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公开(公告)号：US20250044715A1
公开(公告)日：2025-02-06
申请号：US18717286
申请日：2022-12-05
Applicant: ASML NETHERLANDS B.V.
Inventor： Ahmet Burak CUNBUL , Ferry ZIJP , Teunis Willem TUKKER , Peter Fernand William Jozef DENDAS , Abraham Franciscus Hubertus VAN GESSEL
IPC: G03F9/00
Abstract: A projection unit for a level sensor, the projection unit including: a first light pipe having a first inlet configured to receive radiation from a source and a first outlet; and a second light pipe having a second inlet configured to receive the radiation from the first light pipe and a second outlet. The unit may include a lens device configured to receive radiation from the second outlet and to output radiation having a predetermined distribution of intensity and irradiance.
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公开(公告)号：US20250021009A1
公开(公告)日：2025-01-16
申请号：US18714411
申请日：2022-11-22
Applicant: ASML NETHERLANDS B.V. P.O.
Inventor： Ferry ZIJP
Abstract: An optical assembly includes a bulb and a lens for a laser-operated light source. The bulb has a chamber for accommodating an ionizable gas and a plasma formed by energizing the ionizable gas and has a longitudinal axis and a transverse axis perpendicular to the longitudinal axis. In use, the lens is arranged to focus a wavefront of radiation from a laser to a virtual object point located inside the chamber. In use, the bulb is arranged to transmit and refract the wavefront of the radiation to a first real image point in a first cross-section of the longitudinal axis and a second real image point in a second cross-section of the transverse axis. The first real image point and the second real image point are image conjugates of the virtual object point. The virtual object point, the first real image point and the second real image point coincide.
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公开(公告)号：US20210383940A1
公开(公告)日：2021-12-09
申请号：US17409213
申请日：2021-08-23
Applicant: ASML Netherlands B.V.
Inventor： Ferry ZIJP
Abstract: A reflector comprising a hollow body having an interior surface defining a passage through the hollow body, the interior surface having at least one optical surface part configured to reflect radiation and a supporter surface part, wherein the optical surface part has a predetermined optical power and the supporter surface part does not have the predetermined optical power. The reflector is made by providing an axially symmetric mandrel; shaping a part of the circumferential surface of the mandrel to form at least one inverse optical surface part that is not rotationally symmetric about the axis of the mandrel; forming a reflector body around the mandrel; and releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.
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公开(公告)号：US20240184218A1
公开(公告)日：2024-06-06
申请号：US18441772
申请日：2024-02-14
Applicant: ASML Netherlands B.V.
Inventor： Nitesh PANDEY , Arie Jeffrey DEN BOEF , Duygu AKBULUT , Marinus Johannes Maria VAN DAM , Hans BUTLER , Hugo Augustinus Joseph CRAMER , Engelbertus Antonius Fransiscus VAN DER PASCH , Ferry ZIJP , Jeroen Arnoldus Leonardus Johannes RAAYMAKERS , Marinus Petrus REIJNDERS
IPC: G03F7/00 , G01N21/956
CPC classification number: G03F7/70625 , G01N21/956 , G03F7/7015 , G03F7/70633
Abstract: A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a detection optical sensor and at least one lens for capturing a portion of illumination radiation scattered by the structure and transmitting the captured radiation towards the detection optical sensor, wherein the illumination optical system and the detection optical system do not share an optical element.
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公开(公告)号：US20240004313A1
公开(公告)日：2024-01-04
申请号：US18039373
申请日：2021-11-16
Applicant: ASML Netherlands B.V.
