公开(公告)号：US20180356738A1

公开(公告)日：2018-12-13

申请号：US15736297

申请日：2016-04-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Antonius Franciscus Johannes DE GROOT ,  Theo Anjes Maria RUIJL ,  Christiaan Louis VALENTIN ,  Christan WERNER

IPC: G03F7/20 ,  H01L21/68 ,  H01L21/027 ,  G03B27/58

CPC classification number: G03F7/70758 ,  G03B27/58 ,  G03F7/70725 ,  G03F7/70775 ,  H01L21/027 ,  H01L21/68

Abstract: The present invention relates to a movable support (1) configured to support an object, comprising: a support plane (2) to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly comprises: a first actuator (3) configured to exert a first actuation force (F1) in a first actuation direction (A1), said first actuation direction being parallel to the support plane, a second actuator (4) configured to exert a second actuation force (F2) in a second actuation direction (A2), said second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.