments, the movable electrode is formed integrally with a monocrystalline silicon plate member which also contains an integrated circuit for generating an output acceleration signal in response to movement of the movable electrode when the assembly experiences acceleration forces.

摘要翻译： 公开了一种电容加速度传感器及其制造方法。 电容加速度传感器包括从硅板蚀刻的可移动电极，其被夹在玻璃，氧化硅或氧化物的两个固体电介质板构件之间。 静电极固定在与可动电极相对的电介质元件的表面上，从而为这些电极提供引出线的易制造评估。 在某些实施例中，可移动电极与单晶硅板构件整体形成，该单晶硅板构件还包含用于当组件经受加速力时响应于可移动电极的移动而产生输出加速度信号的集成电路。

公开(公告)号：US5616844A

公开(公告)日：1997-04-01

申请号：US364098

申请日：1994-12-27

申请人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

发明人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

IPC分类号： G01P1/02 ,  G01P15/125

CPC分类号： G01P1/023 ,  G01P15/125 ,  G01P2015/0828

摘要： A capacitance acceleration sensor includes a movable electrode etched from a silicon plate which is clamped between two solid dielectric plate members of glass, silicon oxides, or oxygen oxides. Static electrodes are secured to surfaces of the dielectric members facing opposite the movable electrode, thereby providing easy manufacturing assessibility for leadout wires from these electrodes. In certain embodiments, the movable electrode is formed integrally with a monocrystalline silicon plate member which also contains an integrated circuit for generating an output acceleration signal in response to movement of the movable electrode when the assembly experiences acceleration forces.

摘要翻译： 电容加速度传感器包括从硅板蚀刻的可移动电极，其被夹在玻璃，氧化硅或氧化物的两个固体电介质板构件之间。 静电极固定在与可动电极相对的电介质元件的表面上，从而为这些电极提供引出线的易制造评估。 在某些实施例中，可移动电极与单晶硅板构件整体形成，该单晶硅板构件还包含用于当组件经受加速力时响应于可移动电极的移动而产生输出加速度信号的集成电路。