公开(公告)号：US20240425987A1

公开(公告)日：2024-12-26

申请号：US18746191

申请日：2024-06-18

Applicant: ASM IP Holding B.V.

Inventor： Qi Qi ,  Rajmohan Muthaiah ,  Shubham Garg ,  Jaebeom Lee ,  YoungChol Byun ,  Daniel Maurice ,  Nirmal Gokuldas Waykole ,  Jiyeon Kim ,  Jacqueline Wrench ,  Neelam Sheoran ,  Guannan Chen

IPC: C23C16/455

Abstract: Various embodiments of the present technology may provide a showerhead assembly that includes a showerhead plate having a plurality of through-holes. Each through-hole has a conical-shaped inlet and a conical-shaped outlet. The showerhead plate may include through-holes in a center region having first dimensions and through-holes in an outer region having second dimensions that are different from the first dimensions.

公开(公告)号：US20240162077A1

公开(公告)日：2024-05-16

申请号：US18388661

申请日：2023-11-10

Applicant: ASM IP Holding B.V.

Inventor： Rajmohan Muthaiah ,  Shubham Garg ,  Todd Dunn ,  Hong Gao ,  Joaquin Aguilar Santillan ,  Arjav Prafulkumar Vashi

IPC: H01L21/687

CPC classification number: H01L21/68785 ,  H01L21/68742 ,  H01L21/68757

Abstract: Various embodiments of the present technology may provide an apparatus for use within a reaction chamber. The apparatus includes a susceptor plate having through-holes for which lift pins may be disposed therein. In addition, the susceptor may include an electrostatic chucking function. The susceptor may also include a metal interconnect that is electrically connected to other metal interconnects with a brazing material.