公开(公告)号：US12117739B2

公开(公告)日：2024-10-15

申请号：US17629202

申请日：2020-06-30

Applicant: ASML Netherlands B.V.

Inventor： Bas Jansen ,  Koen Martin Willem Jan Bos ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/00 ,  H02N2/00 ,  H02N2/02 ,  H02N2/06

CPC classification number: G03F7/70783 ,  G03F7/70266 ,  G03F7/70716 ,  G03F7/70891 ,  H02N2/009 ,  H02N2/028 ,  H02N2/062

Abstract: Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.