公开(公告)号：US20160263634A1

公开(公告)日：2016-09-15

申请号：US15162160

申请日：2016-05-23

Applicant: APPLIED MATERIALS, INC.

Inventor： BALASUBRAMANIAN RAMACHANDRAN ,  MASATO ISHII ,  AARON MUIR HUNTER

IPC: B08B9/46 ,  C23C16/52 ,  G01N21/94 ,  C23C16/44 ,  B08B3/08 ,  B08B3/10

CPC classification number: B08B9/46 ,  B08B3/08 ,  B08B3/10 ,  C23C16/4405 ,  C23C16/52 ,  G01N21/94 ,  G01N2021/8416 ,  H01L21/67253

Abstract: Methods and apparatus for determining an endpoint of a process chamber cleaning process are provided. In some embodiments, a processing system having an endpoint detection system may include a process chamber having internal surfaces requiring periodic cleaning due to processes performed in the process chamber; and an endpoint detection system that includes a light detector positioned to detect light reflected off of a first internal surface of the process chamber; and a controller coupled to the light detector and configured to determine an endpoint of a cleaning process based upon the detected reflected light.

Abstract translation: 提供了用于确定处理室清洁过程的端点的方法和装置。 在一些实施例中，具有端点检测系统的处理系统可以包括处理室，其具有由于处理室中执行的处理而需要定期清洁的内表面; 以及端点检测系统，其包括被定位成检测从所述处理室的第一内表面反射的光的光检测器; 以及耦合到光检测器并被配置为基于检测到的反射光来确定清洁处理的端点的控制器。

公开(公告)号：US20130255784A1

公开(公告)日：2013-10-03

申请号：US13789819

申请日：2013-03-08

Applicant: APPLIED MATERIALS, INC.

Inventor： ZHIYUAN YE ,  BALASUBRAMANIAN RAMACHANDRAN ,  DENNIS DEMARS

IPC: H01L21/02

CPC classification number: H01L21/02 ,  C23C16/45574 ,  C23C16/481 ,  Y10T137/0318 ,  Y10T137/85938

Abstract: Gas delivery systems and methods of use thereof is provided herein. In some embodiments, a gas delivery system may include a first gas supply to provide a first gas along a first flow path; a flow divider disposed in the first flow path to divide the first flow path into a plurality of second flow paths leading to a plurality of corresponding gas delivery zones; and a plurality of second gas supplies respectively coupled to corresponding ones of the second flow paths to independently provide a second gas to respective ones of the plurality of second flow paths.

Abstract translation: 本文提供气体输送系统及其使用方法。 在一些实施例中，气体输送系统可以包括用于沿第一流动路径提供第一气体的第一气体供应源; 设置在所述第一流动路径中以将所述第一流动路径分成通向多个对应的气体输送区域的多个第二流动路径的分流器; 以及分别耦合到相应的第二流动路径的多个第二气体供应，以独立地向多个第二流动路径中的相应的第二流动路径提供第二气体。