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公开(公告)号：US20060187522A1
公开(公告)日：2006-08-24
申请号：US11064359
申请日：2005-02-22
申请人： Adel Jilani , James Guo , Charles Schmidt , Steve Hanson , Jeff Obert
发明人： Adel Jilani , James Guo , Charles Schmidt , Steve Hanson , Jeff Obert
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： An electron beam actuated light modulator, including an actuatable mirror element carried by a pedestal and hinge portion, having an electrostatically more neutral first position and an electrostatically more charged second position, the mirror being actuatable in a first direction from the first position to the second position by charge accumulation, and is actuatable in a second direction from the second position to the first position by dissipation of the charge accumulation and a stop element positioned adjacent the mirror element in the first position, configured to limit movement of the mirror element in the second direction after the mirror reaches the first position traveling in the second direction.
摘要翻译： 一种电子束致动光调制器，包括由基座和铰链部分承载的可致动镜元件，其具有静电更中立的第一位置和静电更充电的第二位置，所述反射镜可在从第一位置到第二位置的第一方向上致动 并且可以通过电荷累积的消散从第二位置到第一位置的第二方向致动，并且在第一位置中邻近镜元件定位的止动元件被配置为限制镜元件在 反射镜到达第二方向的第二方向。
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公开(公告)号：US06894824B2
公开(公告)日：2005-05-17
申请号：US10678007
申请日：2003-10-02
申请人： James Guo , Adel Jilani , Kenneth Faase
发明人： James Guo , Adel Jilani , Kenneth Faase
CPC分类号： G02B26/0841 , Y10S359/904
摘要： A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.
摘要翻译： 提供构造成增加其开关频率的微镜装置的方法和装置。 微反射镜装置包括具有至少一个地址电极的衬底，该至少一个寻址电极位于衬底上方以提供静电力，并且包括定位在衬底上并在衬底上方向上延伸的至少一个支撑构件。 微镜装置还包括反射镜和弹簧构件。 镜子设置在至少一个地址电极上并且耦合到至少一个支撑构件。 响应于至少一个寻址电极将反射镜施加静电力，镜被配置为朝向衬底偏转。 弹簧构件在衬底和反射镜之间间隔开并且联接到至少一个支撑构件。 弹簧构件可操作以与镜子分离地朝向衬底偏转。
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公开(公告)号：US20050073736A1
公开(公告)日：2005-04-07
申请号：US10678007
申请日：2003-10-02
申请人： James Guo , Adel Jilani , Kenneth Faase
发明人： James Guo , Adel Jilani , Kenneth Faase
CPC分类号： G02B26/0841 , Y10S359/904
摘要： A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.
摘要翻译： 提供构造成增加其开关频率的微镜装置的方法和装置。 微反射镜装置包括具有至少一个地址电极的衬底，该至少一个寻址电极位于衬底上方以提供静电力，并且包括定位在衬底上并在衬底上方向上延伸的至少一个支撑构件。 微镜装置还包括反射镜和弹簧构件。 镜子设置在至少一个地址电极上并且耦合到至少一个支撑构件。 响应于至少一个寻址电极将反射镜施加静电力，镜被配置为朝向衬底偏转。 弹簧构件在衬底和反射镜之间间隔开并且联接到至少一个支撑构件。 弹簧构件可操作以与镜子分离地朝向衬底偏转。
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4.发明授权公开(公告)号：US06999228B2
公开(公告)日：2006-02-14
申请号：US10793977
申请日：2004-03-05
申请人： Kenneth Faase , Adel Jilani , James Guo , Tony S. Cruz-Uribe
发明人： Kenneth Faase , Adel Jilani , James Guo , Tony S. Cruz-Uribe
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0109 , B81B2203/058 , G02B1/06 , Y10S359/904
摘要： A method and apparatus providing a micro-mirror device configured to increase actuation speed thereof. The micro-mirror device includes a substrate, a mirror, a spring member and at least one adjacent micro-mirror device. The mirror is suspended over the substrate and configured to deflect in response to an actuation force. The spring member is suspended between the substrate and the mirror. Further, the spring member is configured to store energy upon being deflected by the mirror and is configured to release the stored energy to force the mirror to another position. The at least one adjacent micro-mirror device is positioned over the substrate adjacent the mirror and is configured to suspend the spring member.
