公开(公告)号：US5676851A

公开(公告)日：1997-10-14

申请号：US723875

申请日：1996-09-23

申请人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

发明人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

IPC分类号： G01P1/02 ,  G01P15/125 ,  B44C1/22 ,  H01L21/00

CPC分类号： G01P1/023 ,  G01P15/125 ,  G01P2015/0828

摘要： A capacitance acceleration sensor and method of making same are disclosed. A capacitance acceleration sensor includes a movable electrode etched from a silicon plate which is clamped between two solid dielectric plate members of glass, silicon oxides, or oxygen oxides. Static electrodes are secured to surfaces of the dielectric members facing opposite the movable electrode, thereby providing easy manufacturing assessibility for leadout wires from these electrodes. In certain embodiments, the movable electrode is formed integrally with a monocrystalline silicon plate member which also contains an integrated circuit for generating an output acceleration signal in response to movement of the movable electrode when the assembly experiences acceleration forces.

摘要翻译： 公开了一种电容加速度传感器及其制造方法。 电容加速度传感器包括从硅板蚀刻的可移动电极，其被夹在玻璃，氧化硅或氧化物的两个固体电介质板构件之间。 静电极固定在与可动电极相对的电介质元件的表面上，从而为这些电极提供引出线的易制造评估。 在某些实施例中，可移动电极与单晶硅板构件整体形成，该单晶硅板构件还包含用于当组件经受加速力时响应于可移动电极的移动而产生输出加速度信号的集成电路。

公开(公告)号：US5616844A

公开(公告)日：1997-04-01

申请号：US364098

申请日：1994-12-27

申请人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

发明人： Masayoshi Suzuki ,  Takao Sasayama ,  Keizi Hanzawa ,  Norio Ichikawa ,  Junichi Horie ,  Yukiko Sugisawa ,  Yuuji Ogasawara

IPC分类号： G01P1/02 ,  G01P15/125

CPC分类号： G01P1/023 ,  G01P15/125 ,  G01P2015/0828

摘要： A capacitance acceleration sensor includes a movable electrode etched from a silicon plate which is clamped between two solid dielectric plate members of glass, silicon oxides, or oxygen oxides. Static electrodes are secured to surfaces of the dielectric members facing opposite the movable electrode, thereby providing easy manufacturing assessibility for leadout wires from these electrodes. In certain embodiments, the movable electrode is formed integrally with a monocrystalline silicon plate member which also contains an integrated circuit for generating an output acceleration signal in response to movement of the movable electrode when the assembly experiences acceleration forces.

摘要翻译： 电容加速度传感器包括从硅板蚀刻的可移动电极，其被夹在玻璃，氧化硅或氧化物的两个固体电介质板构件之间。 静电极固定在与可动电极相对的电介质元件的表面上，从而为这些电极提供引出线的易制造评估。 在某些实施例中，可移动电极与单晶硅板构件整体形成，该单晶硅板构件还包含用于当组件经受加速力时响应于可移动电极的移动而产生输出加速度信号的集成电路。

公开(公告)号：US5417312A

公开(公告)日：1995-05-23

申请号：US147083

申请日：1993-11-03

申请人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Tomoyuki Tanaka ,  Masayuki Miki ,  Masahiro Matsumoto ,  Norio Ichikawa ,  Hiromichi Ebine ,  Yukiko Sugisawa ,  Kanemasa Sato ,  Sadayasu Ueno ,  Yasuhiro Asano ,  Masanori Kubota ,  Masayoshi Suzuki

发明人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Tomoyuki Tanaka ,  Masayuki Miki ,  Masahiro Matsumoto ,  Norio Ichikawa ,  Hiromichi Ebine ,  Yukiko Sugisawa ,  Kanemasa Sato ,  Sadayasu Ueno ,  Yasuhiro Asano ,  Masanori Kubota ,  Masayoshi Suzuki

IPC分类号： G01P1/00 ,  G01P15/125 ,  G01P15/13 ,  B60T8/58 ,  B60T8/72 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P1/003 ,  G01P15/131 ,  G01P2015/0828

摘要： A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates. A sensor detector unit processing circuit has the output characteristic of the circuit digitally adjusted by suitable switching of a plurality of resistors, and the sensor chip and the detector unit integrated circuit may be located on a common base and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40.degree. C. or lower is, advantageously, charged into the hermetically sealed chamber.

摘要翻译： 半导体加速度传感器由具有在一端具有预定质量的导电可移动电极的悬臂形成，相对于位于可动电极的相对侧上的可动电极固定的至少一对固定导电电极和提供的间隙 在可动电极和固定电极之间。 为了防止可动电极与被接触的固定电极熔合，在本发明的第一方面中，在可动电极和固定电极之间设置绝缘层，该层位于可动电极上或固定电极上， 第二方面，可动电极或优选固定电极由高熔点材料形成。 在这样的第二方面，为了提高高熔点材料与安装有固定电极的基板之间的粘附性，首先在基板上涂覆较低熔点的材料。 传感器检测器单元处理电路具有通过多个电阻器的合适切换数字调节的电路的输出特性，并且传感器芯片和检测器单元集成电路可以位于公共基座上并且安装在气密密封的室中以防止 影响传感器和检测器单元组件运行的不利环境影响。 露点为-40℃或更低的气体有利地被装入密封的气室中。