公开(公告)号：US20210005416A1

公开(公告)日：2021-01-07

申请号：US17023879

申请日：2020-09-17

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Ajdin Sarajlic ,  Ronald Johnson ,  Nunzio V. Carbone ,  Peter Ewing ,  Mervyn Deegan

IPC: H01J37/08 ,  H01J37/317

Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.

公开(公告)号：US10923309B2

公开(公告)日：2021-02-16

申请号：US16178167

申请日：2018-11-01

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Ajdin Sarajlic ,  Ronald Johnson ,  Nunzio V. Carbone ,  Peter Ewing ,  Mervyn Deegan

IPC: H01J37/08 ,  H01J37/317

Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.

公开(公告)号：US11450504B2

公开(公告)日：2022-09-20

申请号：US17023879

申请日：2020-09-17

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Ajdin Sarajlic ,  Ronald Johnson ,  Nunzio V. Carbone ,  Peter Ewing ,  Mervyn Deegan

IPC: H01J37/08 ,  H01J37/317

Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.