公开(公告)号：US20190180968A1

公开(公告)日：2019-06-13

申请号：US16266254

申请日：2019-02-04

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： JOSEPH C. SPAGNOLA ,  MARK A. ROEHRIG ,  THOMAS P. KLUN ,  ALAN K. NACHTIGAL ,  CHRISTOPHER S. LYONS ,  GUY D. JOLY

IPC: H01J1/70 ,  C23C28/00 ,  C08J7/04 ,  C23C14/02 ,  C23C14/58 ,  C23C14/34 ,  C23C14/22 ,  C23C14/08 ,  C23C14/12

Abstract: A barrier film including a substrate; a base polymer layer adjacent to the substrate; an oxide layer adjacent to the base polymer layer; a adhesion-modifying layer adjacent to the oxide layer; and a top coat polymer layer adjacent to the adhesion-modifying layer. An optional inorganic layer can be applied over the top coat polymer layer. The inclusion of a adhesion-modifying layer provides for enhanced resistance to moisture and improved peel strength adhesion of the top coat polymer layer to the underlying barrier stack layers.