公开(公告)号：US11887881B2

公开(公告)日：2024-01-30

申请号：US17608238

申请日：2020-04-21

Applicant: ASML HOLDING N.V.

Inventor： Bruce Tirri ,  Ping Zhou ,  Elizabeth Mary Stone ,  David Hart Peterson ,  Mehmet Ali Akbas ,  Ryan Mayer ,  Richard Bryan Lewis

IPC: G03F7/00 ,  H01L21/687 ,  C23C16/513

CPC classification number: H01L21/68735 ,  C23C16/513 ,  G03F7/707 ,  G03F7/70783 ,  H01L21/68757

Abstract: A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.