公开(公告)号：US12210294B2

公开(公告)日：2025-01-28

申请号：US17608760

申请日：2020-05-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Hans Butler ,  Bas Jansen

IPC: G03F7/00 ,  H02N2/02 ,  H02N2/06

Abstract: An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

公开(公告)号：US11467504B2

公开(公告)日：2022-10-11

申请号：US17267708

申请日：2019-07-15

Applicant: ASML Netherlands B.V.

Inventor： Bas Jansen ,  Hans Butler ,  Alexander Pascal Dijkshoorn

IPC: G03F7/20 ,  H01L41/09 ,  H02N2/02 ,  H02N2/06

Abstract: The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.

公开(公告)号：US11789373B2

公开(公告)日：2023-10-17

申请号：US17602616

申请日：2020-03-10

Applicant: ASML Netherlands B.V.

Inventor： Bas Jansen ,  Samer Abdelmoeti Abuzeid Abdelmoeti ,  Hans Butler ,  Koen Johan Frederik Loonen ,  Aditya Singh ,  Ruben Etienne Johan Rinus Vandervelden

IPC: G03F7/00 ,  G03F7/20

CPC classification number: G03F7/70775

Abstract: The invention relates to an object positioning system including an actuator system and a measurement system. The actuator system includes an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field includes a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of the actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system includes a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.

公开(公告)号：US10416572B2

公开(公告)日：2019-09-17

申请号：US16321867

申请日：2017-06-29

Applicant: ASML NETHERLANDS B.V.

Inventor： Hans Butler ,  Wim Symens ,  Bas Jansen

IPC: G03F7/20 ,  H02N2/06

Abstract: A positioning system including: a first body; a second body; and an actuator arranged between the first body and the second body to position the first body relative to the second body, wherein the actuator includes a first piezoelectric actuator and a second piezoelectric actuator arranged in series, wherein the first piezoelectric actuator has a first hysteresis, wherein the second piezoelectric actuator has a second hysteresis smaller than the first hysteresis, and wherein the second piezoelectric actuator has a positioning range at least equal to the first hysteresis.

公开(公告)号：US12117739B2

公开(公告)日：2024-10-15

申请号：US17629202

申请日：2020-06-30

Applicant: ASML Netherlands B.V.

Inventor： Bas Jansen ,  Koen Martin Willem Jan Bos ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/00 ,  H02N2/00 ,  H02N2/02 ,  H02N2/06

CPC classification number: G03F7/70783 ,  G03F7/70266 ,  G03F7/70716 ,  G03F7/70891 ,  H02N2/009 ,  H02N2/028 ,  H02N2/062

Abstract: Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.

公开(公告)号：US11880144B2

公开(公告)日：2024-01-23

申请号：US17603812

申请日：2020-03-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Sander Jeroen Hermanussen ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Hans Butler ,  Bas Jansen ,  Michael Marinus Anna Steur

IPC: G03F7/00 ,  H01L21/687

CPC classification number: G03F7/70725 ,  G03F7/70708 ,  G03F7/70783 ,  H01L21/6875 ,  H01L21/68735 ,  H01L21/68785

Abstract: An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.

公开(公告)号：US11561479B2

公开(公告)日：2023-01-24

申请号：US17428223

申请日：2020-01-03

Applicant: ASML Netherlands B.V.

Inventor： Hans Butler ,  Bas Jansen ,  Cornelius Adrianus Lambertus De Hoon

IPC: G03F7/20 ,  G01D3/032 ,  G01P15/09 ,  G01P21/00

Abstract: The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: —receive an acceleration signal from the piezoelectric element; —electronically dampen an amplitude of the first mechanical resonance frequency; and—generate a damped acceleration signal, b) an extender configured to: —receive the damped acceleration signal; —extend the frequency response; and—output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.