公开(公告)号：US20230236518A1

公开(公告)日：2023-07-27

申请号：US18008283

申请日：2021-06-09

申请人： ASML Netherlands B.V. ,  ASML HOLDING N.V.

发明人： Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN ,  Koos VAN BERKEL ,  Marcus Adrianus VAN DE KERKHOF ,  Roger Franciscus Mattheus Maria HAMELINCK ,  Shahab SHERVIN ,  Marinus Augustinus Christiaan VERSCHUREN ,  Johannes Bernardus Charles ENGELEN ,  Matthias KRUIZINGA ,  Tammo UITTERDIJK ,  Oleksiy Sergiyovich GALAKTIONOV ,  Kjeld Gertrudus Hendrikus JANSSEN ,  Johannes Adrianus Cornelis Maria PIJNENBURG ,  Peter VAN DELFT

IPC分类号： G03F7/00

CPC分类号： G03F7/70825 ,  G03F7/70708

摘要： An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.

公开(公告)号：US20240234196A9

公开(公告)日：2024-07-11

申请号：US18547470

申请日：2022-02-03

申请人： ASML Netherlands B.V.

发明人： Marinus Augustinus Christiaan VERSCHUREN ,  Thomas POIESZ

IPC分类号： H01L21/687 ,  G03F7/00 ,  H01L21/67 ,  H01L21/683

CPC分类号： H01L21/68721 ,  G03F7/70708 ,  H01L21/67028 ,  H01L21/6833

摘要： A substrate restraining system comprising: a substrate table and a plurality of circumferentially arranged restrainers each comprising a spring, wherein the spring has a proximal end and a distal end, wherein the distal end of the spring is radially displacable, and wherein a base of the proximal end of the spring is fixed to the substrate table at a fixing location.

公开(公告)号：US20240136218A1

公开(公告)日：2024-04-25

申请号：US18547470

申请日：2022-02-03

申请人： ASML Netherlands B.V.

发明人： Marinus Augustinus Christiaan VERSCHUREN ,  Thomas POIESZ

IPC分类号： H01L21/687 ,  G03F7/00 ,  H01L21/67 ,  H01L21/683

CPC分类号： H01L21/68721 ,  G03F7/70708 ,  H01L21/67028 ,  H01L21/6833

摘要： A substrate restraining system comprising: a substrate table and a plurality of circumferentially arranged restrainers each comprising a spring, wherein the spring has a proximal end and a distal end, wherein the distal end of the spring is radially displacable, and wherein a base of the proximal end of the spring is fixed to the substrate table at a fixing location.