公开(公告)号：US11899380B2

公开(公告)日：2024-02-13

申请号：US17770575

申请日：2020-09-28

Applicant: ASML Holding N.V.

Inventor： Krishanu Shome ,  Igor Matheus Petronella Aarts ,  Junwon Lee

IPC: G03F7/20 ,  G03F9/00 ,  G01J9/02

CPC classification number: G03F9/7046 ,  G01J9/02 ,  G03F9/7049 ,  G03F9/7088 ,  G01J2009/028

Abstract: An apparatus for and method of sensing alignment marks in which a self-referencing interferometer based sensor outputs standing images of the alignment marks and camera device is used to capture the images as output by the sensor and a detector is used to obtain phase information about the alignment marks from the images as output by the sensor.

公开(公告)号：US20030098982A1

公开(公告)日：2003-05-29

申请号：US09993550

申请日：2001-11-28

Applicant: JDS Uniphase Corporation

Inventor： Robert R. McLeod ,  Gang Lei ,  Long Yang ,  Kuochou Tai

IPC: G01B009/02

CPC classification number: G02B6/29346 ,  G01J3/26 ,  G01J3/4532 ,  G01J9/02 ,  G01J2009/028 ,  G02B6/32 ,  G02B26/001 ,  H04J14/02

Abstract: A truncated series-based cavity interferometer contains a multi-reflection cavity upon which an input light beam is directed at an acute angle, to produce a spatially spread series of multiple order beams through which the transfer function (e.g., a generally square pass/stop profile) of the interferometer is defined. Because the input beam is incident upon the cavity at an acute angle, it is non counter-propagating with respect to the reflected beam, so that no circulator is required for beam separation. The intensity profile of the energy contained in the composite set of spatially separated multiple order beams comprises a spatially separated decaying series of reflections, that are intercepted by independently positionable spatial filter elements.

Abstract translation: 截断的基于系列的空腔干涉仪包含多反射腔，输入光束在该多反射空腔上以锐角指向，以产生空间上扩展的多阶光束系列，通过该光束传递函数（例如，大致平方通过/停止 定义了干涉仪的轮廓。 因为输入光束以锐角入射到空腔上，所以它不会相对于反射光束反向传播，因此光束分离不需要循环器。 包含在空间分离的多阶光束的复合组中的能量的强度分布包括由独立可定位的空间滤光元件截取的空间分离的衰减系列的反射。