公开(公告)号：US09546901B2

公开(公告)日：2017-01-17

申请号：US14463605

申请日：2014-08-19

Applicant: ASML Netherlands B.V.

Inventor： Vahan A. Senekerimyan ,  Michael A. Purvis ,  Jie L. Ding

IPC: G01J1/42 ,  G01T1/16 ,  G03F7/00 ,  G03F7/20 ,  G01J1/04 ,  G01J1/06 ,  G01J1/02

CPC classification number: G21K1/067 ,  G01J1/0214 ,  G01J1/0414 ,  G01J1/06 ,  G01J1/42 ,  G01J1/4257 ,  G01J1/429 ,  G01T1/16 ,  G03F7/00 ,  G03F7/70008 ,  G03F7/70033 ,  G03F7/7085 ,  H05G2/005 ,  H05G2/008

Abstract: A light source includes a light generating chamber and a collector disposed in the light generating chamber. A target material generator configured to propel a quantity of target material toward an irradiation region is disposed in front of a reflective surface of the collector. A plurality of photodetector modules is disposed external to the light generating chamber, with each of the photodetector modules being directed toward the irradiation region. A plurality of tubes is disposed between a corresponding photodetector module and the irradiation region. Each tube has a centerline directed toward the irradiation region, and each tube has a roughened inner surface. The surface roughness of the roughened inner surface is sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. A method of generating light and a method of measuring light energy also are described.

Abstract translation: 光源包括设置在光产生室中的发光室和集电体。 被配置为向照射区域推送一定量的目标材料的目标材料发生器设置在集电体的反射表面的前面。 多个光检测器模块设置在光产生室的外部，每个光检测器模块指向照射区域。 在相应的光电检测器模块和照射区域之间设置多个管。 每个管具有朝向照射区域的中心线，并且每个管具有粗糙的内表面。 粗糙的内表面的表面粗糙度足以导致消除光的放射，而不是从粗糙的内表面反射出来。 还描述了产生光的方法和测量光能的方法。

公开(公告)号：US20160007434A1

公开(公告)日：2016-01-07

申请号：US14325153

申请日：2014-07-07

Applicant: ASML Netherlands B.V.

Inventor： Yezheng Tao ,  John Tom Stewart, IV ,  Jordan Jur ,  Andrew LaForge ,  Daniel Brown ,  Jason M. Arcand ,  Alexander A. Schafgans ,  Michael A. Purvis

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/006

Abstract: An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion being temporally connected to the second portion, and the first portion having a maximum energy that is less than a maximum energy of the second portion; the first portion of the modified pulse of radiation is interacted with a target material to form a modified target; and the second portion of the modified pulse of radiation is interacted with the modified target to generate plasma that emits extreme ultraviolet (EUV) light.

公开(公告)号：US10210963B2

公开(公告)日：2019-02-19

申请号：US15366652

申请日：2016-12-01

Applicant: ASML Netherlands B.V.

Inventor： Vahan A. Senekerimyan ,  Michael A. Purvis ,  Jie L. Ding

IPC: H05G2/00 ,  G21K1/06 ,  G01J1/42 ,  G01T1/16 ,  G03F7/00 ,  G03F7/20 ,  G01J1/04 ,  G01J1/06 ,  G01J1/02

Abstract: A method includes generating light in a light generating chamber, causing a portion of the generated light to pass through a tube having a roughened inner surface, and detecting the portion of the generated light that has passed through the tube using a photodetector. The roughened inner surface of the tube has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. In one example, the method includes outputting a signal from the photodetector to a controller, with the signal corresponding to the detected portion of the generated light. The light generated in the light generating chamber can be extreme ultraviolet (EUV) light. In tests using roughened and non-roughened protection tubes, the roughened tube was found to minimize or essentially eliminate the contribution to EUV energy from grazing incidence reflections off the inner surface of the tube.

公开(公告)号：US20160054174A1

公开(公告)日：2016-02-25

申请号：US14463605

申请日：2014-08-19

Applicant: ASML Netherlands B.V.

