公开(公告)号：US11899380B2

公开(公告)日：2024-02-13

申请号：US17770575

申请日：2020-09-28

Applicant: ASML Holding N.V.

Inventor： Krishanu Shome ,  Igor Matheus Petronella Aarts ,  Junwon Lee

IPC: G03F7/20 ,  G03F9/00 ,  G01J9/02

CPC classification number: G03F9/7046 ,  G01J9/02 ,  G03F9/7049 ,  G03F9/7088 ,  G01J2009/028

Abstract: An apparatus for and method of sensing alignment marks in which a self-referencing interferometer based sensor outputs standing images of the alignment marks and camera device is used to capture the images as output by the sensor and a detector is used to obtain phase information about the alignment marks from the images as output by the sensor.