公开(公告)号：US20140014270A1

公开(公告)日：2014-01-16

申请号：US13918033

申请日：2013-06-14

Applicant: APPLIED MATERIALS, INC.

Inventor： KARTIK SHAH ,  KALYANJIT GHOSH ,  SCOTT MCCLELLAND

IPC: B01F3/02

CPC classification number: B01F3/026 ,  B01F3/02 ,  B01F5/0057 ,  B01F5/0065 ,  B01F5/0616 ,  B01F5/0618 ,  B01F2005/0636 ,  H01J37/3244 ,  H01J37/32449

Abstract: Embodiments of gas mixing apparatus are provided herein. In some embodiments, a gas mixing apparatus may include a container defining an interior volume, the container having a closed top and bottom and a sidewall having a circular cross section with respect to a central axis of the container passing through the top and bottom; a plurality of first inlets coupled to the container proximate the top of the container to provide a plurality of process gases to the interior volume of the container, the plurality of first inlets disposed such that a flow path of the plurality of process gases through the plurality of first inlets is substantially tangential to the sidewall of the container; and an outlet coupled to the container proximate the bottom of the container to allow the plurality of process gases to be removed from the interior volume of the container.

Abstract translation: 气体混合装置的实施例在此提供。 在一些实施例中，气体混合设备可以包括限定内部容积的容器，所述容器具有封闭的顶部和底部，并且具有相对于穿过顶部和底部的容器的中心轴线具有圆形横截面的侧壁; 多个第一入口，其在容器的顶部附近耦合到容器以向容器的内部空间提供多个处理气体，多个第一入口被设置成使得多个处理气体的流动通过多个 第一入口基本上与容器的侧壁相切; 以及与容器的靠近容器底部相连的出口，以允许多个处理气体从容器的内部容积中移出。