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1.发明授权Method and apparatus for producing alloyed getter films in sputter-ion pumps 失效用于在溅射泵中生产合金吸收膜的方法和装置
公开(公告)号：US3542488A
公开(公告)日：1970-11-24
申请号：US3542488D
申请日：1968-10-28
Applicant: ANDAR ITI INC
Inventor： HALL LEWIS D
CPC classification number: H01J41/20
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2.发明授权Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor 失效离子泵质谱仪泄漏探测器装置及方法及其离子泵
公开(公告)号：US3591827A
公开(公告)日：1971-07-06
申请号：US3591827D
申请日：1967-11-29
Applicant: ANDAR ITI INC
Inventor： HALL LEWIS D
Abstract: A mass spectrometer is connected to a vacuum system which includes a vacuum-pumping system and which is communicated with the vessel under test exposed to a suitable probe gas. The vacuum-pumping system consists of a first stage in the form of a mechanical roughing pump for reducing the system pressure to roughing pressure, and a second stage in the form of a highvacuum pump which comprises an electronic getter-ion (sublimation) pump for pumping the chemically active nonnoble gases in combination with a Penning discharge chamber which houses discharge cathodes exposed to the deposit of the getter material from the getter-ion pump for pumping the noble gas.
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