公开(公告)号：US09380691B2

公开(公告)日：2016-06-28

申请号：US14194027

申请日：2014-02-28

Applicant: ASML Netherlands B.V.

Inventor： Yezheng Tao ,  Daniel J. W. Brown ,  Alexander Schafgans ,  Michael David Caudill ,  Daniel J. Golich ,  Richard L. Sandstrom ,  Yoshiho Amada

IPC: H05G2/00 ,  H01S3/10 ,  H01S3/13

CPC classification number: H05G2/008 ,  H01S3/1003 ,  H01S3/1301 ,  H01S3/1305 ,  H05G2/003

Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.

Abstract translation: 一种用于极紫外（EUV）光源的系统包括光放大器，其包括位于光束路径上的增益介质，所述光放大器被配置为在输入处接收光束并且向EUV光源发射输出光束 输出 反馈系统，其测量输出光束的性质并基于测量的属性产生反馈信号; 以及位于所述光束路径中并被配置为接收所述反馈信号并响应于所述反馈信号调整所述输出光束的特性的自适应光学器件。

公开(公告)号：US20150250045A1

公开(公告)日：2015-09-03

申请号：US14194027

申请日：2014-02-28

Applicant: ASML Netherlands B.V.

Inventor： Yezheng Tao ,  Daniel J.W. Brown ,  Alexander Schafgans ,  Michael David Caudill ,  Daniel J. Golich ,  Richard L. Sandstrom ,  Yoshiho Amada

IPC: H05G2/00 ,  H01S3/13 ,  H01S3/10

CPC classification number: H05G2/008 ,  H01S3/1003 ,  H01S3/1301 ,  H01S3/1305 ,  H05G2/003

Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.

Abstract translation: 一种用于极紫外（EUV）光源的系统包括光放大器，其包括位于光束路径上的增益介质，所述光放大器被配置为在输入处接收光束并且向EUV光源发射输出光束 输出 反馈系统，其测量输出光束的性质并基于测量的属性产生反馈信号; 以及位于所述光束路径中并被配置为接收所述反馈信号并响应于所述反馈信号调整所述输出光束的特性的自适应光学器件。