公开(公告)号：US20160165709A1

公开(公告)日：2016-06-09

申请号：US14562237

申请日：2014-12-05

Applicant: ASML Netherlands B.V.

Inventor： Yezheng Tao ,  Daniel John William Brown ,  Daniel J. Golich ,  Michael Kats ,  John T. Stewart ,  Rostislav Rokitski

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2383 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006

Abstract: A method and apparatus for protecting the seed laser a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed. An isolation stage positioned on an optical path diverts light reflected from further components in the LPP EUV light system from reaching the seed laser. The isolation stage comprises two AOMs that are separated by a delay line. The AOMs, when open, direct light onto the optical path and, when closed, direct light away from the optical path. The delay introduced by the delay line is determined so that the opening and the closing of the AOMs can be timed to direct a forward-moving pulse onto the optical path and to divert reflected light at other times. The isolation stage can be positioned between gain elements to prevent amplified reflected light from reaching the seed laser and other potentially harmful effects.

Abstract translation: 公开了一种用于保护激光产生等离子体（LPP）极紫外（EUV）光系统的种子激光器的方法和装置。 位于光路上的隔离级将从LPP EUV光系统中的其它部件反射的光转移到种子激光器。 隔离级包括由延迟线分开的两个AOM。 AOM在打开时将光线引导到光路上，并且在关闭时将光引导离开光路。 确定由延迟线引入的延迟，使得可以定时将AOM的打开和关闭定时以将向前移动的脉冲引导到光路上并在其它时间转移反射光。 隔离级可以位于增益元件之间，以防止放大的反射光到达种子激光器和其他潜在的有害影响。