公开(公告)号：US12061146B2

公开(公告)日：2024-08-13

申请号：US17267287

申请日：2020-10-16

Applicant: AISIN CORPORATION

Inventor： Amrita Sana ,  Giles Allison ,  Hironori Suzuki ,  Hidemi Kato ,  Masao Ando ,  Viet Cuong Le

IPC: G01N21/552 ,  H01L31/0232 ,  H01L31/108 ,  G01N21/43

CPC classification number: G01N21/553 ,  H01L31/0232 ,  H01L31/108 ,  G01N2021/434

Abstract: An electricity measuring type surface plasmon resonance sensor includes: a plasmon resonance intensifying sensor chip in which a prism and a sensor chip including an electrode, a silicon semiconductor film, and a plasmon resonance film electrode arranged in this order are arranged in an order of the prism, the electrode, the silicon semiconductor film, and the plasmon resonance film electrode; and an electric measuring apparatus which directly measures a current or voltage from the electrode and the plasmon resonance film electrode.