公开(公告)号：US20160131548A1

公开(公告)日：2016-05-12

申请号：US14536102

申请日：2014-11-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Scott C. Heinbuch

IPC: G01L21/34

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J27/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/08 ,  H01J41/00 ,  H01J41/02 ,  H01J41/06

Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.

Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。

公开(公告)号：US09995839B2

公开(公告)日：2018-06-12

申请号：US15311937

申请日：2015-05-22

Applicant: Gerd Reime

Inventor： Gerd Reime

IPC: G01R27/28 ,  G01V3/10 ,  G01R27/26 ,  G01R27/00 ,  G01N27/02 ,  G01N27/62 ,  H01J41/02 ,  H01J41/00 ,  G01N27/64

CPC classification number: G01V3/10 ,  G01N27/028 ,  G01N27/62 ,  G01N27/64 ,  G01R27/00 ,  G01R27/26 ,  G01R27/2611 ,  G01R27/267 ,  H01J41/00 ,  H01J41/02

Abstract: In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

公开(公告)号：US08342813B2

公开(公告)日：2013-01-01

申请号：US12920797

申请日：2009-03-26

Applicant: Michael Laurence Ferris ,  Andrea Conte

Inventor： Michael Laurence Ferris ,  Andrea Conte

IPC: F04B37/02 ,  F04F99/00

CPC classification number: H01J41/00

Abstract: A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.

Abstract translation: 组合泵系统包括吸气泵和离子泵。 吸气剂和离子泵安装在相同的法兰上，并且在两个不同的位置上布置在法兰的同一侧。 凸缘可以安装到真空室，使得组合的泵送系统排空真空室。

公开(公告)号：US20160240479A1

公开(公告)日：2016-08-18

申请号：US14624907

申请日：2015-02-18

Applicant: GLOBALFOUNDRIES INC.

Inventor： Jeanne P. Bickford ,  Nazmul Habib ,  Baozhen Li ,  Tad J. Wilder

IPC: H01L23/525 ,  G01K7/16 ,  H01L23/532 ,  G01N25/00

CPC classification number: G01K7/16 ,  G01L21/30 ,  G01N17/00 ,  G01N27/62 ,  G01N27/64 ,  G01R31/00 ,  H01J41/00 ,  H01J41/02 ,  H01L23/34

Abstract: Aspects of the present disclosure include a computer-implemented method for identifying an operating temperature of an integrated circuit (IC), the method including using a computing device for: applying a test voltage to a test circuit embedded within the IC, the test circuit including a phase shift memory (PSM) element therein, wherein the PSM element crystallizes at a crystallization temperature from an amorphous phase having a first electrical resistance into a crystalline phase having a second electrical resistance, the second electrical resistance being less than the first electrical resistance; and identifying the IC as having operated above the crystallization temperature in response to a resistance of the test circuit at the test voltage being outside of the target operating range.

Abstract translation: 本公开的方面包括用于识别集成电路（IC）的工作温度的计算机实现的方法，所述方法包括使用计算设备：将测试电压施加到嵌入在所述IC内的测试电路，所述测试电路包括 在其中的相移存储器（PSM）元件，其中所述PSM元件在结晶温度下从具有第一电阻的非晶相结晶成具有第二电阻的晶相，所述第二电阻小于所述第一电阻; 以及响应于所述测试电压在所述测试电压处于目标工作范围之外的电阻而将所述IC识别为高于所述结晶温度的IC。

公开(公告)号：US20110014063A1

公开(公告)日：2011-01-20

申请号：US12920797

申请日：2009-03-26

Applicant: Michael Laurence Ferris ,  Andrea Conte

Inventor： Michael Laurence Ferris ,  Andrea Conte

IPC: F04B37/02

CPC classification number: H01J41/00

Abstract: A combined pumping system (10) comprises a getter pump (12) and an ion pump (13). The getter and ion pumps (12, 13) are mounted on a same flange (11) and are arranged on the same side of said flange (11) at two different points thereof.

Abstract translation: 组合泵送系统（10）包括吸气泵（12）和离子泵（13）。 吸气剂和离子泵（12,13）安装在相同的凸缘（11）上，并且在其两个不同的位置处布置在所述凸缘（11）的同一侧上。

公开(公告)号：US3174325A

公开(公告)日：1965-03-23

申请号：US24350562

申请日：1962-12-10

Applicant: CA NAT RESEARCH COUNCIL

Inventor： AVELING REDHEAD PAUL

IPC: G01N25/14 ,  G01N30/00 ,  H01J41/00 ,  H01J49/16

CPC classification number: G01N30/00 ,  G01N25/14 ,  G01N2030/008 ,  H01J41/00 ,  H01J49/16

