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公开(公告)号：US09817320B2
公开(公告)日：2017-11-14
申请号：US15032245
申请日：2014-10-02
Applicant: ASML Netherlands B.V.
Inventor： Jaqueline Borges Nicolau , Hannah Noble , Johannes Jacobus Matheus Baselmans , Bart Smeets , Paulus Jacobus Maria Van Adrichem
CPC classification number: G03F7/70425 , G03F7/2026 , G03F7/70258 , G03F7/70433 , G03F7/705 , G03F7/70566 , G03F7/706 , G06T5/00
Abstract: A method of correcting an optical image formed by an optical system, the method including obtaining a map indicative of a polarization dependent property of the optical system across a pupil plane of the optical system for each spatial position in an image plane of the optical system, combining the map indicative of the polarization dependent property of the optical system with a radiation map of the intensity and polarization of an input radiation beam to form an image map, and using the image map to correct an optical image formed by directing the input radiation beam through the optical system.
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公开(公告)号：US10175586B2
公开(公告)日：2019-01-08
申请号：US15788860
申请日：2017-10-20
Applicant: ASML Netherlands B.V.
Inventor： Jaqueline Borges Nicolau , Hannah Noble , Johannes Jacobus Matheus Baselmans , Bart Smeets , Paulus Jacobus Maria Van Adrichem
Abstract: A method of correcting an optical image formed by an optical system, the method including obtaining a map indicative of a polarization dependent property of the optical system across a pupil plane of the optical system for each spatial position in an image plane of the optical system, combining the map indicative of the polarization dependent property of the optical system with a radiation map of the intensity and polarization of an input radiation beam to form an image map, and using the image map to correct an optical image formed by directing the input radiation beam through the optical system.
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