公开(公告)号：US20190219932A1

公开(公告)日：2019-07-18

申请号：US16332002

申请日：2017-08-31

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Krijn Frederik BUSTRAAN ,  Yang-Shan HUANG ,  Antonius Franciscus Johannes DE GROOT ,  Minkyu KIM ,  Jasper Anne Frido Marikus SIMONS ,  Theo Anjes Maria RUIJL ,  Ronald Josephus Maria LAMERS

IPC: G03F7/20

CPC classification number: G03F7/70766 ,  G03F7/70725 ,  G03F7/70758

Abstract: A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.

公开(公告)号：US20180356738A1

公开(公告)日：2018-12-13

申请号：US15736297

申请日：2016-04-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Antonius Franciscus Johannes DE GROOT ,  Theo Anjes Maria RUIJL ,  Christiaan Louis VALENTIN ,  Christan WERNER

IPC: G03F7/20 ,  H01L21/68 ,  H01L21/027 ,  G03B27/58

CPC classification number: G03F7/70758 ,  G03B27/58 ,  G03F7/70725 ,  G03F7/70775 ,  H01L21/027 ,  H01L21/68

Abstract: The present invention relates to a movable support (1) configured to support an object, comprising: a support plane (2) to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly comprises: a first actuator (3) configured to exert a first actuation force (F1) in a first actuation direction (A1), said first actuation direction being parallel to the support plane, a second actuator (4) configured to exert a second actuation force (F2) in a second actuation direction (A2), said second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.