Inventor： Vahan A. Senekerimyan ,  Michael A. Purvis ,  Jie L. Ding

IPC: G01J1/42 ,  G01T1/16

CPC classification number: G21K1/067 ,  G01J1/0214 ,  G01J1/0414 ,  G01J1/06 ,  G01J1/42 ,  G01J1/4257 ,  G01J1/429 ,  G01T1/16 ,  G03F7/00 ,  G03F7/70008 ,  G03F7/70033 ,  G03F7/7085 ,  H05G2/005 ,  H05G2/008

Abstract: A light source includes a light generating chamber and a collector disposed in the light generating chamber. A target material generator configured to propel a quantity of target material toward an irradiation region is disposed in front of a reflective surface of the collector. A plurality of photodetector modules is disposed external to the light generating chamber, with each of the photodetector modules being directed toward the irradiation region. A plurality of tubes is disposed between a corresponding photodetector module and the irradiation region. Each tube has a centerline directed toward the irradiation region, and each tube has a roughened inner surface. The surface roughness of the roughened inner surface is sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. A method of generating light and a method of measuring light energy also are described.

Abstract translation: 光源包括设置在光产生室中的发光室和集电体。 被配置为向照射区域推送一定量的目标材料的目标材料发生器设置在集电体的反射表面的前面。 多个光检测器模块设置在光产生室的外部，每个光检测器模块指向照射区域。 在相应的光电检测器模块和照射区域之间设置多个管。 每个管具有朝向照射区域的中心线，并且每个管具有粗糙的内表面。 粗糙的内表面的表面粗糙度足以导致消除光的放射，而不是从粗糙的内表面反射出来。 还描述了产生光的方法和测量光能的方法。

公开(公告)号：US20170084360A1

公开(公告)日：2017-03-23

申请号：US15366652

申请日：2016-12-01

Applicant: ASML Netherlands B.V.

Inventor： Vahan A. Senekerimyan ,  Michael A. Purvis ,  Jie L. Ding

IPC: G21K1/06 ,  G01J1/06 ,  G01J1/02 ,  G01J1/42 ,  H05G2/00

CPC classification number: G21K1/067 ,  G01J1/0214 ,  G01J1/0414 ,  G01J1/06 ,  G01J1/42 ,  G01J1/4257 ,  G01J1/429 ,  G01T1/16 ,  G03F7/00 ,  G03F7/70008 ,  G03F7/70033 ,  G03F7/7085 ,  H05G2/005 ,  H05G2/008

Abstract: A method includes generating light in a light generating chamber, causing a portion of the generated light to pass through a tube having a roughened inner surface, and detecting the portion of the generated light that has passed through the tube using a photodetector. The roughened inner surface of the tube has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. In one example, the method includes outputting a signal from the photodetector to a controller, with the signal corresponding to the detected portion of the generated light. The light generated in the light generating chamber can be extreme ultraviolet (EUV) light. In tests using roughened and non-roughened protection tubes, the roughened tube was found to minimize or essentially eliminate the contribution to EUV energy from grazing incidence reflections off the inner surface of the tube.

公开(公告)号：US09357625B2

公开(公告)日：2016-05-31

申请号：US14325153

申请日：2014-07-07

Applicant: ASML Netherlands B.V.

Inventor： Yezheng Tao ,  John Tom Stewart, IV ,  Jordan Jur ,  Andrew LaForge ,  Daniel Brown ,  Jason M. Arcand ,  Alexander A. Schafgans ,  Michael A. Purvis

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/006

Abstract: An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion being temporally connected to the second portion, and the first portion having a maximum energy that is less than a maximum energy of the second portion; the first portion of the modified pulse of radiation is interacted with a target material to form a modified target; and the second portion of the modified pulse of radiation is interacted with the modified target to generate plasma that emits extreme ultraviolet (EUV) light.

Abstract translation: 产生辐射的初始脉冲; 提取辐射的初始脉冲的一部分以形成修改的辐射脉冲，所述修改的辐射脉冲包括第一部分和第二部分，所述第一部分在时间上连接到所述第二部分，并且所述第一部分具有最大值 能量小于第二部分的最大能量; 修改的辐射脉冲的第一部分与靶材料相互作用以形成修饰的靶; 并且修改的辐射脉冲的第二部分与修饰的靶相互作用以产生发射极紫外（EUV）光的等离子体。