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公开(公告)号：US20170084360A1
公开(公告)日：2017-03-23
申请号：US15366652
申请日：2016-12-01
Applicant: ASML Netherlands B.V.
Inventor： Vahan A. Senekerimyan , Michael A. Purvis , Jie L. Ding
CPC classification number: G21K1/067 , G01J1/0214 , G01J1/0414 , G01J1/06 , G01J1/42 , G01J1/4257 , G01J1/429 , G01T1/16 , G03F7/00 , G03F7/70008 , G03F7/70033 , G03F7/7085 , H05G2/005 , H05G2/008
Abstract: A method includes generating light in a light generating chamber, causing a portion of the generated light to pass through a tube having a roughened inner surface, and detecting the portion of the generated light that has passed through the tube using a photodetector. The roughened inner surface of the tube has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. In one example, the method includes outputting a signal from the photodetector to a controller, with the signal corresponding to the detected portion of the generated light. The light generated in the light generating chamber can be extreme ultraviolet (EUV) light. In tests using roughened and non-roughened protection tubes, the roughened tube was found to minimize or essentially eliminate the contribution to EUV energy from grazing incidence reflections off the inner surface of the tube.
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2.发明授权Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modules 有权对具有光源的可靠EUV功率测量最小化掠入射反射，其包括多个管，其中心线设置在辐射区域和相应的光电检测器模块之间公开(公告)号：US09546901B2
公开(公告)日：2017-01-17
申请号：US14463605
申请日：2014-08-19
Applicant: ASML Netherlands B.V.
Inventor： Vahan A. Senekerimyan , Michael A. Purvis , Jie L. Ding
CPC classification number: G21K1/067 , G01J1/0214 , G01J1/0414 , G01J1/06 , G01J1/42 , G01J1/4257 , G01J1/429 , G01T1/16 , G03F7/00 , G03F7/70008 , G03F7/70033 , G03F7/7085 , H05G2/005 , H05G2/008
Abstract: A light source includes a light generating chamber and a collector disposed in the light generating chamber. A target material generator configured to propel a quantity of target material toward an irradiation region is disposed in front of a reflective surface of the collector. A plurality of photodetector modules is disposed external to the light generating chamber, with each of the photodetector modules being directed toward the irradiation region. A plurality of tubes is disposed between a corresponding photodetector module and the irradiation region. Each tube has a centerline directed toward the irradiation region, and each tube has a roughened inner surface. The surface roughness of the roughened inner surface is sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. A method of generating light and a method of measuring light energy also are described.
Abstract translation: 光源包括设置在光产生室中的发光室和集电体。 被配置为向照射区域推送一定量的目标材料的目标材料发生器设置在集电体的反射表面的前面。 多个光检测器模块设置在光产生室的外部，每个光检测器模块指向照射区域。 在相应的光电检测器模块和照射区域之间设置多个管。 每个管具有朝向照射区域的中心线，并且每个管具有粗糙的内表面。 粗糙的内表面的表面粗糙度足以导致消除光的放射，而不是从粗糙的内表面反射出来。 还描述了产生光的方法和测量光能的方法。
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3.发明授权公开(公告)号：US10210963B2
公开(公告)日：2019-02-19
申请号：US15366652
申请日：2016-12-01
Applicant: ASML Netherlands B.V.
Inventor： Vahan A. Senekerimyan , Michael A. Purvis , Jie L. Ding
IPC: H05G2/00 , G21K1/06 , G01J1/42 , G01T1/16 , G03F7/00 , G03F7/20 , G01J1/04 , G01J1/06 , G01J1/02
Abstract: A method includes generating light in a light generating chamber, causing a portion of the generated light to pass through a tube having a roughened inner surface, and detecting the portion of the generated light that has passed through the tube using a photodetector. The roughened inner surface of the tube has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. In one example, the method includes outputting a signal from the photodetector to a controller, with the signal corresponding to the detected portion of the generated light. The light generated in the light generating chamber can be extreme ultraviolet (EUV) light. In tests using roughened and non-roughened protection tubes, the roughened tube was found to minimize or essentially eliminate the contribution to EUV energy from grazing incidence reflections off the inner surface of the tube.
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4.发明申请公开(公告)号：US20160054174A1
公开(公告)日：2016-02-25
申请号：US14463605
申请日：2014-08-19
Applicant: ASML Netherlands B.V.
Inventor： Vahan A. Senekerimyan , Michael A. Purvis , Jie L. Ding
CPC classification number: G21K1/067 , G01J1/0214 , G01J1/0414 , G01J1/06 , G01J1/42 , G01J1/4257 , G01J1/429 , G01T1/16 , G03F7/00 , G03F7/70008 , G03F7/70033 , G03F7/7085 , H05G2/005 , H05G2/008
Abstract: A light source includes a light generating chamber and a collector disposed in the light generating chamber. A target material generator configured to propel a quantity of target material toward an irradiation region is disposed in front of a reflective surface of the collector. A plurality of photodetector modules is disposed external to the light generating chamber, with each of the photodetector modules being directed toward the irradiation region. A plurality of tubes is disposed between a corresponding photodetector module and the irradiation region. Each tube has a centerline directed toward the irradiation region, and each tube has a roughened inner surface. The surface roughness of the roughened inner surface is sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. A method of generating light and a method of measuring light energy also are described.
Abstract translation: 光源包括设置在光产生室中的发光室和集电体。 被配置为向照射区域推送一定量的目标材料的目标材料发生器设置在集电体的反射表面的前面。 多个光检测器模块设置在光产生室的外部，每个光检测器模块指向照射区域。 在相应的光电检测器模块和照射区域之间设置多个管。 每个管具有朝向照射区域的中心线，并且每个管具有粗糙的内表面。 粗糙的内表面的表面粗糙度足以导致消除光的放射，而不是从粗糙的内表面反射出来。 还描述了产生光的方法和测量光能的方法。
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