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公开(公告)号：US20200041432A1
公开(公告)日：2020-02-06
申请号：US16498814
申请日：2018-03-29
Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
Inventor： Lu Ding , Jinghua Teng
IPC: G01N25/72
Abstract: Systems and methods for laser stimulated lock-in thermography (LLT) crack detection are provided. The system includes a spatial light modulator and a controller. The spatial light modulator reflects a laser beam to focus the laser beam onto a sample for detection of a crack, hole or scratch. The controller is coupled to the spatial light modulator and controls operation of the spatial light modulator to switch focus of the laser beam onto the sample between a plurality of LLT focus configurations for detection of the crack, hole or scratch on the sample. The method includes using a first one of the plurality of LLT configurations for coarse scanning of the sample to detect a crack, hole or scratch on the sample and, when a crack, hole or scratch is detected on the sample, switching to a second one of the plurality of LLT configurations for fine scanning of the crack, hole or scratch on the sample to determine one or more parameters of the crack, hole or scratch on the sample.
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公开(公告)号：US11714055B2
公开(公告)日：2023-08-01
申请号：US17842391
申请日：2022-06-16
Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
Inventor： Lu Ding , Jinghua Teng
Abstract: Systems and methods for laser stimulated lock-in thermography (LLT) crack detection are provided. The system includes a spatial light modulator and a controller. The spatial light modulator reflects a laser beam to focus the laser beam onto a sample for detection of a crack, hole or scratch. The controller is coupled to the spatial light modulator and controls operation of the spatial light modulator to switch focus of the laser beam onto the sample between a plurality of LLT focus configurations for detection of the crack, hole or scratch on the sample. The method includes using a first one of the plurality of LLT configurations for coarse scanning of the sample to detect a crack, hole or scratch on the sample and, when a crack, hole or scratch is detected on the sample, switching to a second one of the plurality of LLT configurations for fine scanning of the crack, hole or scratch on the sample to determine one or more parameters of the crack, hole or scratch on the sample.
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公开(公告)号：US20220307999A1
公开(公告)日：2022-09-29
申请号：US17842391
申请日：2022-06-16
Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
Inventor： Lu Ding , Jinghua Teng
Abstract: Systems and methods for laser stimulated lock-in thermography (LLT) crack detection are provided. The system includes a spatial light modulator and a controller. The spatial light modulator reflects a laser beam to focus the laser beam onto a sample for detection of a crack, hole or scratch. The controller is coupled to the spatial light modulator and controls operation of the spatial light modulator to switch focus of the laser beam onto the sample between a plurality of LLT focus configurations for detection of the crack, hole or scratch on the sample. The method includes using a first one of the plurality of LLT configurations for coarse scanning of the sample to detect a crack, hole or scratch on the sample and, when a crack, hole or scratch is detected on the sample, switching to a second one of the plurality of LLT configurations for fine scanning of the crack, hole or scratch on the sample to determine one or more parameters of the crack, hole or scratch on the sample.
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公开(公告)号：US10914970B2
公开(公告)日：2021-02-09
申请号：US16040726
申请日：2018-07-20
Applicant: Agency for Science, Technology and Research
Inventor： Lu Ding , Jinghua Teng
Abstract: A semiconductor device includes a semiconductor substrate having a metasurface layer configured with multiple pairs of finger portions in a repeating arrangement. The multiple pairs of finger portions are electrically configurable to modulate a radiation signal received by the semiconductor device. Each pair of finger portions includes first and second members where the first member is doped with a first dopant and the second member is doped with a second dopant being different to the first dopant. Any two adjacent first or second members are configured to be separated by at least deep subwavelength to enable the repeating arrangement.
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