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公开(公告)号：US11327406B2
公开(公告)日：2022-05-10
申请号：US17055215
申请日：2019-04-02
IPC分类号： G03F7/20
摘要： A method for estimating a parameter across a region on a substrate, the region being divided into a plurality of sub-regions, the method including: obtaining values of the parameter for at least two sub-regions out of the plurality of sub-regions; and estimating the parameter for a position on the region by evaluation of a function having said values of the parameter as input values, wherein the function: a) has piecewise defined base functions, wherein a single base function is defined across a sub-region; and b) is continuous between one or more adjacent sub-regions of the at least two sub-regions within the region.
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公开(公告)号：US11681231B2
公开(公告)日：2023-06-20
申请号：US17686586
申请日：2022-03-04
CPC分类号： G03F7/705 , G03F7/70616 , G03F7/70641 , G03F9/7026 , G03F9/7046 , G03F9/7076 , G03F9/7084
摘要： A method for selecting an optimal set of locations for a measurement or feature on a substrate, the method includes: defining a first candidate solution of locations, defining a second candidate solution with locations based on modification of a coordinate in a solution domain of the first candidate solution, and selecting the first and/or second candidate solution as the optimal solution according to a constraint associated with the substrate.
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公开(公告)号：US11294289B2
公开(公告)日：2022-04-05
申请号：US16339884
申请日：2017-09-21
摘要： A method for selecting an optimal set of locations for a measurement or feature on a substrate, the method includes: defining a first candidate solution of locations, defining a second candidate solution with locations based on modification of a coordinate in a solution domain of the first candidate solution, and selecting the first and/or second candidate solution as the optimal solution according to a constraint associated with the substrate.
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