摘要翻译： 提供构造成增加其致动速度的微镜装置的方法和装置。 微反射镜装置包括基板，反射镜，弹簧构件和至少一个相邻的微反射镜装置。 反射镜悬挂在基板上并被配置为响应于致动力而偏转。 弹簧构件悬挂在基板和反射镜之间。 此外，弹簧构件构造成在被反射镜偏转时存储能量，并且被配置为释放存储的能量以迫使反射镜进入另一位置。 所述至少一个相邻的微反射镜装置位于与所述反射镜相邻的所述基板上方并且被配置为悬挂所述弹簧构件。
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5.发明申请公开(公告)号：US20050195464A1
公开(公告)日：2005-09-08
申请号：US10793977
申请日：2004-03-05
申请人： Kenneth Faase , Adel Jilani , James Guo , Torry Cruz-Uribe
发明人： Kenneth Faase , Adel Jilani , James Guo , Torry Cruz-Uribe
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0109 , B81B2203/058 , G02B1/06 , Y10S359/904
摘要： A method and apparatus providing a micro-mirror device configured to increase actuation speed thereof. The micro-mirror device includes a substrate, a mirror, a spring member and at least one adjacent micro-mirror device. The mirror is suspended over the substrate and configured to deflect in response to an actuation force. The spring member is suspended between the substrate and the mirror. Further, the spring member is configured to store energy upon being deflected by the mirror and is configured to release the stored energy to force the mirror to another position. The at least one adjacent micro-mirror device is positioned over the substrate adjacent the mirror and is configured to suspend the spring member.
摘要翻译： 提供构造成增加其致动速度的微镜装置的方法和装置。 微反射镜装置包括基板，反射镜，弹簧构件和至少一个相邻的微反射镜装置。 反射镜悬挂在基板上并被配置为响应于致动力而偏转。 弹簧构件悬挂在基板和反射镜之间。 此外，弹簧构件构造成在被反射镜偏转时存储能量，并且被配置为释放存储的能量以迫使反射镜进入另一位置。 所述至少一个相邻的微反射镜装置位于与所述反射镜相邻的所述基板上方并且被配置为悬挂所述弹簧构件。
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公开(公告)号：US07046415B2
公开(公告)日：2006-05-16
申请号：US10719222
申请日：2003-11-21
申请人： Adel Jilani , James Guo , Kenneth Faase
发明人： Adel Jilani , James Guo , Kenneth Faase
CPC分类号： G02B26/0841
摘要： A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.
摘要翻译： 微镜装置包括微镜和支撑微镜的挠曲弹簧。 弯曲弹簧构造成在微反射镜移动期间存储势能，作为动能释放，以在微反射镜被重新定向时驱动微反射镜的移动。
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公开(公告)号：US20050122562A1
公开(公告)日：2005-06-09
申请号：US11039418
申请日：2005-01-19
申请人： James Guo , Adel Jilani , Kenneth Faase
发明人： James Guo , Adel Jilani , Kenneth Faase
CPC分类号： G02B26/0841 , Y10S359/904
摘要： A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.
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公开(公告)号：US20050111069A1
公开(公告)日：2005-05-26
申请号：US10719222
申请日：2003-11-21
申请人： Adel Jilani , James Guo , Kenneth Faase
发明人： Adel Jilani , James Guo , Kenneth Faase
CPC分类号： G02B26/0841
摘要： A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.
摘要翻译： 微镜装置包括微镜和支撑微镜的挠曲弹簧。 弯曲弹簧构造成在微反射镜移动期间存储势能，作为动能释放，以在微反射镜被重新定向时驱动微反射镜的移动。
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公开(公告)号：US06970282B2
公开(公告)日：2005-11-29
申请号：US11039418
申请日：2005-01-19
申请人： James Guo , Adel Jilani , Kenneth Faase
发明人： James Guo , Adel Jilani , Kenneth Faase
CPC分类号： G02B26/0841 , Y10S359/904
摘要： A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.
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