公开(公告)号：US11450504B2

公开(公告)日：2022-09-20

申请号：US17023879

申请日：2020-09-17

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Ajdin Sarajlic ,  Ronald Johnson ,  Nunzio V. Carbone ,  Peter Ewing ,  Mervyn Deegan

IPC: H01J37/08 ,  H01J37/317

Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.

公开(公告)号：US20200343071A1

公开(公告)日：2020-10-29

申请号：US16923304

申请日：2020-07-08

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Svetlana Radovanov ,  Frank Sinclair ,  You Chia Li ,  Peter Ewing ,  Ajdin Sarajlic ,  Christopher A. Rowland ,  Nunzio Carbone

IPC: H01J37/08 ,  H01J37/317

Abstract: Provided herein are approaches for increasing efficiency of ion sources. In some embodiments, an apparatus, such as an ion source, may include a chamber housing having a first end wall and a second end wall, and an extraction plate coupled to at least one of the first end wall and the second end wall. The extraction plate may include an extraction aperture. The apparatus may further include a tubular cathode extending between the first end wall and the second end wall.

公开(公告)号：US20210005416A1

公开(公告)日：2021-01-07

申请号：US17023879

申请日：2020-09-17

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Ajdin Sarajlic ,  Ronald Johnson ,  Nunzio V. Carbone ,  Peter Ewing ,  Mervyn Deegan

IPC: H01J37/08 ,  H01J37/317

Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.

公开(公告)号：US10748738B1

公开(公告)日：2020-08-18

申请号：US16355997

申请日：2019-03-18

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Svetlana Radovanov ,  Frank Sinclair ,  You Chia Li ,  Peter Ewing ,  Ajdin Sarajlic ,  Christopher A. Rowland ,  Nunzio Carbone

IPC: H01J37/08 ,  H01J37/317

Abstract: Provided herein are approaches for increasing efficiency of ion sources. In some embodiments, an apparatus, such as an ion source, may include a chamber housing having a first end wall and a second end wall, and an extraction plate coupled to at least one of the first end wall and the second end wall. The extraction plate may include an extraction aperture. The apparatus may further include a tubular cathode extending between the first end wall and the second end wall.

公开(公告)号：US11424097B2

公开(公告)日：2022-08-23

申请号：US16923304

申请日：2020-07-08

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Svetlana Radovanov ,  Frank Sinclair ,  You Chia Li ,  Peter Ewing ,  Ajdin Sarajlic ,  Christopher A. Rowland ,  Nunzio Carbone

IPC: H01J37/08 ,  H01J37/317

Abstract: Provided herein are approaches for increasing efficiency of ion sources. In some embodiments, an apparatus, such as an ion source, may include a chamber housing having a first end wall and a second end wall, and an extraction plate coupled to at least one of the first end wall and the second end wall. The extraction plate may include an extraction aperture. The apparatus may further include a tubular cathode extending between the first end wall and the second end wall.

公开(公告)号：US10923309B2

公开(公告)日：2021-02-16

申请号：US16178167

申请日：2018-11-01

Applicant: APPLIED Materials, Inc.

Inventor： Bon-Woong Koo ,  Ajdin Sarajlic ,  Ronald Johnson ,  Nunzio V. Carbone ,  Peter Ewing ,  Mervyn Deegan

IPC: H01J37/08 ,  H01J37/317

Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.