公开(公告)号：US09991101B2

公开(公告)日：2018-06-05

申请号：US14725527

申请日：2015-05-29

Applicant: APPLIED MATERIALS, INC.

Inventor： William Johanson ,  Brij Datta ,  Fuhong Zhang ,  Adolph Miller Allen ,  Yu Y. Liu ,  Prashanth Kothnur

IPC: C23C14/34 ,  H01J37/34 ,  C23C14/35

CPC classification number: H01J37/3405 ,  C23C14/35 ,  H01J37/3452 ,  H01J37/3455 ,  H01J37/3461

Abstract: Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a shunt plate having a central axis and rotatable about the central axis, a closed loop magnetic pole coupled to a first surface of the shunt plate and disposed 360 degrees along a peripheral edge of the shunt plate, and an open loop magnetic pole coupled at a the first surface of the shunt plate wherein the open loop magnetic pole comprises two rows of magnets disposed about the central axis.

公开(公告)号：USD797067S1

公开(公告)日：2017-09-12

申请号：US29524557

申请日：2015-04-21

Applicant: APPLIED MATERIALS, INC.

Designer： Fuhong Zhang ,  William Johanson ,  Yu Liu ,  Adolph Miller Allen ,  Brij Datta ,  Keith A. Miller

公开(公告)号：USD825504S1

公开(公告)日：2018-08-14

申请号：US29610166

申请日：2017-07-10

Applicant: APPLIED MATERIALS, INC.

Designer： Fuhong Zhang ,  William Johanson ,  Yu Liu ,  Adolph Miller Allen ,  Brij Datta ,  Keith A. Miller