公开(公告)号：US4296356A

公开(公告)日：1981-10-20

申请号：US102480

申请日：1979-12-11

Applicant: Karl Beinitz ,  Joachim Schubert

Inventor： Karl Beinitz ,  Joachim Schubert

IPC: G01L21/32 ,  H01J41/00 ,  G08B21/00 ,  H05B37/03

CPC classification number: H01J41/00 ,  G01L21/32

Abstract: In a circuit for an ionization vacuum gauge having a thermionic filament, a control circuit receptive of a control current for controlling the filament and a switch for applying the control current to the control circuit, a circuit is provided for indicating a filament interruption independent of the state of the switch. The circuit includes at least one resistor by-passing the switch to provide a continuous sensing current to the filament and a detector for detecting the interruption in the sensing current and for indicating such an interruption.

Abstract translation: 在具有热离子细丝的电离真空计的电路中，接受用于控制灯丝的控制电流的控制电路和用于向控制电路施加控制电流的开关，提供电路以指示灯丝中断，独立于 状态的开关。 该电路包括至少一个电阻器旁通开关以向灯丝提供连续的感测电流，以及用于检测感测电流中断并用于指示这种中断的检测器。

公开(公告)号：US3717525A

公开(公告)日：1973-02-20

申请号：US3717525D

申请日：1968-05-23

Applicant: VARIAN MAT GMBH

Inventor： BUELTEMANN H

IPC: G01M3/20 ,  H01J41/00 ,  B32B5/18 ,  B32B31/12

CPC classification number: G01M3/20 ,  H01J41/00

Abstract: THE INVENTION IS CONCERNED WITH A METHOD OF MAKING GAS DIFFUUSION MEMBRANES. THE PORES ADJACENT THE SURFACE OF A POROUS PERMEABLE CARRIER MEMBER ARE FILLED WITH A MATERIAL, LATER TO BE REMOVED, A DIFFUSION MEMBER IS APPLIED TO THAT SURFACE, AND THE FILLER MATERIAL IS THEN REMOVED. IN ANOTHER EMBODIMENT A DIFFUSION MEMBER IS APPLIED TIO A GLASS CARRIER MEMBER WHICH IS PORE-FREE, AND THE GLASS IS THEN MADE POROUS BY HEAT TREATMENT AND SELECTIVE DISSOLUTION.

公开(公告)号：US3591827A

公开(公告)日：1971-07-06

申请号：US3591827D

申请日：1967-11-29

Applicant: ANDAR ITI INC

Inventor： HALL LEWIS D

IPC: G01M3/20 ,  H01J7/18 ,  H01J41/00 ,  H01J41/20 ,  H01J17/22

CPC classification number: H01J7/18 ,  G01M3/202 ,  H01J41/00 ,  H01J41/20

Abstract: A mass spectrometer is connected to a vacuum system which includes a vacuum-pumping system and which is communicated with the vessel under test exposed to a suitable probe gas. The vacuum-pumping system consists of a first stage in the form of a mechanical roughing pump for reducing the system pressure to roughing pressure, and a second stage in the form of a highvacuum pump which comprises an electronic getter-ion (sublimation) pump for pumping the chemically active nonnoble gases in combination with a Penning discharge chamber which houses discharge cathodes exposed to the deposit of the getter material from the getter-ion pump for pumping the noble gas.

公开(公告)号：US09625325B2

公开(公告)日：2017-04-18

申请号：US14624907

申请日：2015-02-18

Applicant: GLOBALFOUNDRIES INC.

Inventor： Jeanne P. Bickford ,  Nazmul Habib ,  Baozhen Li ,  Tad J. Wilder

IPC: G01R31/26 ,  G01K7/16 ,  G01L21/30 ,  G01R31/00 ,  G01N27/64 ,  G01N27/62 ,  G01N17/00 ,  G01N27/82 ,  G01R33/12 ,  G01N27/74 ,  H01J41/02 ,  H01J41/00

CPC classification number: G01K7/16 ,  G01L21/30 ,  G01N17/00 ,  G01N27/62 ,  G01N27/64 ,  G01R31/00 ,  H01J41/00 ,  H01J41/02 ,  H01L23/34

Abstract: Aspects of the present disclosure include a computer-implemented method for identifying an operating temperature of an integrated circuit (IC), the method including using a computing device for: applying a test voltage to a test circuit embedded within the IC, the test circuit including a phase shift memory (PSM) element therein, wherein the PSM element crystallizes at a crystallization temperature from an amorphous phase having a first electrical resistance into a crystalline phase having a second electrical resistance, the second electrical resistance being less than the first electrical resistance; and identifying the IC as having operated above the crystallization temperature in response to a resistance of the test circuit at the test voltage being outside of the target operating range.