公开(公告)号：US20160282190A1

公开(公告)日：2016-09-29

申请号：US14927320

申请日：2015-10-29

Applicant: ARTUR OLSZAK

Inventor： ARTUR OLSZAK

IPC: G01J9/02 ,  H01S3/00

CPC classification number: G01J9/02 ,  G01B9/02004 ,  G01B9/02005 ,  G01J2009/0249 ,  G02F1/01 ,  G02F1/0121 ,  G02F2203/05

Abstract: A tunable light source having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white-light interferometry. A suitable time-modulated source combines a coherent source with an optical modulator and a waveform generator synchronized with the source.

Abstract translation: 具有时间相干长度的可调谐光源，使得在干涉仪的光程差内检测到干涉条纹被光谱控制，以在干涉仪的检测器的积分时间的连续分数期间产生多个波长。 选择波长以便根据光谱控制的干涉测量（SCI）原理在每个积分时间产生可见的相关图。 这种不同的波长可以通过逐步或连续的调制来产生。 顺序地重复调制步骤，同时根据干涉测量的要求改变调制周期以产生一系列预定的干涉条纹的空间图案。 该方法使得用于常规相移的通路设备的SCI的实践，从而结合了高相干性和白光干涉测量的优点。 合适的时间调制源将相干光源与光调制器和与源同步的波形发生器组合。

公开(公告)号：US20160282103A1

公开(公告)日：2016-09-29

申请号：US14834727

申请日：2015-08-25

Applicant: ARTUR OLSZAK

Inventor： ARTUR OLSZAK

IPC: G01B9/02

CPC classification number: G01B9/02007 ,  G01B9/02004

Abstract: Heterodyne interferometry is combined with spectrally-controlled interferometry (SCI) to achieve the advantages of both. Phase shifts produced by SCI produce phase-shifted correlograms suitable for heterodyne interferometric analysis, thereby enabling interferometric measurements with conventional common-path apparatus free of coherence noise and scanning-related errors, and with the precision of conventional heterodyne interferometry. A spectrum-modulating light source suitable for the invention is obtained by combining a rotating spiral grating with a multi-slit grating placed in the front focal plane of a collimating lens that propagates the light toward a blazed diffraction grating. Another exemplary spectrum-modulating light source is obtained by combining a slit spectrometer with an acousto-optic modulator.

Abstract translation: 外差干涉法与光谱控制干涉测量（SCI）相结合，实现了两者的优点。 由SCI产生的相移产生适合于外差干涉分析的相移相关图，从而可以利用传统的共路径设备进行干涉测量，而不需要相干噪声和扫描相关的误差，并具有常规外差干涉测量的精度。 适用于本发明的光谱调制光源通过将旋转螺旋光栅与放置在准直透镜的前焦平面中的多狭缝光栅组合而获得，该准直透镜将光传播到闪耀的衍射光栅。 通过将狭缝光谱仪与声光调制器组合来获得另一示例性的光谱调制光源。

公开(公告)号：US20160091299A1

公开(公告)日：2016-03-31

申请号：US14956355

申请日：2015-12-01

Applicant: ROBERT SMYTHE ,  ARTUR OLSZAK ,  PIOTR SZWAYKOWSKI

Inventor： ROBERT SMYTHE ,  ARTUR OLSZAK ,  PIOTR SZWAYKOWSKI

IPC: G01B11/00 ,  G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02038 ,  G01B9/02057 ,  G01B9/0209 ,  G01B11/007

Abstract: A non-contact optical probe utilizes an optical reference surface that projects a curved test wavefront toward the test surface and detects it by creating curved interferometric fringes localized in space in front of the reference surface. When a point to be measured on the test surface intersects the location of the fringes, the condition is detected by the probe. Because the fringes are localized at a known position in space with respect to a reference system, the precise coordinate of the surface point can be established. Such localized fringes are preferably produced by a spectrally controllable light source. The curvature of the fringes ensures a sufficiently large angle of acceptance for the probe to capture light reflected from points of high surface slope. The probe is particularly suitable for coordinate measurement machines.

Abstract translation: 非接触光学探针利用光学参考表面，其将弯曲的测试波前投影到测试表面，并通过产生局部在参考表面前方的空间中的弯曲干涉条纹来检测它。 当在测试表面上要测量的点与条纹的位置相交时，探测器检测该条件。 因为边缘相对于参考系统位于空间中的已知位置，所以可以建立表面点的精确坐标。 这样的局部条纹优选地由光谱可控的光源产生。 条纹的曲率确保了探头足够大的接受角度来捕获从高斜率的点反射的光。 探头特别适用于坐标测量机。

公开(公告)号：US20160282102A1

公开(公告)日：2016-09-29

申请号：US14832052

申请日：2015-08-21

Applicant: ARTUR OLSZAK

Inventor： ARTUR OLSZAK

IPC: G01B9/02

CPC classification number: G01B9/02004

Abstract: A tunable light source having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white-light interferometry.

Abstract translation: 具有时间相干长度的可调谐光源，使得在干涉仪的光程差内检测到干涉条纹被光谱控制，以在干涉仪的检测器的积分时间的连续分数期间产生多个波长。 选择波长以便根据光谱控制的干涉测量（SCI）原理在每个积分时间产生可见的相关图。 这种不同的波长可以通过逐步或连续的调制来产生。 顺序地重复调制步骤，同时根据干涉测量的要求改变调制周期以产生一系列预定的干涉条纹的空间图案。 该方法使得用于常规相移的通路设备的SCI的实践，从而结合了高相干性和白光干涉测量的优点。