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公开(公告)号:US09852937B2
公开(公告)日:2017-12-26
申请号:US15509818
申请日:2015-08-20
IPC分类号: G03F7/20 , H01L21/687 , H01L21/683
CPC分类号: H01L21/68742 , G03F7/707 , G03F7/70708 , G03F7/70716 , G03F7/70725 , G03F7/70733 , H01L21/683 , H01L21/6835 , H01L21/687 , H01L21/68714 , H01L21/6875 , H01L21/68785 , H01L21/68792
摘要: An object table has a lifting mechanism to displace an object from a support surface. The lifting mechanism includes one or more elongated rods extending in a direction substantially perpendicular to the support surface to support the object at a distance from the support surface, the one or more elongated rods being displaceable between positions below the support surface and protruding from the support surface. The mechanism further includes a locking mechanism configured to limit a rotation about a longitudinal axis of the one or more elongated rods. The locking mechanism includes an elastic element that is mechanically connected to both a housing of the lifting mechanism and the one or more elongated rods, the elastic element configured to have a comparatively low stiffness in the support direction and a comparatively high stiffness in a rotational direction about the longitudinal axis.
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公开(公告)号:US11637512B2
公开(公告)日:2023-04-25
申请号:US17351181
申请日:2021-06-17
发明人: Jan-Gerard Cornelis Van Der Toorn , Jeroen Gertruda Antonius Huinck , Han Willem Hendrik Severt , Allard Eelco Kooiker , Michaël Johannes Christiaan Ronde , Arno Maria Wellink , Shibing Liu , Ying Luo , Yixiang Wang , Chia-Yao Chen , Bohang Zhu , Jurgen Van Soest
摘要: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
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