公开(公告)号：US20160114503A1

公开(公告)日：2016-04-28

申请号：US14986027

申请日：2015-12-31

Applicant: ASAHI KASEI E-MATERIALS CORPORATION

Inventor： Masaru Suzuki ,  Yoshimichi MITAMURA ,  Masatoshi MAEDA

IPC: B29C33/42 ,  G03F7/00 ,  B29C33/38 ,  C23C14/34

CPC classification number: B29C33/424 ,  B29C33/3842 ,  B29C33/56 ,  B29K2833/04 ,  B29K2905/00 ,  B41C1/05 ,  B82Y10/00 ,  B82Y40/00 ,  C23C14/3407 ,  G03F7/0002 ,  H01J2237/281

Abstract: A seamless mold manufacturing method of the invention is a seamless mold manufacturing method having the steps of forming a thermal reaction type resist layer on a sleeve-shaped mold, and exposing using a laser and developing the thermal reaction type resist layer and thereby forming a fine mold pattern, and is characterized in that the thermal reaction type resist layer is comprised of a thermal reaction type resist having a property of reacting in predetermined light intensity or more in a light intensity distribution in a spot diameter of the laser.

Abstract translation: 本发明的无缝模具制造方法是一种无缝模具制造方法，其具有以下步骤：在套筒状模具上形成热反应型抗蚀剂层，并使用激光曝光并显影热反应型抗蚀剂层，从而形成精细 模具图案，其特征在于，热反应型抗蚀剂层由具有在激光的光点直径的光强度分布中以预定的光强度以上反应的性质的热反应型抗蚀剂构成。