公开(公告)号：US20240110283A1

公开(公告)日：2024-04-04

申请号：US18476009

申请日：2023-09-27

Applicant: ASM IP Holding, B.V.

Inventor： Peter Bryan Ruckle ,  Shujin Huang ,  Junwei Su ,  Daw Gen Lim

IPC: C23C16/48 ,  H01L21/66

CPC classification number: C23C16/482 ,  C23C16/481 ,  H01L22/14

Abstract: Methods and systems for monitoring a heat lamp system are disclosed. An exemplary method includes installing a new heat lamp within a reactor system, measuring an initial resistance value of the heat lamp, recording, by a controller, the initial resistance value of the heat lamp, determining a subsequent resistance value of the heat lamp, comparing the subsequent resistance value to the initial resistance value, determining whether the subsequent resistance value deviates from the initial resistance value by a programmed threshold value or more and/or falls below a programmed threshold voltage, and providing a user output to a user interface if the subsequent resistance value deviates from the initial resistance value by the programmed threshold value and/or falls below the programmed threshold voltage. An exemplary system can perform the method of monitoring the heat lamp system.