公开(公告)号：US20170102620A1

公开(公告)日：2017-04-13

申请号：US15286319

申请日：2016-10-05

Applicant: ASML NETHERLANDS B.V.

Inventor： Ferry ZIJP ,  Sietse Thijmen VAN DER POST ,  Fanhe KONG ,  Duygu AKBULUT

IPC: G03F7/20

CPC classification number: G03F7/70133 ,  G01N21/956 ,  G02B21/242 ,  G03F7/70625 ,  G03F7/70633

Abstract: A method including obtaining a plurality of radiation distributions of measurement radiation redirected by the target, each of the plurality of radiation distributions obtained at a different gap distance between the target and an optical element of a measurement apparatus, the optical element being the nearest optical element to the target used to provide the measurement radiation to the target, and determining a parameter related to the target using data of the plurality of radiation distributions in conjunction with a mathematical model describing the measurement target.