IPC: G03F7/00 , G01B11/27 , G01N21/956 , G02B27/64
CPC classification number: G03F7/706851 , G03F7/70633 , G03F7/7065 , G01B11/272 , G01N21/956 , G02B27/646 , G01N2201/063
Abstract: Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating from the illuminated area of the object; an image sensor configured to capture an image formed by the at least one signal beam collected by the objective lens; and a motion compensatory mechanism operable to compensate for relative motion of the stage module with respect to the objective lens during an image acquisition. The motion compensatory mechanism causes a compensatory motion of one or more of: said objective lens or at least one optical element thereof; said image sensor; and/or an optical element comprised within a detection branch and/or illumination branch of the optical imaging system.
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Patent Agency Ranking
公开(公告)号：US20180120714A1
公开(公告)日：2018-05-03
申请号：US15569086
申请日：2016-04-19
Applicant: ASML Netherlands B.V.
Inventor： Ferry ZIJP , Duygu AKBULUT , Peter Danny VAN VOORST , Jeroen Johan Maarten VAN DE WIJDEVEN , Koos VAN BERKEL
CPC classification number: G03F7/70641 , G01B11/14 , G01N21/956 , G02B5/3025 , G02B21/0016 , G03F7/70308 , G03F7/70591 , G03F7/70625 , G03F7/70633
Abstract: A method involving providing incident radiation of a first polarization state by an optical component into an interface of an object with an external environment, wherein a surface is provided adjacent the interface and separated by a gap from the interface, detecting, from incident radiation reflected from the interface and from the surface, radiation of a second different polarization state arising from the reflection of incident radiation of the first polarization at the interface as distinct from the radiation of the first polarization state in the reflected radiation, and producing a position signal representative of a relative position between the focus of the optical component and the object.
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公开(公告)号：US20240404036A1
公开(公告)日：2024-12-05
申请号：US18802614
申请日：2024-08-13
Applicant: ASML Netherlands B.V.
Inventor： Teunis Willem TUKKER , Arie Jeffrey DEN BOEF , Nitesh PANDEY , Marinus Petrus REIJNDERS , Ferry ZIJP
Abstract: Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.
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公开(公告)号：US20220172347A1
公开(公告)日：2022-06-02
申请号：US17608015
申请日：2020-04-02
Applicant: ASML Netherlands B.V.
Inventor： Teunis Willem TUKKER , Arie Jefrey DEN BOEF , Nitesh PANDEY , Marinus Petrus REIJNDERS , Ferry ZIJP
Abstract: Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.
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公开(公告)号：US20190212655A1
公开(公告)日：2019-07-11
申请号：US16279001
申请日：2019-02-19
Applicant: ASML Netherlands B.V.
Inventor： Sietse Thijmen VAN DER POST , Ferry ZIJP , Sander Bas ROOBOL
IPC: G03F7/20
CPC classification number: G03F7/705 , G03F7/70625 , G03F7/70633 , G03F7/7085
Abstract: A method involving a radiation intensity distribution for a target measured using an optical component at a gap from the target, the method including: determining a value of a parameter of interest using the measured radiation intensity distribution and a mathematical model describing the target, the model including an effective medium approximation for roughness of a surface of the optical component or a part thereof.
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公开(公告)号：US20160246189A1
公开(公告)日：2016-08-25
申请号：US15052201
申请日：2016-02-24
Applicant: ASML NETHERLANDS B.V.
Inventor： Koos VAN BERKEL , Duygu AKBULUT , Jeroen Johan Maarten VAN DE WIJDEVEN , Ferry ZIJP
CPC classification number: G03F7/70775 , G01N21/956 , G02B21/0016 , G03F7/70625 , G03F7/70633 , G03F9/7019
Abstract: A method and apparatus for position control of a component relative to a surface is disclosed. The method may include calculating an estimated effect of, or derived from, Casimir force acting between the component and the surface, and compensating positioning of the component relative to the surface using the estimated effect.
Abstract translation: 公开了一种用于相对于表面的部件的位置控制的方法和装置。 该方法可以包括计算在组件和表面之间作用的卡西米力的估计效果或来自其的估计效果，以及使用估计效果来补偿部件相对于表面的定位。
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