公开(公告)号：US20190219932A1

公开(公告)日：2019-07-18

申请号：US16332002

申请日：2017-08-31

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Krijn Frederik BUSTRAAN ,  Yang-Shan HUANG ,  Antonius Franciscus Johannes DE GROOT ,  Minkyu KIM ,  Jasper Anne Frido Marikus SIMONS ,  Theo Anjes Maria RUIJL ,  Ronald Josephus Maria LAMERS

IPC: G03F7/20

CPC classification number: G03F7/70766 ,  G03F7/70725 ,  G03F7/70758

Abstract: A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.

公开(公告)号：US20170010544A1

公开(公告)日：2017-01-12

申请号：US15113428

申请日：2014-12-19

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING NV

Inventor： Yang-Shan HUANG ,  Minkyu KIM ,  Gerard Johannes Pieter NIJSSE

IPC: G03F7/20 ,  H02K9/00 ,  H02K3/48 ,  H01F7/10

CPC classification number: G03F7/70725 ,  G03F7/70758 ,  G03F7/70858 ,  G03F7/70875 ,  H01F7/10 ,  H02K3/24 ,  H02K3/48 ,  H02K9/005 ,  H02K9/19 ,  H02K41/031

Abstract: A coil assembly for an electromagnetic actuator or motor, includes a magnetic core including at least one pair of slots; a coil, at least partly mounted inside the at least one pair of slots; and a cooling member, the cooling member being mounted to a surface of the coil.

Abstract translation: 一种用于电磁致动器或电动机的线圈组件，包括：包含至少一对槽的磁芯; 至少部分地安装在所述至少一对槽中的线圈; 以及冷却部件，所述冷却部件安装在所述线圈的表面。